CN103759668B - Inclination corrugated based on optical fibre matrix type space point source array generator interference system - Google Patents
Inclination corrugated based on optical fibre matrix type space point source array generator interference system Download PDFInfo
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- CN103759668B CN103759668B CN201410001551.XA CN201410001551A CN103759668B CN 103759668 B CN103759668 B CN 103759668B CN 201410001551 A CN201410001551 A CN 201410001551A CN 103759668 B CN103759668 B CN 103759668B
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Abstract
The invention discloses a kind of inclination corrugated interference system applying optical fibre matrix type space point source array generator, tilt corrugated interference system and can compensate the partial gradient of freeform optics element, thus reduce interference fringe density, strengthen the dynamic range of detector, it is achieved the measurement to complex free curved surface optical element.System fiber array replaces lens arra, and fiber array to be got well compared to lens arra outgoing spherical wave quality, and the outgoing spherical wave angle of divergence can control.The emergent light often restrainting optical fiber in fiber array is all imported by optical fiber one_to_one corresponding, and optical energy utilization efficiency is higher than the interference system using lens arra, can eliminate the impact of major part veiling glare simultaneously.The break-make of every optical fiber can individually control, and is not required to the gating re-using mask plate to control point source.
Description
Technical field
The invention belongs to optical precision measurement field, be a kind of interferometric measuring means for measuring free form surface, aspheric optical element surface shape.
Background technology
Freeform optics element, refers to a class complexity, non-rotationally-symmetric optical element.Be possible not only to obtain than the traditional optical face more preferable optical quality of type, substantially reduce the volume size of optical element simultaneously, have lightweight, debug conveniently, low cost and other advantages.Freeform optics element has been largely used to various field.Such as, in order to meet the requirement of the brightness of road pavement, illumination, the uniformity, and make major part light all be distributed in road surface to improve the utilization rate of light as far as possible, generally with shape of a saddle lens, LED street lamp being carried out luminous intensity distribution, the light that after luminous intensity distribution, LED street lamp exports is radiated at the hot spot formed on road surface and is become rectangle by circle.Free form surface automobile lamp is at present the most popular a kind of automobile lamp, and it has that car light height is low, the efficiency of light energy utilization is high and the advantage such as aerodynamic performance is good.In laser technology, microscope even image procossing, by alignment for incident light rays or the curve of given shape.Light beam converges simplest optical system into a line be made up of a cylindrical lens and a spherical lens.But, the so simple optical system of application is difficult to obtain the light that light intensity is evenly distributed, and applies freeform optics element then can overcome this shortcoming.
But the measurement level of freeform optics element seriously limits the raising of its processing and manufacturing level.Owing to freeform optics component side type degree of freedom is higher, partial face type graded is big, uses conventional interference measurement apparatus to measure, and often interference fringe density is excessive, exceed the detection dynamic range of detector, it is impossible to obtain stripe information and measure the face form quality amount of freeform optics element.
At present, the most also not having can high accuracy, the instrument of high efficient detection freeform optics component side shape.In freeform optics element is processed, the detection method of comparative maturity is mainly three coordinate machine method and contourograph method.Three coordinate machine method accuracy of detection can only achieve micron dimension, it is impossible to meets the measure of precision requirement of face shape.Contourograph method precision can reach submicron order, but measure every time and be only capable of obtaining the error of a line on element under test surface, is not the surface shape measurement of real meaning.Also have some other method, such as reflecting grating Photographic technique, swing arm profile scan method, fringe projection method, stitching interferometry, calculating holography method etc., all cannot realize high accuracy, the generalization surface shape measurement of high speed.The measurement apparatus of a kind of freeform optics surface based on pointolite array has been invented by Stuttgart University, Germany Osten professor team, use this measurement device free form surface maximum can compensate 10 surface graded, certainty of measurement is better than 1/10 λ.In the method, most important part is point source array generator, and it is mainly made up of lens arra, pinhole array, mask plate.But, when practical set is measured, also have some problems to need to overcome, as the quality of lens arra processing directly influence the quality on outgoing corrugated thus affect certainty of measurement, the shift position inaccuracy of mask plate can cause introducing veiling glare in interferogram.This device uses the bifocal path structure of safe graceful interference system.Owing to using bifocal path structure, light path characteristic the most altogether, cause its systematic error to increase, in order to ensure that certainty of measurement makes up the increase of the systematic error processing necessarily to device and has higher requirement, add the cost that processing is installed.
Summary of the invention
It is an object of the invention to design a kind of inclination corrugated based on optical fibre matrix type space point source array generator interference system, this system can be while realizing free form surface, aspherical optical element high-acruracy survey, it is ensured that the most quickly generalization detection.
The technical solution realizing the object of the invention is: a kind of inclination corrugated based on optical fibre matrix type space point source array generator interference system, light path is the Fizeau interference light path system improved, including light source, fiber coupler module, fiber array, Amici prism, collimation lens set, spherical lens group, part to be measured, diaphragm, imaging len and CCD；Wherein fiber array, collimation lens set and spherical lens group constitute gradient compensating module；Light source, fiber coupler module, fiber array, Amici prism, collimation lens set, spherical lens group, part to be measured common optical axis successively are arranged；Amici prism, diaphragm, imaging len and CCD common optical axis successively is arranged, and vertical with the optical axis residing for light source, fiber coupler module；The laser sent by light source is imported fiber coupler module by optical fiber, beam of laser is divided into multiple laser by fiber coupler module, by optical fiber, multiple laser is imported fiber array again, by fiber array outgoing multi beam diverging light, after Amici prism transmission, forming multi beam by collimation lens set again and have the directional light of differing tilt angles, multi beam has the directional light of differing tilt angles and enters spherical lens group, is divided into transmission light and the first reflection light on last minute surface of spherical lens group；Transmission light is irradiated to part to be measured, after being reflected by part to be measured, the multi-beam carrying part to be measured local surface form deviation returns the directional light with differing tilt angles carrying part to be measured local surface form deviation through spherical lens group formation multi beam, multi beam converging light is formed after the most collimated battery of lens, diaphragm is entered again by Amici prism degree of turning back, filter veiling glare through diaphragm, be finally imaged on CCD by imaging len, form optical system for testing；First reflection light from last minute surface of spherical lens group along backtracking through spherical lens group, collimation lens set, then by Amici prism folding turn 90 degrees entrance diaphragm, filter veiling glare through diaphragm, be finally imaged on CCD by imaging len, formed reference path.CCD is upper occurs that test light superposes formation interferogram with reference light.
The present invention compared with prior art, its remarkable advantage: based on optical fibre matrix type space point source array generator tilt corrugated interference system gradient compensating module in employ the lens arra before fiber array substitutes.Fiber array to be got well compared to lens arra outgoing spherical wave quality, and by selecting different optical fiber, the change of the outgoing spherical wave angle of divergence is more convenient.In terms of optical energy utilization efficiency, because the emergent light often restrainting optical fiber in fiber array is all imported by optical fiber one_to_one corresponding, so optical energy utilization efficiency is higher than the interference system using lens arra.Meanwhile, the break-make of every optical fiber can individually control, and mustn't re-use mask plate to control the gating of point source.Additionally while optical energy utilization efficiency improves, it is also possible to eliminate the impact of major part veiling glare.
Accompanying drawing explanation
Fig. 1 inclination corrugated based on optical fibre matrix type space point source array generator interference system schematic diagram.
Fig. 2 fiber array end face schematic diagram.
Detailed description of the invention
Design first proposes inclination corrugated based on optical fibre matrix type space point source array generator interference system, breaches the limitation of the interference system using lens arra, can preferably eliminate systematic error, improves certainty of measurement.The program there is no proposition in the world.
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In conjunction with Fig. 1, a kind of inclination corrugated based on optical fibre matrix type space point source array generator interference system, light path is the Fizeau interference light path system improved, including light source 1, fiber coupler module 2, fiber array 3, Amici prism 4, collimation lens set 5, spherical lens group 6, part to be measured 7, diaphragm 8, imaging len 9 and CCD 10；Wherein fiber array 3, collimation lens set 5 and spherical lens group 6 constitute gradient compensating module；Light source 1, fiber coupler module 2, fiber array 3, Amici prism 4, collimation lens set 5, spherical lens group 6, part to be measured 7 common optical axis successively are arranged；Amici prism 4, diaphragm 8, imaging len 9 and CCD 10 common optical axis successively are arranged, and above-mentioned optical axis is vertical with the optical axis residing for light source 1, fiber coupler module 2；The laser sent by light source 1 is imported fiber coupler module 2 by optical fiber, beam of laser is divided into multiple laser by fiber coupler module 2, by optical fiber, multiple laser imported fiber array 3 again, by fiber array 3 outgoing multi beam diverging light, after Amici prism 4 transmission, form multi beam by collimation lens set 5 again and there is the directional light of differing tilt angles, multi beam has the directional light of differing tilt angles and enters spherical lens group 6, is divided into transmission light and the first reflection light on last minute surface of spherical lens group 6；Transmission light is irradiated to part 7 to be measured, after being reflected by part 7 to be measured, carry part 7 to be measured local surface form deviation multi-beam return through spherical lens group 6 formed multi beam carry part 7 to be measured local surface form deviation the directional light with differing tilt angles, multi beam converging light is formed after the most collimated battery of lens 6, it turn 90 degrees entrance diaphragm 8 again by Amici prism 4 folding, filter veiling glare through diaphragm 8, be finally imaged on CCD 10 by imaging len 9, form optical system for testing；First reflection light from last minute surface of spherical lens group 6 along backtracking through spherical lens group 6, collimation lens set 5, it turn 90 degrees entrance diaphragm 8 again by Amici prism 4 folding, filter veiling glare through diaphragm 8, be finally imaged on CCD 10 by imaging len 9, form reference path；Occur on CCD 10 that test light superposes formation interferogram with reference light.
Spherical lens group 6 is battery of lens equally celebrated for their achievements, i.e. the focus of spherical lens group 6 overlaps with the centre of sphere of the sphere nearest away from part 7 to be measured, the spherical lens group 6 light beam away from the nearest spheric reflection of part 7 to be measured be reference light.Part 7 vertex curvature center to be measured overlaps with the focus of spherical lens group 6.
System is nonzero digit interference system, part 7 to be measured carry the multi beam test light of part 7 to be measured local surface form deviation after reflecting and be not required to complete backtracking, as long as meeting interference pattern fringe density without departing from CCD 10 resolution.
Fiber coupler module 2 is made up of several fiber couplers, photoswitch.In order to avoid interfering between consecutive points light source, in fiber array 3, every optical fiber can realize light path break-make by the photoswitch controlled in fiber coupler module 2 in this root optical fiber.
It is 2u by the fiber array 3 outgoing spherical light wave angle of divergence, and sinu is not less than 0.13, select the spherical wave of the available different angles of divergence of different optical fiber；Fiber array 3 adjacent fiber core is away from for 2mm；The end face of fiber array 3 is vertical with the optical axis residing for light source 1, fiber coupler module 2, and in fiber array 3, the outgoing end face of every optical fiber is in the same plane.
In fiber array 3, the test light of every fiber exit can cover whole shape of part 7 to be measured.Same two two overlapping regions that edge optical fiber outgoing beam is irradiated on part 7 to be measured diametrically being positioned at fiber array 3 are greater than the bore of part 7 to be measured.
The work of final step is to parse part face to be measured shape information from interference fringe, and the sub-interferogram first different point sources obtained when photoswitch controls break-make carries out splicing and merges, to obtain the interference fringe pattern on whole curved surface.By the process to whole part interferogram to be measured, parse the face shape information of whole part to be measured.
Embodiment:
In conjunction with Fig. 1 and Fig. 2, design a kind of inclination corrugated based on optical fibre matrix type space point source array generator interference system, the He-Ne laser instrument that light source 1 selects wavelength to be 632.8nm；In fiber coupler module 2, first with fiber coupler, import 1 bundle laser is divided into 11 bundle laser, then the most a branch of in this 11 bundle laser is divided into 11 bundle laser with fiber coupler again, finally obtain 121 bundle laser is directed respectively into fiber array 3；Fiber array 3 comprises 11 × 11 optical fiber, and every fiber numerical aperture is 0.2；Collimation lens set 5 angle of visual field is ± 5 °, and collimation lens set 5 bore that effectively works is Φ 118mm, and collimation lens set 5 focal length is 225mm；The angle of visual field of spherical lens group 6 is ± 5 °, and the effectively work bore of spherical lens group 6 is Φ 80mm, and the focal length of spherical lens group 6 is 163mm；Collimation lens set 5 is 225mm with the interarea spacing of spherical lens group 6.Within system can be used to test maximized surface gradient deviation ± 10 °, relative aperture less than 0.4(F number more than 2.5) serial freeform optics element.
Claims (9)
1. inclination corrugated based on an optical fibre matrix type space point source array generator interference system, it is characterized in that: light path is the Fizeau interference light path system improved, including light source (1), fiber coupler module (2), fiber array (3), Amici prism (4), collimation lens set (5), spherical lens group (6), part to be measured (7), diaphragm (8), imaging len (9) and CCD(10)；Wherein fiber array (3), collimation lens set (5) and spherical lens group (6) constitute gradient compensating module；Light source (1), fiber coupler module (2), fiber array (3), Amici prism (4), collimation lens set (5), spherical lens group (6), part to be measured (7) common optical axis successively are arranged；Amici prism (4), diaphragm (8), imaging len (9) and CCD(10) common optical axis setting successively, above-mentioned optical axis is vertical with the optical axis residing for light source (1), fiber coupler module (2)；The laser sent by light source (1) is imported fiber coupler module (2) by optical fiber, beam of laser is divided into multiple laser by fiber coupler module (2), by optical fiber, multiple laser imported fiber array (3) again, by fiber array (3) outgoing multi beam diverging light, after Amici prism (4) transmission, form multi beam by collimation lens set (5) again and there is the directional light of differing tilt angles, multi beam has the directional light of differing tilt angles and enters spherical lens group (6), is divided into transmission light and the first reflection light on last minute surface of spherical lens group (6)；Transmission light is irradiated to part to be measured (7), after being reflected by part to be measured (7), the multi-beam carrying part to be measured (7) locally surface form deviation returns the directional light with differing tilt angles carrying part to be measured (7) locally surface form deviation through spherical lens group (6) formation multi beam, the most collimated battery of lens (5) forms multi beam converging light afterwards, it turn 90 degrees entrance diaphragm (8) again by Amici prism (4) folding, veiling glare is filtered through diaphragm (8), finally it is imaged on CCD(10 by imaging len (9)) on, form optical system for testing；First reflection light from spherical lens group (6) last minute surface along backtracking through spherical lens group (6), collimation lens set (5), it turn 90 degrees entrance diaphragm (8) again by Amici prism (4) folding, veiling glare is filtered through diaphragm (8), finally it is imaged on CCD(10 by imaging len (9)) on, form reference path；CCD(10) upper occur that test light superposes formation interferogram with reference light.
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterised in that: part to be measured (7) vertex curvature center overlaps with the focus of spherical lens group (6).
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterized in that: spherical lens group (6) is battery of lens equally celebrated for their achievements, the i.e. focus of spherical lens group (6) overlaps with the centre of sphere of the sphere nearest away from part to be measured (7), the light beam of the nearest spheric reflection of spherical lens group (6) middle-range part to be measured (7) be reference light.
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterized in that: system is nonzero digit interference system, carry the multi beam test light of part to be measured (7) locally surface form deviation after being reflected by part to be measured (7) and be not required to complete backtracking, as long as meeting interference pattern fringe density without departing from CCD(10) resolution.
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterized in that: in order to avoid interfering between consecutive points light source, in fiber array (3), every optical fiber can realize light path break-make by the photoswitch controlled in fiber coupler module (2) in this root optical fiber.
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterized in that: be 2u by fiber array (3) the outgoing spherical light wave angle of divergence, and sinu is not less than 0.13, select the spherical wave of the available different angles of divergence of different optical fiber；Fiber array (3) adjacent fiber core is away from for 2mm；The end face of fiber array (3) is vertical with the optical axis residing for light source (1), fiber coupler module (2), and in fiber array (3), the outgoing end face of every optical fiber is in the same plane.
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterised in that: in fiber array (3), the test light of every fiber exit can cover whole shape of part to be measured (7).
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterised in that: same two two overlapping regions that edge optical fiber outgoing beam is irradiated on part to be measured (7) diametrically being positioned at fiber array (3) are greater than the bore of part to be measured (7).
Inclination corrugated based on optical fibre matrix type space point source array generator interference system the most according to claim 1, it is characterised in that: fiber coupler module (2) is made up of several fiber couplers, photoswitch.
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| DE102015119274B4 (en) * | 2015-11-09 | 2018-07-12 | Björn Habrich | Method and device for determining the spatial position of an object by means of interferometric length measurement |
| DE102015222366A1 (en) * | 2015-11-12 | 2017-05-18 | Universität Stuttgart | Tilted object waves using and a Fizeau interferometer lens having interferometer |
| CN106197314B (en) * | 2016-07-19 | 2018-11-13 | 南京理工大学 | It is a kind of to obtain the planing method for tilting corrugated interference system Point Source array distribution |
| US11668876B2 (en) * | 2016-11-29 | 2023-06-06 | Technische Universiteit Eindhoven | Two-dimensional optical beam steering module |
| CN108362222B (en) * | 2018-01-29 | 2020-06-19 | 南京理工大学 | Non-zero novel point diffraction interference measurement system based on multidirectional inclined carrier frequency |
| CN109029282A (en) * | 2018-05-07 | 2018-12-18 | 南京理工大学 | Gradient compensation device in nonzero digit point diffraction interferometer system |
| CN109458944A (en) * | 2018-12-17 | 2019-03-12 | 南京理工大学 | The absolute verifying attachment of plane and its detection method based on synchronous conjugation differential interferometry |
| CN112097681A (en) * | 2020-09-16 | 2020-12-18 | 中国工程物理研究院激光聚变研究中心 | Complex optical curved surface shape error detection method based on speckle field phase recovery |
| CN116879316B (en) * | 2023-09-04 | 2023-11-17 | 杭州利珀科技有限公司 | Film material surface defect detection system and method based on optical fiber light source |
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