CN108572160A - A kind of refractometer of profile measurement - Google Patents
A kind of refractometer of profile measurement Download PDFInfo
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- CN108572160A CN108572160A CN201710148080.9A CN201710148080A CN108572160A CN 108572160 A CN108572160 A CN 108572160A CN 201710148080 A CN201710148080 A CN 201710148080A CN 108572160 A CN108572160 A CN 108572160A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention discloses a kind of refractometers of profile measurement, belong to measurement and optical field, it includes light source unit, optical path adjusting unit, probe unit and image variants unit, wherein, light source unit is for generating directional light, optical path adjusting unit is used to adjust directional light beam size according to the measurement range of setting, it is additionally operable to adjust directional light beam direction so that beam orthogonal is incident to probe unit, probe unit includes prism and lens array, lens array fitting is arranged on a side of prism, it is used to receive the collimated light beam from optical path adjusting unit, the bottom surface of prism fits on the interface of object to be measured, image variants unit is for receiving the hot spot being emitted from another side of prism, it is additionally operable to carry out image procossing to hot spot, and then obtain the refractive index of object to be measured.Apparatus of the present invention are simple and compact for structure, and energy refractive index distribution measures, and measurement accuracy is higher.
Description
Technical field
The invention belongs to measure and optical field, and in particular to a kind of apparatus for measuring refractive index, for index distribution
It measures.
Background technology
Refractive index is a kind of physical attribute of substance, it is common technology controlling and process index in food production, passes through measurement
The refractive index of food liquid, it is possible to authenticate the composition of food determines the concentration of food, judges the purity level and quality of food.
Meanwhile in terms of medicine, the refractive index of biological tissue is measured, it can be determined that whether canceration occurs.In optical communication field, measure
The index distribution of optical fiber, for light, transimiison analysis has important use in optical fiber.In terms of semiconductor devices, refractive index
Distribution is also an important parameter.
The measurement of refractive index is an important technology, and there are many technologies based on the law of refraction now, realizes
The measurement of refractive index.Common method, which has, is biased to horn cupping, autocollimation method and critical angle method, wherein deviation horn cupping precision is higher, faces
Boundary's horn cupping is most widely used, and the instrument most represented is Abbe refractometer.But these technologies are not high enough in addition to measurement accuracy
Outside problem, also measurement method is cumbersome.In addition, existing device generally can only all measure the refractive index of uniform liquid, such as
Fruit liquid it is uneven, then be unable to measure its refractive index.
It is easy and the folding of profile measurement can be carried out therefore, it is necessary to develop a kind of high certainty of measurement, measurement method
Photometry.
Invention content
For the disadvantages described above or Improvement requirement of the prior art, the present invention provides a kind of refractive powers of profile measurement
Meter, it is intended that enter probe unit using directional light incidence carries out refractive index with refractive index substance unevenly distributed
Measurement, the technical issues of thus solving to be unable to measured rate distribution in the prior art, and apparatus of the present invention it is compact-sized it is simple,
High certainty of measurement measures simplicity.
For achieving the above object, the present invention provides a kind of refractometer of profile measurement comprising：
Light source unit, for generating directional light,
Optical path adjusting unit is additionally operable to adjust for adjusting the directional light beam size according to the measurement range of setting
The directional light beam direction so that beam orthogonal is incident to probe unit,
Probe unit comprising prism and lens array, the lens array fitting are arranged in a side of the prism
On face, for receiving the collimated light beam from the optical path adjusting unit, the bottom surface of the prism fits in the lens array
On the interface of object to be measured,
Image variants unit, described image acquisition and processing unit are for receiving from another side of the prism
The hot spot of face outgoing is additionally operable to carry out image procossing to the hot spot, and then obtains the refractive index of object to be measured.
In the above inventive concept, prism and index distribution non-uniform material are in direct contact composition interface, and light passes through
When interface reflects, it is different to reach the position of the point on interface, and since material refractive index is unevenly distributed, light
The reflectivity obtained by the position of difference is different, to carry out the measurement of refractive index.
Further, the lens array includes that multiple specifications are identical and edge is tangent to form the lens of array arrangement.
Further, the lens array includes that multiple specifications are identical and edge is separated by setpoint distance to form array arrangement
Lens.
Further, the lens array includes the identical lens of at least two specifications.
Further, the light source unit includes parallel light source and extender lens group, the parallel light source and described
Extender lens group is coaxially disposed.
Further, the extender lens group is Galileo system or Kepler system.
Using the purpose of extender lens group be expanded laser light it is diameter in the above inventive concept, reduces the angle of divergence of laser beam,
Be conducive to the measurement range of the broadening present invention, improve precision.
Further, the optical path adjusting unit include the first speculum and the second speculum, first speculum and
Second transmitting mirror is arranged in parallel.Beam incident angle and reflection are adjusted by optical path adjusting unit, with the measurement of adjusting apparatus
Range and raising precision.
Further, image variants unit includes lens group, sensor array and pattern process computer, institute
Lens group is stated for receiving the hot spot being emitted from another side of the prism, and for the hot spot to be transferred to the array
Sensor, the sensor array handle computer for converting the hot spot to picture signal and being transferred to described image,
Described image processing computer is for handling described image signal to obtain the index distribution of object to be measured.
In the above inventive concept, prism and object to be measured or test substance constitute different reflecting interfaces, since substance is rolled over
The rate of penetrating is unevenly distributed, light incidence different refractivity position, and the corresponding reflective light intensity of identical incidence angle is different.In probe unit
The array that lens array is made of the lens of same parfocal plays the role of focusing to collimated light beam, due to convergence, from
And a series of discs of confusion can be obtained when directional light being made to transmit in the optical path, i.e. hot spot is distributed, you can measures the relative light intensity of hot spot
Distribution.Lens group and sensor array are for image procossing, lens group and sensor array to the hot spot that is emitted from probe unit
It carries out taking figure, then image is calculated and handled with pattern process computer, to obtain the relative light intensity of hot spot distribution, from
And obtain the corresponding index distribution situation of substance.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect：
Since the presence of lens array makes the incidence of incident parallel light become a series of behind the interface that test substance forms
Hot spot enters back into lens group and sensor array, then carries out image procossing, obtains the index distribution of test substance, above
The core component (referring to probe unit) of light path ensure that apparatus of the present invention being capable of the non-uniform object of real-time refractive Index Distribution Measurement
For matter to obtain refractive index profile, measurement result is accurate.In addition, apparatus of the present invention are compact-sized simple, when measurement, will wait for
It surveys substance and is placed on prism bases, it is convenient that test substance is placed, and apparatus of the present invention have extraordinary application prospect.
Description of the drawings
Fig. 1 is the structural schematic diagram of the device of the liquid refractivity distribution measuring of the embodiment of the present invention；
Fig. 2 is the middle light path schematic diagram of light source unit and optical path adjusting unit in the embodiment of the present invention；
Fig. 3 is that prism is fitted in the light path schematic diagram on object interface to be measured in probe unit in the embodiment of the present invention；
Fig. 4 is the light path schematic diagram of lens array in probe unit in the embodiment of the present invention focused to light beam；
Fig. 5 (a) is Fresnel reflection curve and incidence angle graph of relation under different refractivity；
Fig. 5 (b) is the corresponding refractive index location drawing of Fresnel reflection rate curve Local map and three kinds of positions.
In all the appended drawings, identical reference numeral is used for indicating identical element or structure, wherein：
1- light source unit 2- optical path adjusting unit 3- lens arrays
4- prisms 5- objects to be measured or test substance 6- image acquisition and processing units
21- the first speculum the second speculums of 22-
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
It does not constitute a conflict with each other and can be combined with each other.
Fig. 1 is the structural schematic diagram of the device of the liquid refractivity distribution measuring of the embodiment of the present invention, and Fig. 2 is of the invention real
Apply the middle light path schematic diagram of light source unit and optical path adjusting unit in example, Fig. 3 is rib in probe unit in the embodiment of the present invention
Mirror is fitted in the light path schematic diagram on object interface to be measured, and Fig. 4 is pair of lens array in probe unit in the embodiment of the present invention
The light path schematic diagram that light beam focuses, in conjunction with the above fourth officer figure it is found that the inventive system comprises light source unit 1, optical path adjusting lists
Member 2, probe unit and image variants unit 6, wherein light source unit 1 is for generating directional light, optical path adjusting unit
2 according to the measurement range of setting for adjusting the directional light beam size, and optical path adjusting unit 2 is additionally operable to adjust described parallel
Light beam direction is so that beam orthogonal is incident to probe unit, and probe unit after converging directional light for being incident to test substance
Interface, since the index distribution of test substance is uneven, so obtain emergent light spot, image variants unit 6 use
In the reception emergent light spot and the light intensity of hot spot is analyzed to obtain the index distribution of object to be measured.
Wherein, the light source unit includes parallel light source and extender lens group, the parallel light source and described is expanded
Lens group is coaxially disposed.The extender lens group is Galileo system or Kepler system.The optical path adjusting unit includes
First speculum 21 and the second speculum 22, first speculum 21 and second transmitting mirror 22 are arranged in parallel.Adjust the
The directional light beam size is adjusted in the angle of one speculum 21 and the second speculum 22, likewise, can also adjust described
Directional light beam direction is so that beam orthogonal is incident to probe unit.Herein, three can also be arranged according to actual requirement of engineering
Or more speculums disposed in parallel, still, in principle, two speculums arranged in parallel can be in X-direction and Y
It is adjusted on direction, the function of adjusting can be met.Probe unit includes prism 4 and lens array 3, the lens array fitting
It is arranged on a side of the prism, the lens array is for receiving the directional light from the optical path adjusting unit
The bottom surface of beam, the prism fits on the interface of object 5 to be measured.
In one embodiment of the invention, the lens array includes that multiple specifications are identical and edge is tangent to form battle array
The lens or the lens array for arranging arrangement include that multiple specifications are identical and edge is separated by setpoint distance to form array arrangement
Lens.
In yet another embodiment of the present invention, the lens array includes the identical lens of at least two specifications.It is described
Lens array can also include the identical lenticule of at least four specifications, to form an array surface, the lens array
Can form a file or a row.
Image variants unit includes lens group, sensor array and pattern process computer, the lens group
For receiving the hot spot being emitted from another side of the prism, and for the hot spot to be transferred to the sensor array,
The sensor array is for converting the hot spot to picture signal and being transferred to described image processing computer, described image
Processing computer is for handling described image signal to obtain the index distribution of object to be measured.
In the present invention, the detecting module is made of lens array and reflecting prism and test substance, wherein reflection
It is in contact with test substance on the upside of prism, constitutes reflecting interface, lens array is in contact with reflecting prism side, constitutes light
Incident interface, the other side are beam projecting interface.When parallel rays is incident to lens array, since lens array is by same burnt
Away from lens composition array, play the role of focusing to collimated light beam, to make incident beam in detecting module outgoing interface
A series of disc of confusion distributions can be obtained when output, i.e. hot spot is distributed.The hot spot being emitted to lens group and sensor array takes
Figure obtains spot intensity Relative distribution figure, and then image is calculated and handled with the CPU of pattern process computer, to obtain
The relative light intensity value of different hot spots, and each hot spot has corresponded to converging beam in the position of reflecting interface, each interface location pair
The different refraction distributions for having answered substance, have just obtained corresponding profile measurement result.
Material refractive index distribution measuring operation principle of the present invention is as follows：
The directional light of light source unit outgoing, enters probe unit, due to lens array by the optical path adjustment device of speculum
The presence of row, directional light, which is incident to lens array, can make to go out with different angle when light reflection due to the converging action of lens array
Penetrate, become a series of discs of confusion when to be received by lens group and sensor array, wherein reflecting interface by prism upper surface and
Test substance is constituted, uneven due to index distribution, and to keep reflectivity different, and obtained disc of confusion light intensity is different
, measurement is realized by the refractive index of Intensity Analysis testing liquid.
Apparatus of the present invention are to ensure measurement accuracy to the convergence of directional light using lens array, because the present invention analyzes light
Spot light intensity is related to position of the corresponding incident beam on interface, and position range is smaller, and the precision measured is higher.Directional light
When line enters reflecting interface, the difference of incident angle keeps emergent light angle different, is acted on by the convergence of lens array, can make same
Position range of the corresponding incident ray of one hot spot on reflecting interface is substantially reduced, and corresponding position is obtained to analyze light intensity
The refractivity precision of liquid be guaranteed.
Present invention utilizes the principles of albedo measurement refractive index, when light beam is reflected by interface, reflective light intensity with
Reflectivity is related, is known by fresnel formula derivation：
Outgoing beam light intensityWherein, θ1And θ2For incidence angle and refraction angle, n1With
n2For the refractive index of prism and testing liquid, θ is the angle of emergent light and s light, I0For the light intensity of incident light.When light transmits, light
There is polarization, that is to say, that a kind of just electromagnetic wave, there are electric fields and magnetic field, electric field on light vertical transmission direction can edge
Various directions are propagated, we define the vertical paper of direction of an electric field inwards and be s light, p just parallel papers.
In the present invention, it is 45 ° for example to take angle, and it is directional light light beam that incident beam is taken in practical measurement process, because
Incident light angle corresponding to this different hot spot opposite position be it is identical, and initial incident light linear light be by force it is identical, because
Unique variable in this present invention is refractive index, and used prism is homogeneous material composition, n1It is identical, i.e. n2's
Difference folding leads to the difference of reflectivity, to keep output intensity different, it is clear that n2Distribution be refractive index point by test substance
Cloth composition, therefore, the present invention is also achieved that n2That is the measurement of material refractive index distribution.
In order to verify the accuracy of the present invention, the accuracy of measurement result is made of reflectance curve and light transmission below
It further illustrates, it is specific as follows：
Relationship between different fresnel reflectance and incident angle is acquired by experiment, in the present invention, I
Take three different locations therein as illustrating, respectively position a, b and c, the convergence due to lens array to light beam
Effect, same position correspond to the different light beam in more incident angle, and at different location corresponding incidence angle be it is identical, so
It ensure that the condition of control variate method.
Fig. 5 (a) is obtained Fresnel reflection curve under different refractivity substance, wherein taking the refractive index of glass to be
1.52, the present invention designs ranges of incidence angles in critical angle hereinafter, therefore will not be totally reflected.For convenience of description, wherein Fig. 5
(b) partial enlarged view for be Fig. 5 (a) reflectance curves being 55 degree to 60 degree in incidence angle, wherein position a, b and c corresponding diagrams (5)
Description of symbols has also been made in position on b curves, and the distribution of three position hot spots is these positions corresponds to Fresnel curve
Integrated value, therefore be the integrated value of multi-group data with hot spot mensuration, it ensure that the precision that invention measures.
In the present invention, the hot spot figure under different refractivity can be obtained using principle of reflection, recycle Fresnel reflection formula
The index distribution of substance is calculated in relationship corresponding with refractive index.
The present invention can be used for the index distribution of real-time online measuring substance, only need to be on device when measuring different material
Different test substances is replaced, carries out taking figure using lens group and sensor array, be analyzed by pattern process computer
It is convenient and efficient to obtain refractive index distribution curve.
A kind of profile measurement refractometer in the present invention, using the light beam of identical incident angles in different refractions
Reflectivity is different rule under rate distribution interface, realizes the measurement of index distribution, i.e., be cleverly utilized reflectivity and
The measurement of the relational implementation index distribution of light intensity.
For the present invention by the distribution of hot spot light intensity come refractive Index Distribution Measurement, measurement process is simple, after device is completed,
After only need to hot spot quickly being taken figure, carries out software calculating analysis and can be obtained measurement result, it is simple and quick, it realizes not
The measurement of homogeneous substance refractive index.Secondly, as a contrast with the light intensity of Air Interface hot spot, material refractive index is obtained, precision obtains
To significantly improving, the precision that hot spot distribution also ensures measurement is calculated finally by computer software.
The device of the material refractive index distribution measuring of apparatus of the present invention can detect the case where substance index distribution in real time, tool
There is the characteristics of precision height, long lifespan, strong antijamming capability.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include
Within protection scope of the present invention.
Claims (8)
1. a kind of refractometer of profile measurement, which is characterized in that it includes：
Light source unit (1), for generating directional light,
Optical path adjusting unit (2) is additionally operable to adjust institute for adjusting the directional light beam size according to the measurement range of setting
Directional light beam direction is stated so that beam orthogonal is incident to probe unit,
Probe unit comprising prism (4) and lens array (3), the lens array are bonded one be arranged in the prism
On side, the lens array is for receiving the collimated light beam from the optical path adjusting unit, the bottom surface fitting of the prism
In on the interface of object to be measured (5),
Image variants unit (6), described image acquisition and processing unit are for receiving from another side of the prism
The hot spot of face outgoing is additionally operable to carry out image procossing to the hot spot, and then obtains the refractive index of object to be measured.
2. a kind of refractometer of profile measurement as described in claim 1, which is characterized in that the lens array includes
Multiple specifications are identical and edge is tangent to form the lens of array arrangement.
3. a kind of refractometer of profile measurement as described in claim 1, which is characterized in that the lens array includes
Multiple specifications are identical and edge is separated by setpoint distance to form the lens of array arrangement.
4. a kind of refractometer of profile measurement as claimed in claim 2 or claim 3, which is characterized in that the lens array
Including the identical lens of at least two specifications.
5. a kind of refractometer of profile measurement as described in one of claim 1-4, which is characterized in that the light source list
Member includes parallel light source and extender lens group, and the parallel light source and the extender lens group are coaxially disposed.
6. a kind of refractometer of profile measurement as claimed in claim 5, which is characterized in that the extender lens group is
Galileo system or Kepler system.
7. a kind of refractometer of profile measurement as claimed in claim 5, which is characterized in that the optical path adjusting unit
Including the first speculum (21) and the second speculum (22), first speculum (21) is parallel with the second transmitting mirror (22)
Setting.
8. a kind of refractometer of profile measurement as described in one of claim 1-6, which is characterized in that Image Acquisition and
Processing unit includes lens group, sensor array and pattern process computer, and the lens group is for receiving from the prism
The outgoing of another side hot spot, and for the hot spot to be transferred to the sensor array, the sensor array is used for
It converts the hot spot to picture signal and is transferred to described image processing computer, described image processing computer is for handling
Described image signal is to obtain the index distribution of object to be measured.
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| CN201710148080.9A CN108572160B (en) | 2017-03-14 | 2017-03-14 | Refractometer for measuring refractive index distribution |
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| CN201710148080.9A CN108572160B (en) | 2017-03-14 | 2017-03-14 | Refractometer for measuring refractive index distribution |
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| CN111796295A (en) * | 2020-06-04 | 2020-10-20 | 深圳奥锐达科技有限公司 | Collector, manufacturing method of collector and distance measuring system |
| CN117423600A (en) * | 2023-12-19 | 2024-01-19 | 哈尔滨工业大学 | Fluorocarbon plasma group space distribution monitoring device and method |
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| CN117423600B (en) * | 2023-12-19 | 2024-04-23 | 哈尔滨工业大学 | Fluorocarbon plasma group space distribution monitoring device and method |
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| CN108572160B (en) | 2020-05-19 |
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