CN106197314B - It is a kind of to obtain the planing method for tilting corrugated interference system Point Source array distribution - Google Patents
It is a kind of to obtain the planing method for tilting corrugated interference system Point Source array distribution Download PDFInfo
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- CN106197314B CN106197314B CN201610575173.5A CN201610575173A CN106197314B CN 106197314 B CN106197314 B CN 106197314B CN 201610575173 A CN201610575173 A CN 201610575173A CN 106197314 B CN106197314 B CN 106197314B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a kind of planing methods obtaining inclination corrugated interference system Point Source array distribution, the design face graphic data input of measured piece is tilted into corrugated interference system simulated program, utilize reversibility of optical path, the point-source distribution region that each pair of point on part to be measured is answered all is calculated, determine the center-of-mass coordinate in each region, calculate each barycenter to corresponding region edge shortest distance matrix, according to the specific processing situation of point source array generator, optimize required point source position, obtain the optimum point source position that each pair of point is answered, the optimal location answered according to each pair of point on measured piece, obtain the point source array generator parameter for meeting part face deformation requirement to be measured, quantity including point source array, arrangement mode, point source spacing etc..The method principle is simple, easily realizes, the point source array parameters precision of acquisition is high, meets practical part demand to be measured.
Description
Technical field
The present invention relates to optical component surface shape detection fields, and in particular to a kind of acquisition inclination corrugated interference system Point Source
The planing method of array distribution.
Background technology
Freeform optics surface element can also simplify the structure of optical system while can not only more preferably correcting all kinds of aberrations, make
The performance of optical system is significantly improved, its application field is also made constantly to expand.High-precision freeform optics surface processes skill
Art be unable to do without high-precision free form surface detection technique, but since freeform optics surface Curvature varying is big, face shape degree of freedom is high,
It is set to increase difficulty in terms of high-precision processing and Precision measurement.
Mainly there are non-interfering detection method and interference detection method to the detection of free form surface both at home and abroad at present.Non-interfering detection method
The contradiction between measurement accuracy and speed cannot preferably be solved.Unified synchro measure may be implemented in interferometry, measures speed
Degree is fast, high certainty of measurement, the variation of energy detection faces shape wavelength magnitude.It is more promising at present in interferometry to have sub-aperture spelling
Connection technology and inclination corrugated compensation technique.Wherein tilt the Larger Dynamic measurement range of corrugated nonzero digit interferometry, nano level inspection
The advantages that surveying precision, holomorphism detection pattern so that it is concerned in freeform optics surface surface testing field.
Interfere detecting system design requirement according to corrugated nonzero digit is tilted, has studied based on pointolite array slope-compensation mould
The design method of block, Shen Hua's《It is ground based on the multiple freeform optics surface nonzero digit interferometry key technology for tilting corrugated
Study carefully》One pointolite array disclosed herein based on microlens array, since microlens array itself is there are spherical aberration, and array
The radius of middle lens is big, causes the interference pattern striped measured too intensive, but reducing glass bore, may result in luminous flux at double
Reduce, once and microlens array complete, the part to be measured of specific face shape can only be measured, thus in order to overcome be based on it is micro-
The problem of spherical aberration and measurement flexibility difference that the point source array of lens array is brought, introduces the point light source based on fiber array
The Primary Component of device.
Invention content
The purpose of the present invention is to provide it is a kind of obtain tilt corrugated interference system Point Source array distribution planing method,
The pointolite array parameter for obtaining to measure the measured piece for meeting certain face shape by given data analog simulation, overcomes and is based on
The problem of spherical aberration and measurement flexibility difference that the point source array of microlens array is brought.
Realize that the technical solution of the object of the invention is：A kind of acquisition inclination corrugated interference system Point Source array distribution
Planing method, method and step is as follows：
The design face graphic data input of measured piece is tilted corrugated interference system simulated program, according to inclined wave by the first step
Face interference system principle is returned the reflection light for tilting corrugated interference system by measured piece surface reflection and need not strictly be passed through
Point source position on optical axis, i.e. O points can determine one with the circle that (0,0) is that center of circle r is radius, only in Z=0 planes
Want reflection light by inclination corrugated interference system can be returned in this circle；It is transferred to second step；
Second step, using reversibility of optical path, reverse Geometrical Optics on the circle out of above-mentioned Z=0 planes obtain on measured piece
The corresponding point-source distribution region in any point B (s, t), wherein s indicate that the corresponding abscissas of point B on part to be measured, t indicate part to be measured
Upper corresponding ordinates of B；And so on, the point-source distribution region that each pair of point on part to be measured is answered all is calculated, to obtain
The required point-source distribution area array of holomorphism for obtaining measured piece is transferred to third step；
Third walks, and determines the center-of-mass coordinate (x, y) in each region in point-source distribution area array, is denoted as matrix A [i, j],
And calculate each barycenter to corresponding region edge shortest distance matrix dq[k, l], q indicate point different on measured piece, k tables
Show that the row coordinate of shortest distance matrix, l indicate the ordinate of shortest distance matrix；
4th step advanced optimizes the Point Source of needs according to the actual processing and distribution situation of point source array generator
It sets, removes redundancy, obtain the point source optimal location that each pair of point is answered on measured piece；
5th step, according to the point source optimal location that each pair of point on above-mentioned measured piece is answered, acquisition meets the deformation of measured piece face
Change desired point source array generator parameter.
Compared with prior art, the present invention its remarkable advantage is：
(1) it is foundation and nonzero digit principle of interference according to the surface graded variation of free form surface, using reverse ray tracing
Method, the method for obtaining the interference source phasor coordinate and numerical aperture that meet gradient compensation condition, principle is simple, easily realizes, precision
It is high.
(2) planing method of the present invention is combined according to present fiber array processing technology, it can more rationally, more accurately
Choose the parameter of fiber array in ground.
(3) reverse Geometrical Optics are applied, determine the quantity and switching sequence in interference source, it can be to avoid each in actually measuring
Interfering with each other between point source outgoing beam.
(4) the point light source generator proposed by the present invention based on fiber array, overcomes the spherical aberration that microlens array is brought
And measure the problems such as flexibility is poor.
(5) present invention is simple and effective, has very important significance to aspherical and free-curved-surface shape context of detection.
Description of the drawings
Fig. 1 is the flow chart that the present invention obtains the planing method for tilting corrugated interference system Point Source array distribution.
Fig. 2 obtains the light path signal for the planing method for tilting corrugated interference system Point Source array distribution to realize the present invention
Figure.
Specific implementation mode
Present invention is further described in detail below in conjunction with the accompanying drawings.
In order to realize the dynamic control to pointolite array, i.e., the every light beam being emitted in fiber array is carried out free
Break-make controls, and invention introduces the optical devices such as photoswitch, coupler.
It is a kind of combined with Figure 1 and Figure 2, to obtain the planing method for tilting corrugated interference system Point Source array distribution, specific side
Steps are as follows for method：
The design face graphic data input of measured piece is tilted corrugated interference system simulated program, according to inclined wave by the first step
Face interference system principle is returned the reflection light for tilting corrugated interference system by measured piece surface reflection and need not strictly be passed through
Point source position on optical axis, i.e. O points can determine one with the circle C that (0,0) is that center of circle r is radius, only in Z=0 planes
Want reflection light by inclination corrugated interference system can be returned in this circle；It is transferred to second step；
Second step, using reversibility of optical path, reverse Geometrical Optics on the circle out of above-mentioned Z=0 planes obtain on measured piece
The corresponding point-source distribution region C in any point B (s, t)1, wherein s indicates that the corresponding abscissas of point B on part to be measured, t expressions are to be measured
The corresponding ordinates of point B on part；And so on, the point-source distribution region that each pair of point on part to be measured is answered all is calculated, to
The required point-source distribution area array of holomorphism for obtaining measured piece is transferred to third step；
Third walks, and determines the center-of-mass coordinate (x, y) in each region in point-source distribution area array, is denoted as matrix A [i, j],
And calculate each barycenter to corresponding region edge shortest distance matrix dq[k, l], q indicate point different on measured piece, k tables
Show that the row coordinate of shortest distance matrix, l indicate the ordinate of shortest distance matrix；
4th step advanced optimizes the Point Source of needs according to the actual processing and distribution situation of point source array generator
It sets, removes redundancy, obtain the point source optimal location that each pair of point is answered on measured piece；
The step of optimizing the point source position needed, removing redundancy is as follows：
The parameter of the point source array generator of selection is inputted simulated program by step 1), generates a point source array, point source
Spacing is d, and d is the attainable minimum range of state-of-the art, number of arrays m × n；
Step 2) calculates barycenter to the distance of each point source and is stored in matrix dis [g, h], wherein in g representing matrixes
Row coordinate, the row coordinate in h representing matrixes, by dqThe corresponding shortest distance d of any one barycenter of the midpoint [k, l]1[k, l] and
Element in dis [g, h] compares one by one, will meet dis [g, h]<d1N number of point source position coordinates number deposit matrix of [k, l]
PSAqIn；
Step 3) is to matrix PSAqMiddle all the points source position coordinate is ranked up from high to low according to the number of appearance, is denoted as
It is that can survey that p1, p2, p3 ..., which will include point source coordinate p1 zone markers in above-mentioned point source position,；It is identical such as to encounter occurrence number
Situation, i.e. p1 are equal with p2 occurrence numbers, then preferentially select the coordinate close from central point；
Step 4) repeats step 2) with 3), and the point source position coordinates number that each pair of point on part to be measured is answered is stored in square respectively
Battle array PSAqIn, to matrix PSAqMiddle all the points source position coordinate is ranked up from high to low according to the number of appearance, by the point source
There is highest point source coordinates regional labeled as that can survey, to obtain the measurement point each put on part to be measured comprising number in position
Source position.
5th step, according to the point source optimal location that each pair of point on above-mentioned measured piece is answered, acquisition meets the deformation of measured piece face
Change the relevant parameters such as desired point source array generator parameter, including the quantity of point source array, arrangement mode, point source spacing.
Simulated program described herein is Shen Hua《Based on the multiple freeform optics surface nonzero digit interference for tilting corrugated
Measure key technology research》One inclination corrugated interference system simulated program disclosed herein.
The point source array of dynamic generation of the present invention makes the detection range of measured piece wider, improves the general of whole system
Property, while the spherical aberration brought due to simple lens is eliminated, and simplify system and device, easy to operate, high certainty of measurement.
Claims (4)
1. a kind of obtaining the planing method for tilting corrugated interference system Point Source array distribution, which is characterized in that method and step is such as
Under：
The design face graphic data input of measured piece is tilted corrugated interference system simulated program by the first step, dry according to corrugated is tilted
System principle is related to, optical axis need not strictly be passed through by returning the reflection light for tilting corrugated interference system by measured piece surface reflection
On point source position, i.e. O points can determine one with the circle that (0,0) is that center of circle r is radius, as long as instead in Z=0 planes
Light is penetrated by inclination corrugated interference system can be returned in this circle；It is transferred to second step；
Second step, using reversibility of optical path, reverse Geometrical Optics on the circle out of above-mentioned Z=0 planes obtain arbitrary on measured piece
The corresponding point-source distribution regions one point B (s, t), wherein s indicate that the corresponding abscissas of point B on part to be measured, t indicate point on part to be measured
The corresponding ordinates of B；And so on, the point-source distribution region that each pair of point on part to be measured is answered all is calculated, to obtain quilt
The required point-source distribution area array of holomorphism for surveying part is transferred to third step；
Third walks, and determines the center-of-mass coordinate (x, y) in each region in point-source distribution area array, is denoted as matrix A [i, j], and count
Calculate each barycenter to corresponding region edge shortest distance matrix dq[k, l], q indicate that point different on measured piece, k indicate most
The abscissa of short distance matrix, l indicate the ordinate of shortest distance matrix；
4th step advanced optimizes the point source position of needs, goes according to the actual processing and distribution situation of point source array generator
Fall redundancy, obtains the point source optimal location that each pair of point is answered on measured piece；
5th step, according to the point source optimal location that each pair of point on above-mentioned measured piece is answered, acquisition meets the deformation of measured piece face and wants
The point source array generator parameter asked.
2. according to claim 1 obtain the planing method for tilting corrugated interference system Point Source array distribution, feature
It is, in the 4th step, advanced optimizes the point source position of needs, remove redundancy, steps are as follows：
The parameter of the point source array generator of selection is inputted simulated program by step 1), generates a point source array, point source spacing
For d, number of arrays m × n；
Step 2) calculates barycenter to the distance of each point source and is stored in matrix dis [g, h], wherein the row in g representing matrixes
Coordinate, the row coordinate in h representing matrixes, by dqThe corresponding shortest distance d of any one barycenter of the midpoint [k, l]1[k, l] and dis
Element in [g, h] compares one by one, will meet dis [g, h]<d1N number of point source position coordinates number deposit matrix PSA of [k, l]q
In；
Step 3) is to matrix PSAqMiddle all the points source position coordinate is ranked up from high to low according to the number of appearance, be denoted as p1,
It is that can survey that p2, p3 ..., which will include point source coordinate p1 zone markers in above-mentioned point source position,；Such as encounter the identical feelings of occurrence number
Condition, i.e. p1 are equal with p2 occurrence numbers, then preferentially select the coordinate close from central point；
Step 4) repeats step 2) with 3), and the point source position coordinates number that remaining each pair of point on part to be measured is answered is stored in respectively
Matrix PSAqIn, to matrix PSAqMiddle all the points source position coordinate is ranked up from high to low according to the number of appearance, by the point
There is highest point source coordinates regional labeled as that can survey, to obtain the measurement each put on part to be measured comprising number in source position
Point source position.
3. according to claim 1 obtain the planing method for tilting corrugated interference system Point Source array distribution, feature
It is：In 5th step, point source array generator parameter includes point-source distribution mode, point source spacing, number of point sources.
4. according to claim 1 obtain the planing method for tilting corrugated interference system Point Source array distribution, feature
It is：The point source array generator uses the point light source generator based on fiber array.
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| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103759668A (en) * | 2014-01-02 | 2014-04-30 | 南京理工大学 | Inclined wave surface interfering system based on optical fiber array type space point source array generator |
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| JP2006250859A (en) * | 2005-03-14 | 2006-09-21 | Nikon Corp | Surface shape measuring method, surface shape measuring instrument, projection optical system manufacturing method, projection optical system, and projection exposure device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103759668A (en) * | 2014-01-02 | 2014-04-30 | 南京理工大学 | Inclined wave surface interfering system based on optical fiber array type space point source array generator |
Non-Patent Citations (1)
| Title |
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| 基于多重倾斜波面的光学自由曲面非零位干涉测量关键技术研究;沈华;《中国博士学位论文全文数据库 基础科学辑》;20150615;A005-7 * |
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