CN1815204A - Automatic optical inspection using multiple objectives - Google Patents
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- 230000003287 optical effect Effects 0.000 title claims abstract description 70
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- 230000033001 locomotion Effects 0.000 claims description 9
- 230000008676 import Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
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- 241000219739 Lens Species 0.000 description 113
- 210000000695 crystalline len Anatomy 0.000 description 113
- 238000003384 imaging method Methods 0.000 description 8
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- 238000001444 catalytic combustion detection Methods 0.000 description 4
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- 230000001360 synchronised effect Effects 0.000 description 2
- 235000014698 Brassica juncea var multisecta Nutrition 0.000 description 1
- 241000251184 Rajiformes Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N21/8903—Optical details; Scanning details using a multiple detector array
Abstract
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.
Description
Technical field
The present invention relates to a kind of technology that detects object, particularly each camera and utilize multilens automated optical detection technique and system.
Background technology
Automated optical detects (AOI) system and is used to detect multiple article, as the defective of semiconductor wafer and printed circuit board (PCB) (PCBs) etc.This system utilizes one or more images to catch usually or " microscope " module is obtained and can be covered detected article whole surface image.These images then are admitted in the computing machine of a certain model and handle with multiple algorithm arrangement, to confirm the defective of article.Usually, each image scanning module comprises a light source to illuminate the inspected object part, and the front lens assembly (being called as object lens) of some type can be led back light an image acquiring device, such as charge-coupled device (charge-coupled Device; CCD).Common a kind of AOI system utilizes the one scan method, and by detected article being divided into (for example: level) bar shaped, an independent image scanning module moves around simultaneously, to collect each continuous bar shaped.These modes can suitably operate in some applications, and for example, requiring of the less relatively and entire process amount in detected surface is relatively low.Yet more during the application of high throughput (as network measuring), may have bigger surface area needs to detect (for example, several feet lateral dimension) for needs, and therefore a scan method may spend the considerable time.
The application of this higher treatment capacity needs a plurality of image scanning modules usually, and each module has a camera and object lens, allows the parallel processing of many images.Usually, the quantity of the image scanning module that needs depends on the requirement of system and the performance of single image scanning module.For example, the quantity of the image scanning module that needs is directly proportional with the system throughput of whole surface area and requirement usually, with the visual field (field of view; FOV) and the pixel of camera be inversely proportional to.The camera that pixel is high more is expensive more, often is the manyfold of used object lens.Therefore, many image scanning of system employs module can be than only using individual module to obtain higher treatment capacity.
Therefore, automated optical detection technique and the system with high-performance and low-cost is necessary.
Summary of the invention
The invention provides a kind of each camera and utilize multilens automatic optical detection method and system.
One embodiment of the present invention provide an automatic optical detecting system, this system generally includes at least one camera and at least one image scanning module, this image scanning module generally includes a plurality of objective lens modules, these objective lens modules have the visual field that can cover an article part in scanning process, and one mobile image select the illuminating apparatus structure, with successively from the visual field (FOV) transmitted image of each objective lens module to this camera.
Another embodiment of the present invention provides a kind of automatic optical detecting system that detects article, and this system generally includes at least one camera and at least one image scanning module.This image scanning module generally includes a plurality of objective lens modules, and these objective lens modules have the visual field that can cover an article part in scanning process, and a mobile image selects the illuminating apparatus structure, with successively from the visual field transmitted image of this objective lens module to this camera.In some embodiments, the objective lens module of each image scanning module is with arc or circular arrangement, and the distance between an objective lens module and the light source is definite constant.Objective lens module allows during with arc shooting each objective lens module to use an independent visor mechanism.The placement of image scanning module should interrelatedly also can cover whole detected article with the visual field part crossover that guarantees objective lens module.
Another embodiment of the present invention provides a kind of method that comprises the optical detection article of at least one image scanning module.This image scanning module generally includes a camera, one scan mechanism, a light source and a plurality of objective lens module.The parts of images that this method generally includes successively the article in the visual field (FOVs) of many objective lens modules is sent to camera.This scanning mechanism imports light into the single object lens from light source successively, and will import in the corresponding camera of being shared by this objective lens module from the image of this objective lens module.Processed by the image that camera grasps to detect the defective in these article.
Description of drawings
For being described in more detail above-mentioned feature of the present invention, be further detailed by reference example and accompanying drawing at this.Wherein part embodiment describes with accompanying drawing.Yet, it should be noted that accompanying drawing is only represented exemplary embodiments of the present invention, therefore should not think limitation of the scope of the invention, because the present invention also can allow other equivalent embodiment.
Fig. 1 is the exemplary plot that detects (AOI) system 100 according to the automated optical of embodiment of the present invention.
Fig. 2 a to Fig. 2 d is the multiple topology example figure according to the image scanning module of embodiment of the present invention.
Fig. 3 a to Fig. 3 d is according to the light source of embodiment of the present invention and the exemplary plot in image-capture path.
Fig. 4 is the exemplary plot according to the aperture diaphragm and the aperture of embodiment of the present invention.
Fig. 5 a to Fig. 5 e is the object lens layout exemplary plot according to numerous embodiments of the present invention.
Fig. 6 is the operation example figure according to article of detection of embodiment of the present invention.
Description of reference numerals
100 automatic optical detecting systems, 110 image scanning modules
120 transfer systems, 130 detected article
132 subregions, 134 vertical hurdles
140 screens, 150 controllers
112 arcs, 202 objective lens modules
211 objective lenss, 213 visors
204 optical heads, 205 pipe lens
206 cameras, 216 imaging planes
207 optical splitters, 208 images are selected mirror
209 light sources, 250 aperture diaphragms
252 apertures
Embodiment
The invention provides automatic optical detection device and technology that each camera utilizes many object lens image scanning module.One scan mechanism comprises a plurality of optical modules, in order to drive the optical signalling from each object lens of corresponding camera successively.Single scanning field by the video that fixes, compare with scanning system, the mobile accuracy demand that moves the translation system of detected article significantly reduces, " flying spot " laser scanning system or for example, for example charge-coupled device (CCDs) or need accurately to move the time delay integration (TDI) CCDs of control based on the system of continuous light source and Linear Imaging Device.
The detection system example
Fig. 1 is the example that detects (AOI) system 100 according to the automated optical of embodiment of the present invention.This automatic optical detecting system 100 utilizes a plurality of image scanning modules 110 to detect the defective on the surface of detected article 130.As shown in Figure 1, under a plurality of image scanning modules 110, detected article 130 move on transfer system 120.The mechanism of multiple other type also can be used to move detected article 130, for example removable transport level.In some embodiments, in the time of 110 motions of image scanning module, detected article 130 may be fixed.
The various control function of automatic optical detecting system 100, for example control of transfer system 120 may be carried out by controller 150, for example has the computing machine or the programmable logic controller (PLCs) of video frequency collection card.In some embodiments, via a user interface, screen 140 (or a traditional keyboard/mouse and display) for example, processor may control automatic optical detecting system 100 many aspects (such as, transfer rate, detected parameters etc.).In some embodiments, controller 150 can show the one or more images that detect effect or the manual detection of report (for example, passing through processor) at screen 140.
Controller 150 also may control chart as scan module 110 so that the synchronized movement of image capturing and detected article 130.The scanning field set in the visual field of image scanning module usually, 110 should comprise the image of whole detected article 130.For the out of true that solves possible detected article 130 moves accuracy problem with the objective lens module relevant position, each objective lens module and image scanning module 110 may be arranged as to the small part crossover.
Automatic optical detecting system 100 may comprise a sensor (figure does not show) or alternate manner, for example but mark is remembered, to survey the position of detected article 130, have coarse synchronous between the image of permission visor position and article position is caught with respect to image scanning module 110.The accuracy of synchronism that the image of increase transmitting moving is caught can reduce the crossover quantity of intermodule, improves system effectiveness.
Fig. 2 a is image scanning module 110 exemplary plot, and each image scanning module 110 may comprise two arcs of being made up of objective lens module 202 112, and objective lens module 202 is distributed in optical head 204 (comprising a camera 206) on every side.In some embodiments, each image scanning module 110 may be utilized many optical head combinations 204.For example, in order to increase the image capture process amount, the optical head combination 204 of separation may be used for each arc 112.
Fig. 2 b represents the details of independent image scanning module 110, and optical head 204 generally includes camera 206, pipe lens 205, optical splitter 207 and light source 209.Optical head 204 may comprise also that an image selects mirror 208, is used for illuminating successively when the image scanning module is moved for 110 times and image being sent to camera 206 from each objective lens module 202 when detected article 130.In some embodiments, the light conducting system of some type is used in the light path, for example, selects mirror 208 to conduct to camera 206 from image a two field picture of detected article 130.
Shown in vertical view Fig. 2 c of some embodiment, tested article 130 may be divided into the subregion 132 in abutting connection with (for example vertical), a pair of image scanning module 110
AWith 110
BBe used to catch the image section of respective partition 132.That is to say that each may cover different subregion 132 to the image scanning module.Image selects mirror 208 rotations to grasp the different field-of-view image part of subregion 132 successively from each objective lens module 202.
Be depicted as the side view of single objective lens module 202 as Fig. 2 d, each objective lens module 202 comprises an objective lens 211 and a visor 213, and this visor 213 is used for shifting light paths to images from objective lens 211 and selects mirror 208.In some embodiments, " panorama scanning (periscopic scanning) " technology is used (shown in Fig. 3 a-3d), is used in and places the visor that one 45 degree tilt on the object lens, and light path can folding 90 degree.Image selects mirror 208 may also be configured to become 45 degree with optical axis, becomes 45 degree with turning axle, therefore, and optical axis and rotating shaft parallel.This configuration may stop the rotation from detected article 130 to the visual field of camera 206.
And, in some embodiments, objective lens 211 may infinitely change (promptly, objective lens 211 can be placed on from detected article 130 distances and be the place of focal distance f), like this, the propagation that after passing objective lens 211, can be parallel to each other from the light of detected article 130, and can bifurcated.A corresponding distance is arranged between objective lens 211 and the pipe lens 205,, on camera 206, produce the image in the visual field with objective lens 211.
If reflection source is utilized (for example, if detected article 130 are reflexive), by introducing light to FOV224 from light source 209, image selects mirror 208 also to can be used to illuminate the visual field (FOV) 224 for each object lens 202.By aiming at objective lens module 202 on arc 112, can keep the distance between each object lens 202 and the light source 209.By keeping this distance, the aperture (satisfying the condition that light source is reined in by section) that arrives each object lens 202 from the light of light source can provide unified light source for the object lens FOV of each objective lens module 202.
In some embodiments, light source 209 can be an impulse source, such as flashlamp, and pulse LED, or laser.In some other embodiments, light source 209 may be continuous light source such as arc lamp, incandescent lamp, continuously led array, or continuous laser.If image is selected light pulse of mirror 208 continuous sweeps, picture can fix.The small vibrations of eliminating or reducing detected article or system can help the picture that fixes.If utilization continuous light source, the electronics of camera 206 or mechanical shutter can be used for the picture that fixes.If image selects mirror 208 in each FOV scanning with stop, the optically focused of camera 206 can reach image when selecting mirror 208 to stop and assemble the light beam that is fit to of needs.
In some embodiments, with different light sources and imaging configuration, each FOV can obtain a plurality of images.Select mirror 208 and short pulse light with continuous images, or it is continuous to have the scanning and residence time of long exposure, also can obtain a plurality of images.The various combinations of multiple light courcess, imaging wavelength, bright-field and dark field, reflection and transmit level, polarized state, focussing plane, differ contrast, (Diffractive Interference Contrast DIC) waits the accusation that may be used for obtaining bigger contrast and promote defective in the diffraction interference contrast.Such microscope light source and imaging parameters can change to improve the contrast of defective and background.
Shown in Fig. 3 a to Fig. 3 d, image selects mirror 208 can regulate (for example rotation) with the imaging plane 216 from objective lens module 202 transmitted images to camera 206 successively.Fig. 3 a to Fig. 3 d represents light source and two objective lens modules 202
1And 202
2Light source and optically focused path.
Shown in Fig. 3 a, image selects mirror 208 can rotate to and first object lens 202
1Relative position.In this position, image selects mirror 208 to import light to the first object lens 202 from light source 209
1,, illuminate the visual field 204 of following detected article 130 via optical splitter 207.Shown in Fig. 3 b, led back object lens 202 from being illuminated the next light of FOV224 reflection
1,, arrive the imaging plane 216 of camera 206 via optical splitter 207.Shown in Fig. 3 c and Fig. 3 d, image selects mirror 208 can rotate to and first object lens 202
2The image of another FOV224 is illuminated and grasped in relative position.Back with reference to figure 2b, if detected article 130 are direct reflections, corresponding each object lens 202, aperture diaphragm 250 has an aperture 252.
As shown in Figure 4, aperture diaphragm 250 from the distance of the one times of focal length in basic plane (f) of objective lens 211 (for example places, 213 distance L 1 equals focal distance f with the summation of 211 the distance L 2 from visor 213 to objective lens from aperture diaphragm 250 to visor), make light a wit far away directly on.Can guarantee that like this light can reflected back aperture 252 and enter camera 206, and can not be blocked.
Some different optical modules (lens, visor, light conduction) may be used for shifting light path to single camera 206 from many objective lens modules 202.Multiple aligning gear, as spatial filter, autofocus mechanism also may be utilized.In some embodiments, prism may be used for replacing visor to shift light path.Yet, may be in the scattering and the distortion of the easier generation wavelength in the edge in the visual field based on the system of prism.The optical module that therefore, should comprise these scatterings of compensation and distortion based on the system of prism.
In different embodiment, the optical properties of these optical modules can change, for example, and in order to satisfy specific (special) requirements (for example, obtain require resolution and treatment capacity).Yet in embodiment, objective lens 211 has a size in the rectangular field of view of 3mm * 3mm to 8mm * 8mm, and the scope of NA is 0.03 to 0.06, and focal length is 70 to 125mm, and enlargement ratio is 1 to 2 times.Camera 206 can be between 600 * 400 to 2000 * 2000 pixels, each pixel size is between 7 to 15 microns.Light source 207 can be created in the wideband light source in the visible wavelengths scope, and can Be Controlled be used for guaranteeing that detected light (by detected article 130 reflections or transmission) is covered with camera 206, this camera 206 may use any suitable image sensing apparatus, such as CCD camera or cmos sensor.When with a plurality of wave band, image scanning module 110 has a scope image acquisition time of 5 to 50 seconds (obtaining the time that a picture needs from each object lens).Change above-mentioned parameter value and can obtain bigger resolution, for example, increase the NA value of lens, reduce the visual field, or increase the Pixel Dimensions of camera.And, in some embodiments,, in each image scanning module, may utilize a plurality of cameras in order to improve treatment capacity.
Object lens layout example
In order to guarantee that detected article 130 can be detected fully, the quantity of objective lens module 202, minimum should be the single FOV204 number of the whole width (W1) of detected article 130 divided by each objective lens module 202, deduct the part of FOV crossover.Shown in Fig. 2 b, objective lens module 202 is arranged on the arc 112.Arc 112 shifts the distance that a FOV width deducts crossover with respect to the other side on perpendicular to the direction of detected article 130 direction of motion, to guarantee in the zone that is not capped between each FOV.The quantity of arc 112 is selected to be based upon in the multiple consideration, the interval of objective lens module 202 on each arc 112 for example, image is selected the number of times (residence time of at every turn locating an objective lens involves acceleration and retarded velocity) that mirror 208 can stop in the time that system gives according to treatment capacity, or other consideration.Shown in Fig. 2 a, a plurality of image scanning modules are arranged to cover the width of whole detected article 130, and a pair of image scanning module 110 covers corresponding subregion 132.
Fig. 5 a has represented the top view of this kind image scanning module 110 arrangement modes, is fit to check the subregion 132 (width is Wp) of detected article 130.As mentioned above, cover the width of whole detected article 130, a plurality of image scanning modules 110 for areal coverage 224 with the FOV of single object lens 202
AWith 110
BPlace continuously and the other side's skew relatively along the direction of motion of detected article 130.
The checked subregion 132 conceptive vertical hurdles 134 that are divided into adjacency, the vertical hurdle (for example, 134 of any four adjacency
1-134
4) can be covered by the visual field 224 of object lens 202 on the different arcs 112.For example, image scanning module 110
AArc 112
1With 112
2On objective lens module 202
1With 202
2The visual field cover vertical hurdle 134
1With 134
2Equally, image scanning module 110
BArc 112
3With 112
4On object lens 202
3With 202
4The visual field cover vertical hurdle 134
3With 134
4The objective lens module 202 of remaining each arc 112 covers each the vertical hurdle on the subregion 132 whole width W p in an identical manner.
Shown in Fig. 2 a, 110 pairs of the image scanning modules of any other suitable quantity can level is arranged on the direction of motion perpendicular to detected article 130.Fig. 5 a only shows a kind of arrangement mode, and the arrangement of the objective lens module 202 of other type also can cover the width of whole detected article 130.
Fig. 5 b has represented the another kind of arrangement mode of objective lens module 202.Arc 112 is aligned to the annulus of the part crossover with same radius R, the relative the other side's skew with C2 of center of circle C1.Shown in Fig. 5 a, the vertical hurdle (for example, 134 of adjacency
1To 134
4) can be by different arcs 112
3To 112
4On objective lens module 202 cover.The annulus that each objective lens module is formed is provided with an optical head, and a camera and an image that centers on center rotation are separately selected mirror, and such setting can guarantee that an optical head can not stop the light of another optical head.
Fig. 5 c has represented the another kind of arrangement mode of objective lens module 202.A plurality of arcs 112 are to be arranged in concentric circles (a common center of circle C is arranged) and different radius R 1 and R2.Shown in Fig. 5 a and Fig. 5 b, the vertical hurdle 134 of adjacency
1To 134
4Can be by different arcs 112
3To 112
4On objective lens module 202 cover.Form the objective lens module 202 of external concentric circle
1With 202
2 Cover subregion 132
1With 132
2, simultaneously, form the objective lens module 202 of internal concentric
3With 202
4 Cover subregion 132
3With 132
4Above-mentioned arrangement mode needs corresponding setting and guarantees that an optical head can not stop the light of another optical head, comprises the folding light path from an optical head to different imaging planes simultaneously, utilizes hollow (or transparent) image to select mirror etc.
In some embodiments, the arrangement of object lens may comprise the objective lens module on the arc that is arranged in the part crossover, and the distance between the radius of each arc and the visor of object lens and front lens changes accordingly to keep continuous optical path length.Keep the same design that continuous optical path length allows to be used for multi sphere shape.Shown in Fig. 5 d, objective lens module 202
1-5Be arranged in five radiuses and be respectively the arc 112 of the crossover of R1-R5
1-5On.Shown in Fig. 5 e, each objective lens module 202
1-5The visor 213 of object lens and the distance L of 211 of objective lenss
1-5Change, select mirror 208 (for example, L1+R1=L2+R2=L3+R3=L4+R4=L5+R5) from image in each arc to the continuous light path of 211 of objective lenss to keep.
The unified light source of objective lens module 202 usefulness on the arc 112 is constant with the distance between keeping from the light source to the objective lens.Objective lens module 202 may be arranged as other mode, as between the objective lens module 202 mutually skew form linear array, provide tested article be examined the zone to small part crossover area territory.
It is relatively large that above-mentioned objective lens arrangement mode, objective lens 211 and the distance of 209 of camera 206 and light sources are compared the conventional microscope that is used for similar purpose.This distance is along with the object lens quantity of each camera scanning increases.As previously mentioned, in order to arrive so long distance, objective lens 211 constantly changes so that the light that passes through is directional light, perhaps places other lens on light path.In some embodiments, this distance is actually qualification, so the scope (angular deviation of outfield point light beam) that the quantity of object lens and optical path length may reference raies, and it may be selected the practical size limitation of mirror by image.
Fig. 6 is illustrated in the example of the operation 600 that scans each objective lens module 202 (for example, in one or more arcs) in the image scanning module 110 successively.As previously mentioned, this scanning mechanism can make different rows' objective lens module 202 be scanned simultaneously.Therefore similar operation 600 (walking abreast) is simultaneously handled.
This operation 600 starts from 602, resets scanning mechanism, and an image scanning module 110 is pointed to the visual field of first object lens of a corresponding camera.For example, see also Fig. 2 b, image selects mirror to turn to the most left objective lens module 202 to illuminate the corresponding visual field and to transmit picture on optical axis.In the step 604, the visual field of first object lens is illuminated, and in step 606, image is grasped by camera.
In the step 608, cycling 610-614 carries out in each remaining objective lens module.In step 610, scanning mechanism is adjusted to the visual field of pointing to next object lens.In step 612, illuminate the visual field, in step 614, grasp image.Execute in each remaining object lens in case operate 610 to 614, step 602 is returned in operation, and this row is prepared to rescan in the visual field of replacement scanning mechanism to the first object lens, to grasp the image of the detected article 130 that move between object lens.For the entire portion that guarantees article all is scanned, operation cycle may be carried out simultaneously with goods coveying mechanism.That is to say that image is selected mirror and pass on mechanism to be controlled to these to operate in FOV of article motion and deduct execution simultaneously in the time of promptly deciding the length of crossover between FOV.The size of crossover may be by the motion tolerance decision of inspected object.
In some embodiments, for detecting defective, different rows' image may be spliced into bigger more complete images of items.Yet, in further embodiments, when the size of defective can be complete in a single visual field acquisition, the single FOV image that obtains from each object lens is enough to defects detection.
In any embodiment, multiple image processing techniques is used to the defects detection based on image-capture.For example, image that grasps and known good image are (for example, be stored in the database) contrast, with the image comparison that obtains from intact article, or with the image comparison that does not have defective effect of " statistics ", perhaps with article in the sample relatively (for example, the comparison of " crystal grain is to crystal grain " or " point-to-point ") of same design.
Conclusion
Compare the many microscopic systems of each traditional microscope with a light source and a camera, the present invention provides a kind of format high throughput, the optical detection of cost appropriateness by reducing the quantity of camera and light source.And, with respect to scanning system (for example, " flying spot laser scanning system "),, transfer system (for example, conveyer) motion accuracy is required and may reduce greatly by the single field-of-view image that fixes.The error that transmits in the article also can compensating to the small part crossover by the visual field.
Though the above is preferred embodiment of the present invention, however the present invention other and further embodiment all can change not deviating under the essence spirit of the present invention, and its scope should be determined by claim.
Claims (28)
1. automatic optical detecting system, it comprises at least:
At least one camera; And
At least one image scanning module, it comprises a plurality of objective lens modules, described objective lens module is to have the visual field that can cover an article part in scanning process through arrangement, and one mobile image select the illuminating apparatus structure, to select from the visual field of described objective lens module successively and transmitted image described at least one camera extremely.
2. automatic optical detecting system as claimed in claim 1 is characterized in that, described objective lens module comprises an objective lens and a visor, in order to select the illuminating apparatus structure from described objective lens transmitted image to described image.
3. automatic optical detecting system as claimed in claim 2 is characterized in that, it is linear array that image scans a plurality of objective lens modules described in the module.
4. automatic optical detecting system as claimed in claim 2 is characterized in that, it is with an arc shooting that image scans a plurality of objective lens modules described in the module.
5. automatic optical detecting system as claimed in claim 4 is characterized in that, described objective lens module is that to select the illuminating apparatus structure around image be the arc shooting in the center of circle with at least one.
6. automatic optical detecting system as claimed in claim 5 is characterized in that,
Described system more comprises at least one light source; And
The visual field portion of described article selects the illuminating apparatus structure that light is illuminated from the mode of light source-guide by the extremely described visual field of objective lens module portion via described image.
7. automatic optical detecting system as claimed in claim 1, it further comprises a goods coveying mechanism, so that article move with respect to the image scanning module.
8. automatic optical detecting system as claimed in claim 1 is characterized in that, described image scanning module can move with respect to article between detection period.
9. automatic optical detecting system as claimed in claim 1, it comprises that further one can respond to the mechanism of relative motion between article and the image scanning module, with the position of decision article with respect to the image scanning module.
10. automatic optical detecting system as claimed in claim 1, it further comprises at least one light source.
11. automatic optical detecting system as claimed in claim 10 is characterized in that, described light source comprises a pulsed illumination diode (LED).
12. automatic optical detecting system as claimed in claim 10 is characterized in that, described light source comprises a flashlamp.
13. automatic optical detecting system as claimed in claim 10, it comprises at least one light source for each camera.
14. an automatic optical detecting system that detects article, it comprises at least:
At least one camera; And
At least one image scanning module, it comprises a plurality of objective lens modules, described objective lens module has the visual field that can cover an article part in scanning process, select the illuminating apparatus structure with a mobile image, with select from the visual field of described objective lens module successively and transmitted image to described at least one camera, wherein said a plurality of objective lens modules be with at least one be the arc shooting in the center of circle with image selection illuminating apparatus structure.
15. automatic optical detecting system as claimed in claim 14 is characterized in that,
Described a plurality of objective lens module is that to select the illuminating apparatus structure with at least two with image be the arc shooting in the center of circle, and
The visual field of the objective lens module on the visual field of the objective lens module on one first arc and one second arc is to the small part crossover.
16. automatic optical detecting system as claimed in claim 15, it comprises at least:
A plurality of cameras; And
The image scanning module of corresponding number, all (collective) objective lens modules of wherein a plurality of image scanning modules are through arranging so that the whole width of detected article is covered by the whole visual field of all objective lens modules.
17. automatic optical detecting system as claimed in claim 14, it is characterized in that, at least one image scanning module further comprises, one places the diaphragm mechanism (stop mechanism) between image selection illuminating apparatus structure and a plurality of objective lens module, and wherein said diaphragm mechanism has the aperture of the described a plurality of lens modules of a plurality of correspondences.
18. automatic optical detecting system as claimed in claim 17 is characterized in that, described diaphragm mechanism places on the approximate light path position from one times of focal length of objective lens of objective lens module.
19. automatic optical detecting system as claimed in claim 14 is characterized in that, described objective lens module comprises an objective lens and a folding mirror, to select the illuminating apparatus structure from described objective lens transmitted image to described image.
20. as claim 19 a described automatic optical detecting system, it is characterized in that,
Described objective lens module folding mirror is that the light path outside placement and objective lens is approximated to 45 degree;
Described image selects illuminating apparatus structure and its turning axle to be approximated to miter angle, with the direction transmission of its rotating shaft parallel light from objective lens module.
21. automatic optical detecting system as claimed in claim 14 is characterized in that, described objective lens module is the visual field that has to the small part crossover through being arranged as.
22. a method that detects article, it may further comprise the steps:
At least a portion of described article is brought in a plurality of objective lens modules in the visual field of at least one;
Regulate an image and select the illuminating apparatus structure, will import from the field-of-view image of objective lens module at least one camera of being shared by described objective lens module by described objective lens module successively;
Grasp image with the camera of being shared; And
The image of handling extracting is to detect the defective in the described article.
23. method as claimed in claim 22 is characterized in that, at least a portion of described article is brought step in many rows' the visual field of objective lens modules into and is comprised via a connecting gear and move this article.
24. method as claimed in claim 22 is characterized in that, regulates described scanning mechanism and comprises that a mobile visor mechanism is to conduct an image to the camera of being shared from the visual field of an objective lens module.
25. method as claimed in claim 24 is characterized in that, moves described image and selects the illuminating apparatus structure to comprise the described image selection of rotation illuminating apparatus structure.
26. method as claimed in claim 24 further comprises the visual field of selecting the bright described objective lens module of illumination that the illuminating apparatus structure provided with a light source via described image.
27. method as claimed in claim 26 is characterized in that, described objective lens module is that to select the illuminating apparatus structure with at least one with image be the arc shooting in the center of circle through arranging.
28. method as claimed in claim 27, it is characterized in that, be to select the illuminating apparatus structure to illuminate the visual field of described objective lens module via image, described image selection illuminating apparatus structure comprises by the conduction of the aperture on the diaphragm mechanism selects the light of illuminating apparatus structure to described objective lens module from image.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/047,435 US7355689B2 (en) | 2005-01-31 | 2005-01-31 | Automatic optical inspection using multiple objectives |
| US11/047,435 | 2005-01-31 |
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| Publication Number | Publication Date |
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| CN1815204A true CN1815204A (en) | 2006-08-09 |
| CN1815204B CN1815204B (en) | 2010-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200510134032.1A Expired - Fee Related CN1815204B (en) | 2005-01-31 | 2005-12-21 | Automatic optical inspection system and method using multiple objectives |
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| Country | Link |
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| US (3) | US7355689B2 (en) |
| CN (1) | CN1815204B (en) |
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- 2005-12-21 CN CN200510134032.1A patent/CN1815204B/en not_active Expired - Fee Related
-
2006
- 2006-10-30 US US11/554,280 patent/US7394531B2/en active Active
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| CN110301032A (en) * | 2017-02-10 | 2019-10-01 | 科磊股份有限公司 | Identification process makes a variation during product manufacturing |
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Also Published As
| Publication number | Publication date |
|---|---|
| US20070159623A1 (en) | 2007-07-12 |
| US20080186556A1 (en) | 2008-08-07 |
| US7599075B2 (en) | 2009-10-06 |
| CN1815204B (en) | 2010-08-11 |
| US7355689B2 (en) | 2008-04-08 |
| US20060170910A1 (en) | 2006-08-03 |
| US7394531B2 (en) | 2008-07-01 |
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