CN108572160A - A Refractometer for Refractive Index Distribution Measurement - Google Patents

A Refractometer for Refractive Index Distribution Measurement Download PDF

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CN108572160A
CN108572160A CN201710148080.9A CN201710148080A CN108572160A CN 108572160 A CN108572160 A CN 108572160A CN 201710148080 A CN201710148080 A CN 201710148080A CN 108572160 A CN108572160 A CN 108572160A
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refractive index
index distribution
prism
refractometer
unit
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CN108572160B (en
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夏珉
罗运
郭文平
陈俊尧
李微
杨克成
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length

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Abstract

The invention discloses a kind of refractometers of profile measurement, belong to measurement and optical field, it includes light source unit, optical path adjusting unit, probe unit and image variants unit, wherein, light source unit is for generating directional light, optical path adjusting unit is used to adjust directional light beam size according to the measurement range of setting, it is additionally operable to adjust directional light beam direction so that beam orthogonal is incident to probe unit, probe unit includes prism and lens array, lens array fitting is arranged on a side of prism, it is used to receive the collimated light beam from optical path adjusting unit, the bottom surface of prism fits on the interface of object to be measured, image variants unit is for receiving the hot spot being emitted from another side of prism, it is additionally operable to carry out image procossing to hot spot, and then obtain the refractive index of object to be measured.Apparatus of the present invention are simple and compact for structure, and energy refractive index distribution measures, and measurement accuracy is higher.

Description

一种折射率分布测量的折光计A Refractometer for Refractive Index Distribution Measurement

技术领域technical field

本发明属于测量与光学领域,具体涉及一种折射率测量装置,用于折射率分布的测量。The invention belongs to the field of measurement and optics, and in particular relates to a refractive index measuring device for measuring the distribution of the refractive index.

背景技术Background technique

折射率是物质的一种物理属性,它是食品生产中常用的工艺控制指标,通过测定液态食品的折射率,可以鉴别食品的组成,确定食品的浓度,判断食品的纯净程度及品质。同时,在医学方面,测定生物组织的折射率,可以判断是否发生癌变。在光通信领域内,测量光纤的折射率分布,对于光线在光纤内传输分析具有重要用途。在半导体器件方面,折射率分布也是一个重要的参数。Refractive index is a physical property of a substance. It is a commonly used process control index in food production. By measuring the refractive index of liquid food, the composition of food can be identified, the concentration of food can be determined, and the purity and quality of food can be judged. At the same time, in medicine, the determination of the refractive index of biological tissue can determine whether cancer has occurred. In the field of optical communication, measuring the refractive index distribution of optical fiber is of great use for the analysis of light transmission in optical fiber. In terms of semiconductor devices, the refractive index profile is also an important parameter.

折射率的测量是一项重要的技术,现在已有许多技术以折射定律为基础,实现了折射率的测量。常见的方法有偏向角法、自准直法和临界角法,其中偏向角法精度较高,临界角法应用最广泛,最具代表的仪器为阿贝折射率。但是,这些技术除了测量精度不够高的问题外,还有测量方法比较麻烦。此外,现有的装置一般都只能测量均匀液体的折射率,如果液体的不均匀,则无法测量其折射率。The measurement of the refractive index is an important technology, and now there are many technologies based on the law of refraction to realize the measurement of the refractive index. Common methods include deflection angle method, self-collimation method and critical angle method, among which the deflection angle method has higher precision, and the critical angle method is the most widely used, and the most representative instrument is Abbe's refractive index. However, in addition to the problem of insufficient measurement accuracy, these technologies also have troublesome measurement methods. In addition, the existing devices generally can only measure the refractive index of a uniform liquid, and if the liquid is not uniform, the refractive index cannot be measured.

因此,需要开发一种测量精度高、测量方法简便并且能进行折射率分布测量的折光计。Therefore, there is a need to develop a refractometer with high measurement accuracy, a simple measurement method, and the ability to measure the refractive index distribution.

发明内容Contents of the invention

针对现有技术的以上缺陷或改进需求,本发明提供了一种折射率分布测量的折光计,其目的在于,利用平行光入射进入探测单元以对折射率分布不均匀的物质进行折射率的测量,由此解决现有技术中不能测量率分布的技术问题,并且本发明装置结构紧凑简单、测量精度高、测量简便。In view of the above defects or improvement needs of the prior art, the present invention provides a refractometer for measuring the distribution of refractive index, the purpose of which is to measure the refractive index of substances with uneven refractive index distribution by using parallel light incident into the detection unit , thereby solving the technical problem that the rate distribution cannot be measured in the prior art, and the device of the present invention has a compact and simple structure, high measurement accuracy, and simple measurement.

为实现上述发明目的,本发明提供一种折射率分布测量的折光计,其包括:In order to achieve the purpose of the above invention, the present invention provides a refractometer for measuring the distribution of refractive index, which includes:

光源单元,用于产生平行光,a light source unit for generating parallel light,

光路调节单元,用于根据设定的测量范围调节所述平行光光束大小,还用于调节所述平行光光束方向以使光束垂直入射至探测单元,an optical path adjustment unit, used to adjust the size of the parallel light beam according to the set measurement range, and also used to adjust the direction of the parallel light beam so that the light beam is perpendicular to the detection unit,

探测单元,其包括棱镜和透镜阵列,所述透镜阵列贴合设置在所述棱镜的一个侧面上,所述透镜阵列用于接受来自所述光路调节单元的平行光束,所述棱镜的底面贴合于待测对象的界面上,The detection unit includes a prism and a lens array, the lens array is attached to one side of the prism, the lens array is used to receive the parallel light beam from the optical path adjustment unit, and the bottom surface of the prism is attached to On the interface of the object to be tested,

图像采集及处理单元,所述图像采集及处理单元用于接收从所述棱镜的另一个侧面出射的光斑,还用于对所述光斑进行图像处理,进而获得待测对象的折射率。An image acquisition and processing unit, the image acquisition and processing unit is used to receive the light spot emitted from the other side of the prism, and is also used to perform image processing on the light spot, so as to obtain the refractive index of the object to be measured.

以上发明构思中,棱镜和折射率分布不均匀物质直接接触构成分界面,光线经过分界面反射时,到达分界面上的点的位置是不相同的,而由于物质折射率分布不均匀,光线经过不同点的位置得到的反射率是不相同的,从而进行折射率的测量。In the above inventive concepts, the prism and the material with uneven refractive index distribution directly contact to form an interface. When the light is reflected through the interface, the positions of the points on the interface are different. The reflectivity obtained at different points is different, so the refractive index can be measured.

进一步的,所述透镜阵列包括多个规格相同且边缘相切以形成阵列排布的透镜。Further, the lens array includes a plurality of lenses with the same specifications and tangent edges to form an array arrangement.

进一步的,所述透镜阵列包括多个规格相同且边缘相隔设定距离以形成阵列排布的透镜。Further, the lens array includes a plurality of lenses with the same specification and a set distance between their edges to form an array arrangement.

进一步的,所述透镜阵列包括至少两个规格相同的透镜。Further, the lens array includes at least two lenses with the same specification.

进一步的,所述光源单元包括平行光光源和扩束透镜组,所述平行光光源和所述扩束透镜组同轴设置。Further, the light source unit includes a parallel light source and a beam expander lens group, and the parallel light source and the beam expander lens group are arranged coaxially.

进一步的,所述扩束透镜组为伽利略系统或者开普勒系统。Further, the beam expander lens group is a Galileo system or a Kepler system.

以上发明构思中,采用扩束透镜组目的是扩展激光是直径,减小激光束的发散角,有利于扩宽本发明的测量范围,提高精度。In the above inventive concepts, the purpose of using the beam expander lens group is to expand the diameter of the laser beam and reduce the divergence angle of the laser beam, which is beneficial to broaden the measurement range of the present invention and improve the accuracy.

进一步的,所述光路调节单元包括第一反射镜和第二反射镜,所述第一反射镜和所述第二发射镜平行设置。通过光路调节单元调整光束入射角和反射,以调整装置的测量范围和提高精度。Further, the optical path adjustment unit includes a first reflecting mirror and a second reflecting mirror, and the first reflecting mirror and the second emitting mirror are arranged in parallel. The incident angle and reflection of the light beam are adjusted by the optical path adjustment unit to adjust the measurement range of the device and improve the accuracy.

进一步的,图像采集及处理单元包括透镜组、阵列传感器以及图像处理计算机,所述透镜组用于接收从所述棱镜的另一个侧面出射的光斑,并用于将该光斑传输给所述阵列传感器,所述阵列传感器用于将所述光斑转化为图像信号并传输给所述图像处理计算机,所述图像处理计算机用于处理所述图像信号以获得待测对象的折射率分布。Further, the image acquisition and processing unit includes a lens group, an array sensor and an image processing computer, the lens group is used to receive the light spot emitted from the other side of the prism, and is used to transmit the light spot to the array sensor, The array sensor is used to convert the light spot into an image signal and transmit it to the image processing computer, and the image processing computer is used to process the image signal to obtain the refractive index distribution of the object to be measured.

以上发明构思中,棱镜和待测对象或者待测物质构成不同反射界面,由于物质折射率分布不均匀,光线入射不同折射率位置,相同入射角对应的反射光强不同。探测单元中透镜阵列是由同等焦距的透镜组成的阵列,对平行光束起到聚焦的作用,由于汇聚作用,从而使平行光在光路中传输时可得到一系列弥散斑,即光斑分布,即可测量光斑的相对光强分布。透镜组和阵列传感器用于图像处理,透镜组和阵列传感器对从探测单元出射的光斑进行取图,然后用图像处理计算机对图像进行计算和处理,以得到光斑分布的相对光强,从而得到物质相对应的折射率分布情况。In the above inventive concepts, the prism and the object to be measured or the substance to be measured constitute different reflective interfaces. Due to the uneven distribution of the refractive index of the material, the light incident on different refractive index positions, the reflected light intensity corresponding to the same incident angle is different. The lens array in the detection unit is composed of lenses with the same focal length, which can focus the parallel light beams. Due to the converging effect, a series of diffuse spots can be obtained when the parallel light beams are transmitted in the optical path, that is, the spot distribution. Measure the relative light intensity distribution of the spot. The lens group and the array sensor are used for image processing. The lens group and the array sensor take pictures of the light spots emitted from the detection unit, and then use the image processing computer to calculate and process the images to obtain the relative light intensity of the light spot distribution, so as to obtain the material The corresponding refractive index distribution.

总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够取得下列有益效果:Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

由于透镜阵列的存在使入射平行光入射经过待测物质组成的界面后成为一系列光斑,再进入透镜组和阵列传感器,接着进行图像处理,获得待测物质的折射率分布,以上光路的核心部件(是指探测单元)保证了本发明装置能够实时测量折射率分布不均匀的物质从而得到折射率分布图,其测量结果精确。此外,本发明装置结构紧凑简单,测量时将待测物质放置在棱镜底面即可,将待测物质放置方便,本发明装置具有非常好的应用前景。Due to the existence of the lens array, the incident parallel light becomes a series of spots after passing through the interface composed of the substance to be measured, and then enters the lens group and the array sensor, and then performs image processing to obtain the refractive index distribution of the substance to be measured. The core component of the above optical path (referring to the detection unit) ensures that the device of the present invention can measure substances with non-uniform refractive index distribution in real time to obtain a refractive index distribution map, and the measurement results are accurate. In addition, the device of the present invention has a compact and simple structure, and it only needs to place the substance to be measured on the bottom surface of the prism during measurement, which is convenient for placing the substance to be measured, and the device of the present invention has very good application prospects.

附图说明Description of drawings

图1是本发明实施例的液体折射率分布测量的装置的结构示意图;FIG. 1 is a schematic structural view of a device for measuring the refractive index distribution of a liquid according to an embodiment of the present invention;

图2是本发明实施例中光源单元以及光路调节单元的中光路示意图;Fig. 2 is a schematic diagram of the optical path of the light source unit and the optical path adjustment unit in the embodiment of the present invention;

图3是本发明实施例中探测单元中棱镜贴合在待测对象界面上的光路示意图;Fig. 3 is a schematic diagram of the optical path in which the prism in the detection unit is attached to the interface of the object to be measured in the embodiment of the present invention;

图4为本发明实施例中探测单元中透镜阵列的对光束聚焦的光路示意图;4 is a schematic diagram of the optical path of the lens array in the detection unit in the embodiment of the present invention focusing on the light beam;

图5(a)为不同折射率下,菲涅尔反射曲线与入射角关系曲线图;Figure 5(a) is a graph showing the relationship between the Fresnel reflection curve and the incident angle under different refractive indices;

图5(b)为菲涅尔反射率曲线局部图及三种位置对应的折射率位置图。Fig. 5(b) is a partial view of the Fresnel reflectance curve and the corresponding refractive index positions of the three positions.

在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:

1-光源单元 2-光路调节单元 3-透镜阵列1-Light source unit 2-Optical path adjustment unit 3-Lens array

4-棱镜 5-待测对象或者待测物质 6-图像采集处理单元4-prism 5-object to be measured or substance to be measured 6-image acquisition and processing unit

21-第一反射镜 22-第二反射镜21-first reflector 22-second reflector

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

图1是本发明实施例的液体折射率分布测量的装置的结构示意图,图2是本发明实施例中光源单元以及光路调节单元的中光路示意图,图3是本发明实施例中探测单元中棱镜贴合在待测对象界面上的光路示意图,图4为本发明实施例中探测单元中透镜阵列的对光束聚焦的光路示意图,结合以上四副图可知,本发明的装置包括光源单元1、光路调节单元2、探测单元以及图像采集及处理单元6,其中,光源单元1用于产生平行光,光路调节单元2用于根据设定的测量范围调节所述平行光光束大小,光路调节单元2还用于调节所述平行光光束方向以使光束垂直入射至探测单元,探测单元用于将平行光汇聚后入射至待测物质的界面,由于待测物质的折射率分布不均匀,进而获得出射光斑,图像采集及处理单元6用于接收所述出射光斑并对光斑的光强进行分析以获得待测对象的折射率分布。Fig. 1 is a schematic structural diagram of a device for measuring liquid refractive index distribution in an embodiment of the present invention; Fig. 2 is a schematic diagram of the optical path of a light source unit and an optical path adjustment unit in an embodiment of the present invention; Fig. 3 is a prism in a detection unit in an embodiment of the present invention A schematic diagram of the optical path attached to the interface of the object to be measured. FIG. 4 is a schematic diagram of the optical path of the lens array in the detection unit in the embodiment of the present invention focusing on the light beam. Combining the above four figures, it can be seen that the device of the present invention includes a light source unit 1, an optical path Adjustment unit 2, detection unit, and image acquisition and processing unit 6, wherein the light source unit 1 is used to generate parallel light, the optical path adjustment unit 2 is used to adjust the beam size of the parallel light according to the set measurement range, and the optical path adjustment unit 2 is also It is used to adjust the direction of the parallel light beam so that the beam is vertically incident on the detection unit. The detection unit is used to converge the parallel light and then enter the interface of the substance to be measured. Due to the uneven distribution of the refractive index of the substance to be measured, the exit spot is obtained. , the image acquisition and processing unit 6 is configured to receive the outgoing light spot and analyze the light intensity of the light spot to obtain the refractive index distribution of the object to be measured.

其中,所述光源单元包括平行光光源和扩束透镜组,所述平行光光源和所述扩束透镜组同轴设置。所述扩束透镜组为伽利略系统或者开普勒系统。所述光路调节单元包括第一反射镜21和第二反射镜22,所述第一反射镜21和所述第二发射镜22平行设置。调节第一反射镜21和第二反射镜22的角度,可调节所述平行光光束大小,同样的,还可以调节所述平行光光束方向以使光束垂直入射至探测单元。此处,还可以根据实际工程需要设置三个或者更多个平行设置的反射镜,但是,原则上,两个相互平行设置的反射镜就能在X方向和Y方向上进行调整,能满足调节的功能。探测单元包括棱镜4和透镜阵列3,所述透镜阵列贴合设置在所述棱镜的一个侧面上,所述透镜阵列用于接受来自所述光路调节单元的平行光束,所述棱镜的底面贴合于待测对象5的界面上。Wherein, the light source unit includes a parallel light source and a beam expander lens group, and the parallel light source and the beam expander lens group are arranged coaxially. The beam expander lens group is a Galileo system or a Kepler system. The optical path adjusting unit includes a first reflecting mirror 21 and a second reflecting mirror 22, and the first reflecting mirror 21 and the second emitting mirror 22 are arranged in parallel. Adjusting the angles of the first mirror 21 and the second mirror 22 can adjust the size of the parallel light beam. Similarly, the direction of the parallel light beam can also be adjusted so that the beam is perpendicular to the detection unit. Here, three or more reflectors arranged in parallel can also be arranged according to actual engineering needs, but, in principle, two reflectors arranged in parallel to each other can be adjusted in the X direction and the Y direction, which can meet the adjustment requirements. function. The detection unit includes a prism 4 and a lens array 3, the lens array is attached to one side of the prism, the lens array is used to receive the parallel light beam from the optical path adjustment unit, and the bottom surface of the prism is attached to on the interface of the object 5 to be tested.

在本发明的一个实施例中,所述透镜阵列包括多个规格相同且边缘相切以形成阵列排布的透镜,或者所述透镜阵列包括多个规格相同且边缘相隔设定距离以形成阵列排布的透镜。In one embodiment of the present invention, the lens array includes a plurality of lenses with the same specification and whose edges are tangent to form an array arrangement, or the lens array includes a plurality of lenses with the same specification and whose edges are separated by a set distance to form an array arrangement. cloth lens.

在本发明的又一个实施例中,所述透镜阵列包括至少两个规格相同的透镜。所述的透镜阵列也可以包括至少四个规格相同的微透镜,以形成一个阵列面,所述透镜阵列也可以是形成一纵列或者一横列。In yet another embodiment of the present invention, the lens array includes at least two lenses with the same specification. The lens array may also include at least four microlenses with the same specifications to form an array surface, and the lens array may also form a column or a row.

图像采集及处理单元包括透镜组、阵列传感器以及图像处理计算机,所述透镜组用于接收从所述棱镜的另一个侧面出射的光斑,并用于将该光斑传输给所述阵列传感器,所述阵列传感器用于将所述光斑转化为图像信号并传输给所述图像处理计算机,所述图像处理计算机用于处理所述图像信号以获得待测对象的折射率分布。The image acquisition and processing unit includes a lens group, an array sensor and an image processing computer, the lens group is used to receive the light spot emitted from the other side of the prism, and is used to transmit the light spot to the array sensor, and the array The sensor is used to convert the light spot into an image signal and transmit it to the image processing computer, and the image processing computer is used to process the image signal to obtain the refractive index distribution of the object to be measured.

本发明中,所述的探测模块由透镜阵列和反射棱镜以及待测物质构成,其中,反射棱镜上侧与待测物质相接触,构成反射界面,透镜阵列与反射棱镜一侧相接触,构成光线的入射界面,另一侧为光线出射界面。平行光线入射至透镜阵列时,由于透镜阵列是由同等焦距的透镜组成的阵列,对平行光束起到聚焦的作用,从而使入射光束在探测模块出射界面输出时可得到一系列弥散斑分布,即光斑分布。对透镜组和阵列传感器出射的光斑进行取图得到光斑强度相对分布图,然后用图像处理计算机的CPU对图像进行计算和处理,以得到不同光斑的相对光强值,而每一光斑对应了汇聚光束在反射界面的位置,每一界面位置对应了物质的不同折射分布,便得到了相对应的折射率分布测量结果。In the present invention, the detection module is composed of a lens array, a reflective prism and a substance to be measured, wherein the upper side of the reflective prism is in contact with the substance to be measured to form a reflection interface, and the lens array is in contact with one side of the reflective prism to form a light The incident interface on the other side is the light exit interface. When parallel light rays are incident on the lens array, since the lens array is composed of lenses with the same focal length, it can focus the parallel light beams, so that a series of diffuse spot distributions can be obtained when the incident light beams are output at the exit interface of the detection module, namely Spot distribution. Take pictures of the light spots emitted by the lens group and the array sensor to obtain the relative distribution of the light spot intensity, and then use the CPU of the image processing computer to calculate and process the image to obtain the relative light intensity values of different light spots, and each light spot corresponds to the convergence The position of the light beam on the reflection interface, each interface position corresponds to a different refraction distribution of the material, and the corresponding measurement results of the refractive index distribution are obtained.

本发明物质折射率分布测量工作原理如下:The working principle of the material refractive index distribution measurement of the present invention is as follows:

光源单元出射的平行光,经过反射镜的光路调整装置进入探测单元,由于透镜阵列的存在,平行光入射至透镜阵列会由于透镜阵列的会聚作用使光反射时以不同角度出射,从而被透镜组和阵列传感器接收时成为一系列弥散斑,其中反射界面由棱镜上表面和待测物质构成,由于折射率分布的不均匀,从而使反射率不同,而得到的弥散斑光强是不同的,通过光强分析待测液体的折射率即实现了测量。The parallel light emitted by the light source unit enters the detection unit through the optical path adjustment device of the reflector. Due to the existence of the lens array, the parallel light incident on the lens array will cause the light to reflect at different angles due to the convergence of the lens array, thus being captured by the lens group. When it is received by the array sensor, it becomes a series of diffuse spots, in which the reflective interface is composed of the upper surface of the prism and the substance to be measured. Due to the uneven distribution of the refractive index, the reflectivity is different, and the light intensity of the diffuse spots is different. Through The measurement is realized by analyzing the refractive index of the liquid to be measured by light intensity.

本发明装置是利用透镜阵列对平行光的汇聚保证测量精度的,因为本发明分析光斑光强与相对应的入射光束在界面上的位置相关,位置范围越小,测得的精度越高。平行光线进入反射界面时,入射角度的不同使出射光角度不同,通过透镜阵列的汇聚作用,可使同一个光斑对应的入射光线在反射界面上的位置范围大大缩小,从而分析光强得到对应位置的液体的折射率精度得到保证。The device of the present invention utilizes the convergence of parallel light by the lens array to ensure measurement accuracy, because the light intensity of the analysis spot of the present invention is related to the position of the corresponding incident beam on the interface, and the smaller the position range, the higher the measurement accuracy. When parallel light rays enter the reflective interface, the different incident angles make the outgoing light angles different. Through the converging effect of the lens array, the position range of the incident light corresponding to the same spot on the reflective interface can be greatly reduced, so that the corresponding position can be obtained by analyzing the light intensity. The accuracy of the refractive index of the liquid is guaranteed.

本发明利用了反射率测量折射率的原理,光束经过界面发生反射时,反射光强与反射率相关,由菲涅尔公式推导知:The present invention utilizes the principle of reflectivity to measure the refractive index. When the light beam passes through the interface and is reflected, the reflected light intensity is related to the reflectivity. It is deduced from the Fresnel formula:

出射光束光强其中,θ1和θ2为入射角和折射角,n1和n2为棱镜和待测液体的折射率,θ为出射光和s光的夹角,I0为入射光的光强。光线传输时,光是有偏振的,也就是说光是一种电磁波,在光线垂直传播方向上存在电场和磁场,电场会沿各种方向传播,我们定义电场方向垂直纸面向里为s光,p光是平行该纸面的。Exit beam intensity Among them, θ 1 and θ 2 are the angle of incidence and refraction, n 1 and n 2 are the refractive index of the prism and the liquid to be measured, θ is the angle between the outgoing light and the s-ray, and I 0 is the light intensity of the incident light. When light is transmitted, light is polarized, that is to say, light is an electromagnetic wave. There are electric fields and magnetic fields in the direction of vertical propagation of light, and the electric field will propagate in various directions. We define the direction of electric field perpendicular to the inside of the paper as s light. P light is parallel to the paper.

本发明中,譬如取夹角为45°,而实际测量过程中采取入射光束为平行光光束,因此不同光斑相对应位置所对应的入射光夹角是相同的,而初始入射光线光强是相同的,因此本发明中的唯一变量是折射率,而所采用的棱镜是均匀材料构成的,n1是相同的,即n2的不同折导致反射率的不同,从而使出射光强不同,显然n2的分布是由待测物质的折射率分布组成的,因此,本发明也就实现了n2即物质折射率分布的测量。In the present invention, for example, the included angle is 45°, and the incident light beam is adopted as a parallel light beam in the actual measurement process, so the incident light included angles corresponding to the corresponding positions of different light spots are the same, and the initial incident light intensity is the same Therefore, the only variable in the present invention is the refractive index, and the prisms used are made of uniform materials, n 1 is the same, that is, the different refractions of n 2 lead to different reflectivity, so that the outgoing light intensity is different, obviously The distribution of n 2 is composed of the refractive index distribution of the substance to be measured, therefore, the present invention also realizes the measurement of n 2 , that is, the refractive index distribution of the substance.

为了验证本发明的准确性,下面用反射率曲线和光线传输对测量结果的准确性做进一步说明,具体如下:In order to verify the accuracy of the present invention, the accuracy of the measurement results is further described below with the reflectance curve and light transmission, as follows:

通过试验获得到不同的菲涅耳反射率与入射角度之间的关系,对于本发明中,我们取其中的三个不同位置作为解释说明,分别为位置a、b和c,由于透镜阵列对光束的汇聚作用,同一位置对应多束入射角不同的光束,而不同位置处相对应的入射角是相同的,如此保证了控制变量法的条件。Obtain the relation between different Fresnel reflectivity and incident angle by experiment, for in the present invention, we take three different positions among them as explanation, be position a, b and c respectively, because lens array The converging effect of , the same position corresponds to multiple beams with different incident angles, and the corresponding incident angles at different positions are the same, thus ensuring the conditions of the controlled variable method.

图5(a)为不同折射率物质下得到的菲涅尔反射曲线,其中取玻璃的折射率为1.52,本发明设计入射角范围在临界角以下,故均不会发生全反射。为方便说明,其中图5(b)是图5(a)反射率曲线在入射角为55度至60度的局部放大图,其中位置a、b和c对应图(5)b曲线上的位置也做了标记说明,而三个位置光斑的分布便是这些位置对应菲涅尔曲线的积分值,因此用光斑测量法是多组数据的积分值,保证了发明测量的精度。Fig. 5(a) is the Fresnel reflection curve obtained under different refractive index materials, wherein the refractive index of glass is 1.52, and the range of incident angle designed by the present invention is below the critical angle, so total reflection will not occur. For the convenience of description, Figure 5(b) is a partially enlarged view of the reflectivity curve in Figure 5(a) at an incident angle of 55 degrees to 60 degrees, where the positions a, b and c correspond to the positions on the curve in Figure (5)b It has also been marked and explained, and the distribution of the light spots at the three positions is the integral value corresponding to the Fresnel curve at these positions, so the light spot measurement method is the integral value of multiple sets of data, which ensures the accuracy of the invention measurement.

本发明中,利用反射原理可得到不同折射率下的光斑图,再利用菲涅尔反射公式与折射率对应的关系计算得到物质的折射率分布。In the present invention, light spot patterns under different refractive indices can be obtained by using the principle of reflection, and then the refractive index distribution of the material can be obtained by calculating the relationship between the Fresnel reflection formula and the corresponding refractive index.

本发明可用于实时在线测量物质的折射率分布,测量不同物质时,只需在装置上更换不同的待测物质,利用透镜组和阵列传感器进行取图,通过图像处理计算机分析即可以得到折射率分布曲线,方便快捷。The present invention can be used to measure the refractive index distribution of substances online in real time. When measuring different substances, it is only necessary to replace different substances to be measured on the device, and use the lens group and array sensor to take pictures, and the refractive index can be obtained through image processing and computer analysis. Distribution curve, convenient and quick.

本发明中的一种折射率分布测量折光计,利用相同入射角入射的光束在不同折射率分布界面下反射率是不同的规律,实现了折射率分布的测量,即巧妙的利用了反射率和光强的关系实现折射率分布的测量。A refractometer for measuring the distribution of refractive index in the present invention uses the law that the reflectivity of light beams incident at the same incident angle is different under different refractive index distribution interfaces, and realizes the measurement of the distribution of the refractive index, that is, it cleverly utilizes the reflectivity and The relationship of light intensity realizes the measurement of the refractive index distribution.

本发明通过光斑光强的分布来测量折射率分布,其测量过程简单,装置完成之后,只需将光斑快速取图之后,进行软件计算分析即可得到测量结果,操作简单快捷,实现了不均匀物质折射率的测量。其次,以空气界面光斑的光强作为对照,得到物质折射率,精度得到明显提高,最后通过计算机软件来计算光斑分布也保证了测量的精度。The present invention measures the distribution of the refractive index through the distribution of the light intensity of the light spot. The measurement process is simple. After the device is completed, the measurement result can be obtained by quickly taking the picture of the light spot and performing software calculation and analysis. The operation is simple and fast, and the unevenness is realized. Measurement of the refractive index of a material. Secondly, using the light intensity of the light spot at the air interface as a comparison, the refractive index of the material is obtained, and the accuracy is significantly improved. Finally, the calculation of the light spot distribution by computer software also ensures the measurement accuracy.

本发明装置的物质折射率分布测量的装置能实时检测物质折射率分布的情况,具有精度高、寿命长、抗干扰能力强的特点。The device for measuring the material refractive index distribution of the device of the invention can detect the material refractive index distribution in real time, and has the characteristics of high precision, long service life and strong anti-interference ability.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (8)

1.一种折射率分布测量的折光计,其特征在于,其包括:1. A refractometer for refractive index distribution measurement, characterized in that it comprises: 光源单元(1),用于产生平行光,A light source unit (1), used to generate parallel light, 光路调节单元(2),用于根据设定的测量范围调节所述平行光光束大小,还用于调节所述平行光光束方向以使光束垂直入射至探测单元,An optical path adjustment unit (2), used to adjust the size of the parallel light beam according to the set measurement range, and also used to adjust the direction of the parallel light beam so that the light beam is perpendicular to the detection unit, 探测单元,其包括棱镜(4)和透镜阵列(3),所述透镜阵列贴合设置在所述棱镜的一个侧面上,所述透镜阵列用于接受来自所述光路调节单元的平行光束,所述棱镜的底面贴合于待测对象(5)的界面上,The detection unit includes a prism (4) and a lens array (3), the lens array is attached to one side of the prism, and the lens array is used to receive the parallel light beam from the optical path adjustment unit, so The bottom surface of the prism is attached to the interface of the object to be measured (5), 图像采集及处理单元(6),所述图像采集及处理单元用于接收从所述棱镜的另一个侧面出射的光斑,还用于对所述光斑进行图像处理,进而获得待测对象的折射率。An image acquisition and processing unit (6), the image acquisition and processing unit is used to receive the light spot emitted from the other side of the prism, and is also used to perform image processing on the light spot, and then obtain the refractive index of the object to be measured . 2.如权利要求1所述的一种折射率分布测量的折光计,其特征在于,所述透镜阵列包括多个规格相同且边缘相切以形成阵列排布的透镜。2 . The refractometer for measuring refractive index distribution according to claim 1 , wherein the lens array includes a plurality of lenses with the same specifications and tangent edges to form an array arrangement. 3 . 3.如权利要求1所述的一种折射率分布测量的折光计,其特征在于,所述透镜阵列包括多个规格相同且边缘相隔设定距离以形成阵列排布的透镜。3 . The refractometer for measuring refractive index distribution according to claim 1 , wherein the lens array comprises a plurality of lenses with the same specifications and with edges separated by a set distance to form an array arrangement. 4 . 4.如权利要求2或3所述的一种折射率分布测量的折光计,其特征在于,所述透镜阵列包括至少两个规格相同的透镜。4. A refractometer for measuring refractive index distribution according to claim 2 or 3, wherein the lens array comprises at least two lenses with the same specification. 5.如权利要求1-4之一所述的一种折射率分布测量的折光计,其特征在于,所述光源单元包括平行光光源和扩束透镜组,所述平行光光源和所述扩束透镜组同轴设置。5. A refractometer for measuring refractive index distribution according to any one of claims 1-4, wherein the light source unit comprises a parallel light source and a beam expander lens group, and the parallel light source and the expander The beam lens group is set coaxially. 6.如权利要求5所述的一种折射率分布测量的折光计,其特征在于,所述扩束透镜组为伽利略系统或者开普勒系统。6 . The refractometer for measuring refractive index distribution according to claim 5 , wherein the beam expander lens group is a Galileo system or a Kepler system. 7.如权利要求5所述的一种折射率分布测量的折光计,其特征在于,所述光路调节单元包括第一反射镜(21)和第二反射镜(22),所述第一反射镜(21)和所述第二发射镜(22)平行设置。7. A kind of refractometer for refractive index distribution measurement as claimed in claim 5, is characterized in that, described optical path adjustment unit comprises first reflecting mirror (21) and second reflecting mirror (22), and described first reflecting mirror The mirror (21) is arranged parallel to the second emitting mirror (22). 8.如权利要求1-6之一所述的一种折射率分布测量的折光计,其特征在于,图像采集及处理单元包括透镜组、阵列传感器以及图像处理计算机,所述透镜组用于接收从所述棱镜的另一个侧面出射的光斑,并用于将该光斑传输给所述阵列传感器,所述阵列传感器用于将所述光斑转化为图像信号并传输给所述图像处理计算机,所述图像处理计算机用于处理所述图像信号以获得待测对象的折射率分布。8. A refractometer for measuring refractive index distribution according to any one of claims 1-6, wherein the image acquisition and processing unit includes a lens group, an array sensor, and an image processing computer, and the lens group is used to receive The light spot emitted from the other side of the prism is used to transmit the light spot to the array sensor, and the array sensor is used to convert the light spot into an image signal and transmit it to the image processing computer. The processing computer is used to process the image signal to obtain the refractive index distribution of the object to be measured.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111796295A (en) * 2020-06-04 2020-10-20 深圳奥锐达科技有限公司 Collector, manufacturing method of collector and distance measuring system
CN115298536A (en) * 2021-08-25 2022-11-04 深圳市流数科技有限公司 Refractometer, detection device and method for detecting refractive index
CN117423600A (en) * 2023-12-19 2024-01-19 哈尔滨工业大学 Fluorocarbon plasma group space distribution monitoring device and method

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255267A (en) * 2000-03-10 2001-09-21 Kanagawa Acad Of Sci & Technol Two-dimensional imaging surface plasmon resonance measurement apparatus and measurement method
CN1493866A (en) * 2002-10-07 2004-05-05 佐佐木一正 Method and apparatus for measuring refractive index distribution of transparent body
US20050195879A1 (en) * 2004-02-19 2005-09-08 Nat Inst Of Info & Comm Tech Inc Admin Inst Slab type solid-state laser medium and slab type nonlinear optical medium each using light path formed by multiple reflection caused by three reflecting surfaces
US20060124840A1 (en) * 2004-12-09 2006-06-15 Nathional Institutes Of Natural Sciences Spectroscope
CN1815204A (en) * 2005-01-31 2006-08-09 应用材料股份有限公司 Automatic optical inspection using multiple objectives
CN101915750A (en) * 2010-07-07 2010-12-15 清华大学 Biomolecular interaction detection method and system based on SPR interference imaging
US20110134438A1 (en) * 2009-12-07 2011-06-09 Canon Kabushiki Kaisha Refractive index distribution measuring method and refractive index distribution measuring apparatus
CN102269622A (en) * 2010-06-02 2011-12-07 北京智朗芯光科技有限公司 Perpendicular incident broadband spectrometer
CN102590142A (en) * 2012-03-12 2012-07-18 南开大学 Measurement of matter refractive index distribution using focusing and total internal reflection method
CN103884681A (en) * 2014-03-20 2014-06-25 浙江大学 Phase microscope imaging method based on SHWS (Shack-Hartmann Wavefront Sensor)

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255267A (en) * 2000-03-10 2001-09-21 Kanagawa Acad Of Sci & Technol Two-dimensional imaging surface plasmon resonance measurement apparatus and measurement method
CN1493866A (en) * 2002-10-07 2004-05-05 佐佐木一正 Method and apparatus for measuring refractive index distribution of transparent body
US20050195879A1 (en) * 2004-02-19 2005-09-08 Nat Inst Of Info & Comm Tech Inc Admin Inst Slab type solid-state laser medium and slab type nonlinear optical medium each using light path formed by multiple reflection caused by three reflecting surfaces
US20060124840A1 (en) * 2004-12-09 2006-06-15 Nathional Institutes Of Natural Sciences Spectroscope
CN1815204A (en) * 2005-01-31 2006-08-09 应用材料股份有限公司 Automatic optical inspection using multiple objectives
US20110134438A1 (en) * 2009-12-07 2011-06-09 Canon Kabushiki Kaisha Refractive index distribution measuring method and refractive index distribution measuring apparatus
CN102269622A (en) * 2010-06-02 2011-12-07 北京智朗芯光科技有限公司 Perpendicular incident broadband spectrometer
CN101915750A (en) * 2010-07-07 2010-12-15 清华大学 Biomolecular interaction detection method and system based on SPR interference imaging
CN102590142A (en) * 2012-03-12 2012-07-18 南开大学 Measurement of matter refractive index distribution using focusing and total internal reflection method
CN103884681A (en) * 2014-03-20 2014-06-25 浙江大学 Phase microscope imaging method based on SHWS (Shack-Hartmann Wavefront Sensor)

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
C. QUAN,S.H. WANG ET AL.: "Integrated optical inspection on surface geometry and refractive index distribution of a microlens array", 《OPTICS COMMUNICATIONS》 *
YASUHIRO KOIKE,YOSHITAKA TAKEZAWA ET AL.: "new interfacial-gel copolymerization technique for steric GRIN polymer optical waveguides and lens arrays", 《APPLIED OPTICS》 *
张玉,刘德森: "六角形孔径平面微透镜阵列的制作及基本特性研究", 《光子学报》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111796295A (en) * 2020-06-04 2020-10-20 深圳奥锐达科技有限公司 Collector, manufacturing method of collector and distance measuring system
CN111796295B (en) * 2020-06-04 2023-12-12 深圳奥锐达科技有限公司 Collector, manufacturing method of collector and distance measuring system
CN115298536A (en) * 2021-08-25 2022-11-04 深圳市流数科技有限公司 Refractometer, detection device and method for detecting refractive index
CN117423600A (en) * 2023-12-19 2024-01-19 哈尔滨工业大学 Fluorocarbon plasma group space distribution monitoring device and method
CN117423600B (en) * 2023-12-19 2024-04-23 哈尔滨工业大学 Fluorocarbon plasma group space distribution monitoring device and method

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