JPS6188237U - - Google Patents
Info
- Publication number
- JPS6188237U JPS6188237U JP17459484U JP17459484U JPS6188237U JP S6188237 U JPS6188237 U JP S6188237U JP 17459484 U JP17459484 U JP 17459484U JP 17459484 U JP17459484 U JP 17459484U JP S6188237 U JPS6188237 U JP S6188237U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor
- hanger
- semiconductor wafers
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
Description
第１図及び第２図は本考案の一実施例の半導体
製造装置を示す側断面図及びＡ−Ａ線に沿う拡大
断面図、第３図及び第４図は第１図の装置の要部
のキヤリア搭載前後の各拡大断面図である。第５
図及び第６図は一般的キヤリアの側面図及びＢ−
Ｂ線に沿う断面図、第７図及び第８図は従来の半
導体ウエーハ液処理装置の側断面図及びＣ−Ｃ線
に沿う拡大断面図である。
１……キヤリア、５……半導体ウエーハ、９…
…処理液、１０……キヤリアハンガ、１１……ウ
エーハ回転機構、１３……回転ローラ。
1 and 2 are a side sectional view and an enlarged sectional view taken along line A-A of a semiconductor manufacturing apparatus according to an embodiment of the present invention, and FIGS. 3 and 4 are main parts of the apparatus shown in FIG. 1. FIG. 3 is an enlarged cross-sectional view of the vehicle before and after the carrier is installed. Fifth
Figure 6 is a side view of a general carrier and B-
A sectional view taken along line B, FIGS. 7 and 8 are a side sectional view of a conventional semiconductor wafer liquid processing apparatus, and an enlarged sectional view taken along line C-C. 1...Carrier, 5...Semiconductor wafer, 9...
...Processing liquid, 10...Carrier hanger, 11...Wafer rotation mechanism, 13...Rotating roller.
Claims (1)
したキヤリアを搭載して処理液に浸漬するキヤリ
アハンガに、前記キヤリア内の各半導体ウエーハ
の外周に回転ローラを当接させて半導体ウエーハ
をキヤリア内で回転させるウエーハ回転機構を付
設したことを特徴とする半導体製造装置。 A carrier hanger in which a plurality of semiconductor wafers arranged and housed at a predetermined pitch is mounted and immersed in a processing liquid is placed on a carrier hanger, and a rotating roller is brought into contact with the outer periphery of each semiconductor wafer in the carrier to rotate the semiconductor wafers within the carrier. A semiconductor manufacturing device characterized by being equipped with a wafer rotation mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17459484U JPS6188237U (en) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17459484U JPS6188237U (en) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188237U true JPS6188237U (en) | 1986-06-09 |
Family
ID=30732213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17459484U Pending JPS6188237U (en) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188237U (en) |
-
1984
- 1984-11-16 JP JP17459484U patent/JPS6188237U/ja active Pending