JPS6186495A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6186495A
JPS6186495A JP59209475A JP20947584A JPS6186495A JP S6186495 A JPS6186495 A JP S6186495A JP 59209475 A JP59209475 A JP 59209475A JP 20947584 A JP20947584 A JP 20947584A JP S6186495 A JPS6186495 A JP S6186495A
Authority
JP
Japan
Prior art keywords
bell jar
lamp houses
mentioned
phase growth
assembly body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59209475A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249280B2 (enExample
Inventor
Masayuki Nozawa
野沢　昌幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP59209475A priority Critical patent/JPS6186495A/ja
Publication of JPS6186495A publication Critical patent/JPS6186495A/ja
Publication of JPH0249280B2 publication Critical patent/JPH0249280B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP59209475A 1984-10-05 1984-10-05 気相成長装置 Granted JPS6186495A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59209475A JPS6186495A (ja) 1984-10-05 1984-10-05 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59209475A JPS6186495A (ja) 1984-10-05 1984-10-05 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6186495A true JPS6186495A (ja) 1986-05-01
JPH0249280B2 JPH0249280B2 (enExample) 1990-10-29

Family

ID=16573462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59209475A Granted JPS6186495A (ja) 1984-10-05 1984-10-05 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6186495A (enExample)

Also Published As

Publication number Publication date
JPH0249280B2 (enExample) 1990-10-29

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