JPS6189707A - 表面弾性波装置 - Google Patents
表面弾性波装置Info
- Publication number
- JPS6189707A JPS6189707A JP21056684A JP21056684A JPS6189707A JP S6189707 A JPS6189707 A JP S6189707A JP 21056684 A JP21056684 A JP 21056684A JP 21056684 A JP21056684 A JP 21056684A JP S6189707 A JPS6189707 A JP S6189707A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- saw
- semiconductor
- acoustic wave
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 13
- 239000004065 semiconductor Substances 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims description 2
- 230000002238 attenuated effect Effects 0.000 abstract description 3
- 230000001902 propagating effect Effects 0.000 abstract description 2
- 208000037516 chromosome inversion disease Diseases 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000002250 progressing effect Effects 0.000 abstract 1
- 239000011358 absorbing material Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
- H03H9/0285—Means for compensation or elimination of undesirable effects of reflections of triple transit echo
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21056684A JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21056684A JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6189707A true JPS6189707A (ja) | 1986-05-07 |
JPH033410B2 JPH033410B2 (enrdf_load_stackoverflow) | 1991-01-18 |
Family
ID=16591441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21056684A Granted JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6189707A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210908A (ja) * | 1988-06-28 | 1990-01-16 | Clarion Co Ltd | 弾性表面波素子 |
-
1984
- 1984-10-09 JP JP21056684A patent/JPS6189707A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210908A (ja) * | 1988-06-28 | 1990-01-16 | Clarion Co Ltd | 弾性表面波素子 |
Also Published As
Publication number | Publication date |
---|---|
JPH033410B2 (enrdf_load_stackoverflow) | 1991-01-18 |
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