JPH033410B2 - - Google Patents
Info
- Publication number
- JPH033410B2 JPH033410B2 JP21056684A JP21056684A JPH033410B2 JP H033410 B2 JPH033410 B2 JP H033410B2 JP 21056684 A JP21056684 A JP 21056684A JP 21056684 A JP21056684 A JP 21056684A JP H033410 B2 JPH033410 B2 JP H033410B2
- Authority
- JP
- Japan
- Prior art keywords
- saw
- comb
- semiconductor substrate
- acoustic wave
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010897 surface acoustic wave method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 2
- 239000011358 absorbing material Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
- H03H9/0285—Means for compensation or elimination of undesirable effects of reflections of triple transit echo
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21056684A JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21056684A JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6189707A JPS6189707A (ja) | 1986-05-07 |
JPH033410B2 true JPH033410B2 (enrdf_load_stackoverflow) | 1991-01-18 |
Family
ID=16591441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21056684A Granted JPS6189707A (ja) | 1984-10-09 | 1984-10-09 | 表面弾性波装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6189707A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210908A (ja) * | 1988-06-28 | 1990-01-16 | Clarion Co Ltd | 弾性表面波素子 |
-
1984
- 1984-10-09 JP JP21056684A patent/JPS6189707A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6189707A (ja) | 1986-05-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH033411B2 (enrdf_load_stackoverflow) | ||
KR100289784B1 (ko) | 표면 음파 장치 | |
KR19990024026A (ko) | 탄성 표면파 필터 | |
US4342011A (en) | Surface acoustic wave device | |
EP0031685B1 (en) | Surface acoustic wave device | |
US4096455A (en) | Surface wave termination for saw device | |
JP3106912B2 (ja) | 端面反射型表面波装置の製造方法 | |
US4188596A (en) | Elastic surface wave device | |
US4684841A (en) | Saw devices including resistive films | |
JPH033410B2 (enrdf_load_stackoverflow) | ||
US5710529A (en) | Surface acoustic wave filer device having a cascade filter structure and a piezoelectric substrate having mirror-polished surfaces | |
JPH026670Y2 (enrdf_load_stackoverflow) | ||
JPH0410764B2 (enrdf_load_stackoverflow) | ||
US5444322A (en) | Elastic convolver | |
US4258342A (en) | Elastic surface wave device | |
JPS5855692Y2 (ja) | 表面波フイルタ | |
US4330767A (en) | Surface acoustic wave device | |
JP3341407B2 (ja) | 端面反射型表面波装置 | |
JPH07162054A (ja) | 圧電薄膜の形成方法 | |
JPH0232806B2 (ja) | Danseihyomenhasochi | |
JP3343442B2 (ja) | 弾性表面波変換器 | |
JPH0537290A (ja) | インターデジタルトランスジユーサーおよび弾性表面波フイルタ | |
JPH0214811B2 (enrdf_load_stackoverflow) | ||
JPS60256214A (ja) | 弾性波装置 | |
JPS587704Y2 (ja) | 弾性表面波装置 |