JPS6189547A - Ｘ線分光素子 - Google Patents
Ｘ線分光素子Info
- Publication number
- JPS6189547A JPS6189547A JP59209897A JP20989784A JPS6189547A JP S6189547 A JPS6189547 A JP S6189547A JP 59209897 A JP59209897 A JP 59209897A JP 20989784 A JP20989784 A JP 20989784A JP S6189547 A JPS6189547 A JP S6189547A
- Authority
- JP
- Japan
- Prior art keywords
- spectroscopic element
- rays
- ray
- layer
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 8
- 238000000441 X-ray spectroscopy Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 239000010703 silicon Substances 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052799 carbon Inorganic materials 0.000 abstract description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052721 tungsten Inorganic materials 0.000 abstract description 7
- 239000010937 tungsten Substances 0.000 abstract description 7
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 238000002441 X-ray diffraction Methods 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 230000001186 cumulative effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59209897A JPS6189547A (ja) | 1984-10-08 | 1984-10-08 | Ｘ線分光素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59209897A JPS6189547A (ja) | 1984-10-08 | 1984-10-08 | Ｘ線分光素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6189547A true JPS6189547A (ja) | 1986-05-07 |
| JPH058800B2 JPH058800B2 (enrdf_load_stackoverflow) | 1993-02-03 |
Family
ID=16580451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59209897A Granted JPS6189547A (ja) | 1984-10-08 | 1984-10-08 | Ｘ線分光素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6189547A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01213599A (ja) * | 1988-02-23 | 1989-08-28 | Nippon Telegr & Teleph Corp <Ntt> | 反射型回折格子 |
| JP2011506929A (ja) * | 2007-12-07 | 2011-03-03 | ゼネラル・エレクトリック・カンパニイ | 光学装置を用いた多重エネルギ・イメージング・システム及び方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178342A (ja) * | 1984-02-24 | 1985-09-12 | Shimadzu Corp | Ｘ線分光用結晶 |
-
1984
- 1984-10-08 JP JP59209897A patent/JPS6189547A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178342A (ja) * | 1984-02-24 | 1985-09-12 | Shimadzu Corp | Ｘ線分光用結晶 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01213599A (ja) * | 1988-02-23 | 1989-08-28 | Nippon Telegr & Teleph Corp <Ntt> | 反射型回折格子 |
| JP2011506929A (ja) * | 2007-12-07 | 2011-03-03 | ゼネラル・エレクトリック・カンパニイ | 光学装置を用いた多重エネルギ・イメージング・システム及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058800B2 (enrdf_load_stackoverflow) | 1993-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |