CN207231634U - A kind of spectral measurement device - Google Patents
A kind of spectral measurement device Download PDFInfo
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- CN207231634U CN207231634U CN201720660401.9U CN201720660401U CN207231634U CN 207231634 U CN207231634 U CN 207231634U CN 201720660401 U CN201720660401 U CN 201720660401U CN 207231634 U CN207231634 U CN 207231634U
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Abstract
The utility model provides a kind of spectral measurement device, for measuring displacement or the thickness of object under test, including：Sensor probe, including housing, light source, confocal dispersion camera lens and induction mechanism, light source, confocal dispersion camera lens and induction mechanism are successively set in housing；The light that confocal dispersion camera lens launches light source carries out spectral dispersion, is irradiated after forming the monochromatic light of different wave length to object under test；Induction mechanism includes sensing hole and sensing unit, by the monochromatic spectrum of sensing units sense after the monochromatic light that object under test reflects is by sensing hole；Control mechanism, including the spectrum for being arrived according to sensing units sense calculate the position of determinand product or the computing unit of thickness and the display unit of display computing unit result of calculation.Measurement is convenient, and measurement range is broad, suitable for the measurement of various material and the number of plies, can work, be can be applied in thermo-responsive environment in various adverse circumstances.
Description
Technical field
Technical field of optical detection is the utility model is related to, more particularly to a kind of spectral measurement device.
Background technology
In traditional measurement, often using the method for range of triangle.The principle of range of triangle is mapped by height change
To sensor image displacement, height distance is calculated according to trigonometric function.Including the method with white light fringe phase shift, final is also logical
Cross trigonometry and in-plane displancement is converted into height.But range of triangle has a disadvantage that：On translucent material, it is projected
Authenticated to produce deviation, transparent material and minute surface material are difficult measurement；Meanwhile trigonometry can all have shadow effect, to mutation
Step shield portions can not measure；And laser only focus is most thin, hot spot becomes larger after leaving focus, deterioration in accuracy.
Utility model content
The technical problems to be solved in the utility model is to be directed to shortcoming of the prior art, there is provided a kind of spectrum is surveyed
Measure device.Measurement is convenient, and measurement range is broad, suitable for the measurement of various material and the number of plies, and the extra ministry of electronics industry is not required
Part, can work in various adverse circumstances, and not produce heat, can be applied in thermo-responsive environment.
The utility model solves the technological means that technical problem uses and is to provide a kind of spectral measurement device, is treated for measuring
Displacement or the thickness of object are surveyed, including：Sensor probe, including housing, light source, confocal dispersion camera lens and induction mechanism, it is described
Light source, the confocal dispersion camera lens and the induction mechanism are successively set in the housing；The confocal dispersion camera lens is by institute
The light for stating light source transmitting carries out spectral dispersion, is irradiated after forming the monochromatic light of different wave length to the object under test；The sensing
Mechanism includes sensing hole and sensing unit, by institute after the monochromatic light that the object under test reflects is by the sensing hole
State monochromatic spectrum described in sensing units sense；Control mechanism, including for described in being arrived according to the sensing units sense
Spectrum calculates the position of the article to be measured or the computing unit of thickness and the display list for showing the computing unit result of calculation
Member.
In spectral measurement device provided by the utility model, the confocal dispersion camera lens includes multiple coaxial dispersion mirrors
Piece, it is confocal in progress after the light progress dispersion that multiple dispersion eyeglasses launch the light source.
In spectral measurement device provided by the utility model, pass through light between the sensing unit and the computing unit
Fibre is coupled.
In spectral measurement device provided by the utility model, the light of the light source transmitting is the polychromatic light or white of wide spectrum
Light.
In spectral measurement device provided by the utility model, the computing unit includes being used to the spectrum being calculated as
The spectra calculation device of power spectrum.
In spectral measurement device provided by the utility model, the control mechanism further includes：Measure quality calculation unit,
For calculating the measurement quality of displacement or thickness；Quality determination unit is measured, receives the measurement quality, and according to the measurement
Quality and threshold value determine whether displacement or thickness are effective.
In spectral measurement device provided by the utility model, the measurement quality is by the spectrum or the power spectrum
One of peak height or peak area at peak position represent.
In spectral measurement device provided by the utility model, the control mechanism further includes：Threshold computation unit, is used for
The spectrum or the power spectrum are received, and threshold value is calculated according to the spectrum or the power spectrum；The threshold calculations list
It is first to be connected with the measurement quality determination unit, and the threshold value is output to the measurement quality determination unit.
The spectral measurement device implemented in the utility model has the advantages that：
Measurement is convenient, and measurement range is broad, suitable for the measurement of various material and the number of plies, and the extra ministry of electronics industry is not required
Part, can work in various adverse circumstances, and not produce heat, can be applied in thermo-responsive environment.
Brief description of the drawings
Fig. 1 is shown as the structure diagram of spectral measurement device in the utility model.
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, is further elaborated the utility model.It should be appreciated that specific embodiment described herein is only explaining
The utility model, is not used to limit the utility model.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side " and similar statement are for illustrative purposes only.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to the technology of the utility model
The normally understood implication of technical staff in domain is identical.It is simply in the term used in the description of the utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include
The arbitrary and all combination of one or more relevant Listed Items.
As shown in Figure 1, Fig. 1 is shown as the structure diagram of spectral measurement device in the utility model.The utility model carries
A kind of spectral measurement device has been supplied, for measuring displacement or the thickness of object under test 3, including：Sensor probe 1, including housing
11st, light source 12, confocal dispersion camera lens 13 and induction mechanism 14, light source 12, confocal dispersion camera lens 13 and induction mechanism 14 are set successively
Put in housing 11；The light that confocal dispersion camera lens 13 launches light source 12 carries out spectral dispersion, forms the monochromatic light of different wave length
After irradiate to object under test 3；Induction mechanism 14 includes sensing hole 141 and sensing unit 142, the list reflected by object under test 3
Coloured light by sensing unit 142 after sensing hole 141 by sensing monochromatic spectrum；Control mechanism 2, including for according to sensing
The spectrum that unit 142 senses calculates the position of determinand product or the computing unit 21 of thickness and display computing unit 21 calculates
As a result display unit 22.
In an embodiment of the utility model, confocal dispersion camera lens 13 includes multiple coaxial dispersion eyeglasses 131, more
It is confocal in progress after the light progress dispersion that a dispersion eyeglass 131 launches light source 12.
When in use, the light beam comprising multi-wavelength is projected on object after confocal dispersion camera lens 13, is only focused on and is treated
The monochromatic light surveyed on object 3 can return to sensing unit 142 by sensing hole 141.Measuring the monochromatic wavelength returned is
The distance that sensor probe 1 arrives object under test 3 can be calculated.By the distance between measuring difference twice, you can draw determinand
The displacement distance of body 3.Or the range difference of the measurement according to 3 both sides of object under test, you can draw the thickness of object under test 3.When
When measuring translucent material, the diffusing reflection at translucent material hot spot weekend is stopped by sensing hole 141 can not return to sensing unit
142, do not interfere with measurement.Each monochromic beam all carries range information in theory, and transparent surface or minute surface can also reflect one
Part light goes back, therefore transparent material can also measure, it might even be possible to measures multilayer.Since light is irradiated from all quarter
Come, even if most light is blocked, as long as a part returns, the requirement of measurement can be reached in the same old way.Similarly, even
Aperture or trench bottom, can also be measured by the spectral measurement device of the utility model.It is as long as right in range ability
Answering the monochromatic light of wavelength can focus in focus forever, can ensure measurement effect.
In an embodiment of the utility model, it is coupled between sensing unit 142 and computing unit 21 by optical fiber.It is excellent
Selection of land, optical fiber are single mode optical fiber.
Further, the light that light source 12 is launched is the polychromatic light or white light of wide spectrum.
In an embodiment of the utility model, computing unit 21 includes being used for the power spectrum that spectrum is calculated as to power spectrum
Calculator.Due to the use of unidirectional thickness measure principle, according to spectrum or the peak value of the wave crest of power spectrum, single sensor is visited
The first 1 i.e. thickness of measurable glass, plastic tube or any transparent material.Measured for multi-layered thickness, in a preferred embodiment,
The information of six peak values can at most be detected.
Further, control mechanism 2 further includes：Quality calculation unit 21 is measured, for calculating the measurement of displacement or thickness
Quality；Quality determination unit is measured, receives measurement quality, and determine whether displacement or thickness have according to measurement quality and threshold value
Effect.Further, quality is measured by one of the peak height at the peak position of spectrum or power spectrum or peak area come table
Show.Preferably, control mechanism 2 further includes：Threshold computation unit 21, for receiving spectrum or power spectrum, and according to spectrum or work(
Rate is composed to calculate threshold value；Threshold computation unit 21 with measurement quality determination unit be connected, and by threshold value be output to measurement quality it is true
Order member.
Threshold computation unit 21 can not include the maximum and standard of the power spectrum in the range of peak position to being in
At least one in difference is calculated, and the threshold computation unit 21 can make the constant multiple of one of maximum and standard deviation
Exported for threshold value.Threshold computation unit 21 can calculate first within the scope of one in the gamut and specified range of power spectrum
Standard deviation.Exported after following processing is repeated at least twice using Temp Threshold as threshold value, processing includes：By the first standard
The first constant multiple of difference is arranged to Temp Threshold, calculates the second standard deviation for being less than Temp Threshold in the range of this and will face
When threshold value be updated to the second constant multiple of the second standard deviation.Measurement quality calculation unit 21 can calculate measurement target film reflectivity
Average value and measurement target film reflectivity maxima and minima difference in one.If it is true to measure quality determination unit
Determine the data that thickness is invalid, then the exportable instruction thickness measure of display unit 22 fails.If measurement quality determination unit determines
Thickness is effective, then the also exportable measurement quality in addition to exportable thickness of display unit 22.
In conclusion spectral measurement device provided by the utility model, measurement is convenient, and measurement range is broad, suitable for more
The measurement of kind material and the number of plies, and extra electronic unit is not required, it can work in various adverse circumstances, and do not produce heat
Amount, can be applied in thermo-responsive environment.With very high commercial exploitation and the value promoted.
The embodiment of the utility model is described above in conjunction with attached drawing, but the utility model is not limited to
The embodiment stated, above-mentioned embodiment is only schematical, rather than restricted, this area it is common
Technical staff is not departing from the utility model aims and scope of the claimed protection situation under the enlightenment of the utility model
Under, many forms can be also made, these are belonged within the protection of the utility model.
Claims (8)
- A kind of 1. spectral measurement device, for measuring displacement or the thickness of object under test, it is characterised in that including：Sensor probe, including housing, light source, confocal dispersion camera lens and induction mechanism, the light source, the confocal dispersion camera lens It is successively set on the induction mechanism in the housing；The light that the confocal dispersion camera lens launches the light source carries out spectrum Dispersion, irradiates to the object under test after forming the monochromatic light of different wave length；The induction mechanism includes sensing hole and sensing is single Member, it is monochromatic as described in the sensing units sense after the monochromatic light that the object under test reflects is by the sensing hole The spectrum of light；Control mechanism, including the spectrum for being arrived according to the sensing units sense calculate the object under test position or The computing unit of thickness and the display unit for showing the computing unit result of calculation.
- 2. spectral measurement device according to claim 1, it is characterised in that the confocal dispersion camera lens includes multiple coaxial Dispersion eyeglass, the light that multiple dispersion eyeglasses launch the light source carry out after dispersion carry out it is confocal.
- 3. spectral measurement device according to claim 1, it is characterised in that the sensing unit and the computing unit it Between be coupled by optical fiber.
- 4. spectral measurement device according to claim 1, it is characterised in that light the answering for wide spectrum of the light source transmitting Coloured light or white light.
- 5. spectral measurement device according to claim 1, it is characterised in that the computing unit includes being used for the light Spectrum is calculated as the spectra calculation device of power spectrum.
- 6. spectral measurement device according to claim 5, it is characterised in that the control mechanism further includes：Quality calculation unit is measured, for calculating the measurement quality of displacement or thickness；Quality determination unit is measured, receives the measurement quality, and displacement or thickness are determined according to the measurement quality and threshold value Whether degree is effective.
- 7. spectral measurement device according to claim 6, it is characterised in that the measurement quality is by the spectrum or described One of peak height or peak area at the peak position of power spectrum represent.
- 8. spectral measurement device according to claim 6, it is characterised in that the control mechanism further includes：Threshold computation unit, is counted for receiving the spectrum or the power spectrum, and according to the spectrum or the power spectrum Calculate threshold value；The threshold computation unit is connected with the measurement quality determination unit, and the threshold value is output to the measurement Quality determination unit.
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| CN201720660401.9U CN207231634U (en) | 2017-06-07 | 2017-06-07 | A kind of spectral measurement device |
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| CN201720660401.9U CN207231634U (en) | 2017-06-07 | 2017-06-07 | A kind of spectral measurement device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113281343A (en) * | 2021-05-31 | 2021-08-20 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
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2017
- 2017-06-07 CN CN201720660401.9U patent/CN207231634U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113281343A (en) * | 2021-05-31 | 2021-08-20 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
| CN113281343B (en) * | 2021-05-31 | 2022-12-27 | 中国科学院西安光学精密机械研究所 | System and method for detecting defects of multilayer transparent material |
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