JPS6184528A - Temperature measuring instrument - Google Patents
Temperature measuring instrumentInfo
- Publication number
- JPS6184528A JPS6184528A JP59206731A JP20673184A JPS6184528A JP S6184528 A JPS6184528 A JP S6184528A JP 59206731 A JP59206731 A JP 59206731A JP 20673184 A JP20673184 A JP 20673184A JP S6184528 A JPS6184528 A JP S6184528A
- Authority
- JP
- Japan
- Prior art keywords
- radiant energy
- measuring body
- scanning
- thermometer
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 claims abstract description 46
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims description 25
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/48—Thermography; Techniques using wholly visual means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
- G01J5/802—Calibration by correcting for emissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
（１）発明の分野
この発明は、走査形放射温度計を用いたフィルム等の半
透明体の測定物体の温度測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention The present invention relates to an apparatus for measuring the temperature of a translucent object such as a film using a scanning radiation thermometer.
（２）従来技術
出願人は、不透明体の物体について、たとえば特開昭５
７−１６１５２１号公報にあるように、比較熱板と測定
物体との距離を変化させたときの放射検出器の出力変化
から測定物体の放射率、温度を求める方法を提案してい
る。(2) Prior Art Applicants have described, for example, Japanese Patent Laid-Open No. 5
No. 7-161521 proposes a method of determining the emissivity and temperature of a measurement object from changes in the output of a radiation detector when the distance between the comparison hot plate and the measurement object is changed.
しかしながら、この方法では、比較熱板を測定する装置
が大型なものとなり、半透明体についての測定は難しく
、また測定物体の広い範囲での温度パターンの測定は困
難である等の問題点を生じている。 ゛
（３）発明の目的
この発明の目的は、以上の点に浅み、より簡便に半透明
の測定物体の広い範囲での温度の測定を可能とした温度
測定装置を提供することである。However, this method requires a large device to measure the comparative hot plate, making it difficult to measure semi-transparent objects, and making it difficult to measure temperature patterns over a wide range of objects. ing. (3) Purpose of the Invention It is an object of the present invention to provide a temperature measuring device that is shallower than the above and can more easily measure the temperature of a translucent object over a wide range.
（４）発明の概要
この発明は、走査形放射温度計に測定物体からの放射エ
ネルギーが入射したときの第１の検出値、り〕１の放射
源からの放射エネルギーが測定物体で反射して入射した
ときの第２の検出値、および第２の放射源からの放射エ
ネルギーが測定物体を透過して入射したときの第３の検
出値に暴いて測定物体の放射率を求め、この放射率から
測定物体の温度を求めるようにした温度測定装置である
。(4) Summary of the Invention This invention provides a first detection value when radiant energy from a measurement object is incident on a scanning radiation thermometer; The emissivity of the measurement object is determined by calculating the second detected value when the radiation energy from the second radiation source enters the measurement object and the third detection value when the radiation energy from the second radiation source passes through the measurement object and enters the measurement object. This is a temperature measuring device that determines the temperature of a measured object from
（５）発明の実施例
第１図は、この発明の一実施例を示す構成説明図である
。(5) Embodiment of the Invention FIG. 1 is an explanatory diagram showing an embodiment of the invention.
図において、１は、紙面に対して垂直に走行するフィル
ムのような半透明体の測定物体、２は、測定物体１の幅
方向を走査して測定物体１からの放射エネルギーを検出
する走査形放射温度計、３１．３２は、走査形放射湿度
計２の走査線上の測定物体１をはさんだ両側に位置し走
査形放射温度計２の走査領域に放射エネルギーを放射す
る第１の放射源、および第２の放射源、４は、走査形放
射温度計２からの出力信号が供給され、所定の演痺処理
を行う、アナログ回路、マイクロコンピュータ、パーソ
ナルコンピュータ等を利用した演算手段である。In the figure, 1 is a translucent measuring object such as a film that runs perpendicular to the paper surface, and 2 is a scanning type that scans the width direction of the measuring object 1 to detect the radiant energy from the measuring object 1. The radiation thermometer 31, 32 is a first radiation source that is located on both sides of the measurement object 1 on the scanning line of the scanning radiation thermometer 2 and radiates radiant energy to the scanning area of the scanning radiation thermometer 2. The second radiation source 4 is a calculation means using an analog circuit, a microcomputer, a personal computer, etc., which is supplied with the output signal from the scanning radiation thermometer 2 and performs a predetermined numbing process.
なＪ３、第１の放射源３１は、走査形成（ト）温度Ｓｔ
２の設けである側に近接して設けられており、第２の１
ＪＩｉ射源３２は、測定物体１をはさんで対称的な位置
に設けられており、その反射、透過位置は近づけておく
のが望ましく、たとえは、その中間位置からのｆｉｌ
！）Ｊエネルギーを測定物体１からの放射エネルギーの
代表値とする。J3, the first radiation source 31 has a scanning formation temperature St
It is provided close to the side where the second one is provided, and the second
The JIi radiation sources 32 are provided at symmetrical positions across the measurement object 1, and it is desirable to keep their reflection and transmission positions close to each other.
! ) Let J energy be the representative value of the radiant energy from the measurement object 1.
測定物体１の温度をＴ１放射率をε、反射率をρ、透化
率をτ、第１の放射源３１の温度を丁１、第２の放射源
３２の温度をＴ２、走査形放射温度計２の出力信号をＥ
；、ｉ度丁の黒体の放射エネルギーをＥ （Ｔ）とする
。The temperature of the measurement object 1 is T1, the emissivity is ε, the reflectance is ρ, the transmittance is τ, the temperature of the first radiation source 31 is T1, the temperature of the second radiation source 32 is T2, and the scanning radiation temperature A total of 2 output signals are
; , let E (T) be the radiant energy of a blackbody with i degrees.
走査形放射温度計２が、測定物体１を走査すると第２図
で示すように、測定物体１を見るためのやｆ＋高いプラ
トー上の出力Ｅ＋（たとえば中央の出力を代表値とする
）、中央付近の両側で第１、第２の放射源３１．３２に
ついてのピーク値Ｅ２、Ｅ３が検出される。When the scanning radiation thermometer 2 scans the measurement object 1, as shown in FIG. Peak values E2, E3 for the first and second radiation sources 31.32 are detected on both sides in the vicinity.
つまり、走査形放射温度計２が、測定物体１のみを見た
ときの検出値をＥｌ、第１、第２の放射源３１．３２を
見たときの検出値をＥ２、Ｅ３とすれば、次式が成り立
つ。In other words, if the detection value when the scanning radiation thermometer 2 looks only at the measurement object 1 is El, and the detection values when looking at the first and second radiation sources 31 and 32 are E2 and E3, The following formula holds.
Ｅｌ−εＥ （Ｔ）・・・・・・・・・・・・・・・・
・・・・・・・・・・・・・・（１）Ｅ ２− ε Ｅ
（Ｔ） ＋ ρ Ｅ（Ｔ＋） ・・・ ・
・・ ・・・ （２）Ｅ３−εＥ （Ｔ＞＋τＥ（Ｔ２
）・・・・・・・・・（３）ここで、（１）式右辺第１
項は測定物体１自体からの放射エネルギー、（２）式右
辺の第２項は第１の放射源３１からの放射エネルギーが
測定物体１を反射する寄与分、（３）式右辺第２項は、
第２の放射′ａ３２からの放射エネルギーが測定物体１
を透過する寄与分である。El−εE (T)・・・・・・・・・・・・・・・
・・・・・・・・・・・・・・・(1) E 2- ε E
(T) + ρ E(T+) ・・・ ・
... (2) E3-εE (T>+τE(T2
)・・・・・・・・・(3) Here, the first right side of equation (1)
The term is the radiant energy from the measuring object 1 itself, the second term on the right side of equation (2) is the contribution of the radiant energy from the first radiation source 31 reflecting off the measuring object 1, and the second term on the right side of equation (3) is ,
The radiant energy from the second radiation 'a32
This is the contribution that passes through.
（１）、（２）式を辺々差し引くと次式が１０られる。By subtracting equations (1) and (2), the following equation is obtained as 10.
Ｅ２−Ｅｌ−ρＥ（丁１） Ｅ ２−Ｅ １ ρ＝□ ・・・・・・・・・（４）Ｅ（Ｔ＋） （１）、（３）式を辺々差し引くと次式か得られる。E2-El-ρE (Ding 1) E2-E1 ρ＝□ ・・・・・・・・・(4) E(T+) By subtracting equations (1) and (3), the following equation is obtained.
Ｅ３−Ｅｌ−τＥ（Ｔ２）
３ Ｅｌ
τ＝□ ・・・・・・・・・（５）
Ｅ（Ｔ２）
（４）、（５）式の右辺は、測定により求まり、これら
から、ＰＩｉ射率εは、次式で求まる。E3-El-τE(T2) 3 El τ=□ ・・・・・・・・・(5) E(T2) The right sides of equations (4) and (5) are found by measurement, and from these, the PIi radiation The rate ε is determined by the following formula.
ε＝１−ρ−τ ・・・・・・・・・（６）
ここで、（１）を書き直すと、
Ｅ （Ｔ） ＝□ ・・・・・・・・・・・・
（７）ε
となり、この（７）式に、〈６ン式を代入し、測定物体
１の真温度（Ｔ）を求めることができる。ε=1−ρ−τ ・・・・・・・・・(6)
Now, if we rewrite (1), E (T) =□ ・・・・・・・・・・・・
(7) ε By substituting the equation (6) into this equation (7), the true temperature (T) of the measuring object 1 can be obtained.
つまり、走査形放射温度計２が測定物体１を１回走査す
ると第２図のような出力信号が得られ、この出力信号Ｅ
Ｉ、Ｅ２、Ｅ３に暴いて、（４）、（５）、（６）、（
７）式の演算を演算手段４で行い、ε、Ｔを求める。な
お、第１、第２の放射源３１．３２の温度は適当な温度
検出器で検出して求め、ｉＥ ＩＩ手段４に供給すれば
よい。In other words, when the scanning radiation thermometer 2 scans the measurement object 1 once, an output signal as shown in FIG. 2 is obtained, and this output signal E
Reveal I, E2, E3, (4), (5), (6), (
7) The calculation means 4 calculates ε and T by calculating the equation. Incidentally, the temperatures of the first and second radiation sources 31 and 32 may be detected and determined using a suitable temperature detector and supplied to the iE II means 4.
このように、２つのａ射源３１．３２を利用して、測定
物体１の放射率εを求め、測定物体１の各点の温度Ｔを
求めることができる。。あらかじめ、εを求めた後は、
放射源３１．３２にシャッタをし、連続測定を行うよう
にしてもよい。In this way, by using the two a radiation sources 31 and 32, the emissivity ε of the measurement object 1 can be determined, and the temperature T at each point on the measurement object 1 can be determined. . After calculating ε in advance,
The radiation sources 31, 32 may be shuttered to perform continuous measurements.
また、走査形放射温度計２が、−軸（−次元）走査でな
く、而（二次元）走査であっても、その測定領域内に第
１、第２の放射源３１．３２の放射エネルギーを放射し
、同様の演算で温度分布の測定ができる。Furthermore, even if the scanning radiation thermometer 2 performs two-dimensional scanning rather than negative-axis (-dimensional) scanning, the radiant energy of the first and second radiation sources 31 and 32 is present within the measurement area. , and temperature distribution can be measured using similar calculations.
（６）発明の効果
２つの放射源および走査形放射１度計を用い、敢α１率
を求め、次いで温度を測定するようにしているので、簡
単な構成で半透明体の測定物体の広い範囲についての温
度分布を高精度に測定することができる。(6) Effects of the invention Since the two radiation sources and the scanning radiometer are used to determine the α1 rate and then measure the temperature, the structure is simple and can be applied over a wide range of translucent measurement objects. temperature distribution can be measured with high precision.
第１図は、この発明の一実施例を示す構成説明図、第２
図は、動作説明用波形図である。FIG. 1 is a configuration explanatory diagram showing one embodiment of the present invention, and FIG.
The figure is a waveform diagram for explaining the operation.
Claims (1)
を検出する走査形放射温度計と、この走査形放射温度計
の走査領域内の測定物体に放射エネルギーを放射する第
１の放射源および第２の放射源と、走査形放射温度計に
測定物体からの放射エネルギーが入射したときの第１の
検出値、第１の放射源からの放射エネルギーが測定物体
で反射して入射したときの第２の検出値、および第２の
放射源からの放射エネルギーが測定物体を透過して入射
したときの第３の検出値に基いて測定物体の放射率を求
め、この放射率から測定物体の温度を求める演算手段と
を備えたことを特徴とする温度測定装置。1. A scanning radiation thermometer that scans the measurement object to detect radiant energy from the measurement object, a first radiation source that emits radiant energy to the measurement object within the scanning area of the scanning radiation thermometer, and 2 radiation source, the first detection value when radiant energy from the measurement object enters the scanning radiation thermometer, and the first detection value when the radiant energy from the first radiation source is reflected by the measurement object and enters the scanning radiation thermometer. The emissivity of the measured object is determined based on the second detected value and the third detected value when the radiant energy from the second radiation source passes through the measured object and enters the measured object, and the temperature of the measured object is determined from this emissivity. A temperature measuring device characterized by comprising: calculation means for determining .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59206731A JPS6184528A (en) | 1984-10-02 | 1984-10-02 | Temperature measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59206731A JPS6184528A (en) | 1984-10-02 | 1984-10-02 | Temperature measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184528A true JPS6184528A (en) | 1986-04-30 |
| JPH0548405B2 JPH0548405B2 (en) | 1993-07-21 |
Family
ID=16528170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59206731A Granted JPS6184528A (en) | 1984-10-02 | 1984-10-02 | Temperature measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184528A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6375526A (en) * | 1986-09-18 | 1988-04-05 | Chino Corp | Temperature measuring instrument |
| JPS6375525A (en) * | 1986-09-18 | 1988-04-05 | Chino Corp | Temperature measuring instrument |
| US6953281B2 (en) * | 2001-04-21 | 2005-10-11 | Robert Bosch Gmbh | Method for determining temperatures on semiconductor components |
-
1984
- 1984-10-02 JP JP59206731A patent/JPS6184528A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6375526A (en) * | 1986-09-18 | 1988-04-05 | Chino Corp | Temperature measuring instrument |
| JPS6375525A (en) * | 1986-09-18 | 1988-04-05 | Chino Corp | Temperature measuring instrument |
| US6953281B2 (en) * | 2001-04-21 | 2005-10-11 | Robert Bosch Gmbh | Method for determining temperatures on semiconductor components |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548405B2 (en) | 1993-07-21 |
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