CN106197314A - A kind of planing method obtaining corrugated interference system Point Source array distribution - Google Patents
A kind of planing method obtaining corrugated interference system Point Source array distribution Download PDFInfo
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- CN106197314A CN106197314A CN201610575173.5A CN201610575173A CN106197314A CN 106197314 A CN106197314 A CN 106197314A CN 201610575173 A CN201610575173 A CN 201610575173A CN 106197314 A CN106197314 A CN 106197314A
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- point source
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- source array
- interference system
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a kind of planing method obtaining corrugated interference system Point Source array distribution, the design face graphic data input of measured piece is tilted corrugated interference system simulated program, utilize reversibility of optical path, corresponding point-source distribution region each on part to be measured is calculated, determine the center-of-mass coordinate in each region, calculate each barycenter shortest distance matrix to edge, corresponding region, situation of specifically processing according to point source array generator, point source position required for optimization, obtain each corresponding optimum point source position, according to corresponding optimal location each on measured piece, obtain the point source array generator parameter meeting part face to be measured deformation requirement, quantity including point source array, arrangement mode, point source spacing etc..Described Method And Principle is simple, easily realizes, it is thus achieved that point source array parameters precision high, meet actual part demand to be measured.
Description
Technical field
The present invention relates to optical component surface shape detection field, be specifically related to a kind of acquisition and tilt corrugated interference system Point Source
The planing method of array distribution.
Background technology
Freeform optics surface element can not only can also simplify the structure of optical system while more preferably correcting all kinds of aberration, makes
The performance of optical system is significantly improved, and also makes its application constantly expand.High-precision freeform optics surface processing skill
Art be unable to do without high-precision free form surface detection technique, but owing to freeform optics surface Curvature varying is big, face shape degree of freedom is high,
It is made to add difficulty in terms of high accuracy processing and Precision measurement.
Detection to free form surface the most both at home and abroad mainly has non-interfering detection method and interferes detection method.Non-interfering detection method
Can not preferably solve the contradiction between certainty of measurement and speed.Interferometry can realize unified synchro measure, measures speed
Degree is fast, and certainty of measurement is high, the change of energy detection faces shape wavelength magnitude.The most promising in interferometry have sub-aperture to spell
Connection technology and inclination corrugated compensation technique.The Larger Dynamic wherein tilting corrugated nonzero digit interferometric method measures scope, nano level inspection
Survey the advantage such as precision, holomorphism detection pattern so that it receives much concern in freeform optics surface surface testing field.
Interfere detecting system design requirement according to tilting corrugated nonzero digit, have studied based on pointolite array slope-compensation mould
The method for designing of block, Shen Hua " freeform optics surface nonzero digit interferometry key technology based on multiple inclination corrugated is ground
Study carefully " pointolite array based on microlens array disclosed herein, owing to microlens array itself exists spherical aberration, and array
The radius of middle lens is big, causes the interferogram striped measured the most intensive, but reducing glass bore, may result in luminous flux at double
Reduce, and once microlens array completes, and can only measure the part to be measured of specific face shape, so in order to overcome based on micro-
Spherical aberration that the point source array of lens arra brings and measure the problem of very flexible, introduces point source based on fiber array
The Primary Component of device.
Summary of the invention
It is an object of the invention to provide a kind of planing method obtaining corrugated interference system Point Source array distribution,
Obtain measuring the pointolite array parameter of the measured piece meeting certain face shape by given data analog simulation, overcome based on
Spherical aberration that the point source array of microlens array brings and the problem measuring very flexible.
The technical solution realizing the object of the invention is: a kind of acquisition tilts corrugated interference system Point Source array distribution
Planing method, method step is as follows:
The first step, tilts corrugated interference system simulated program, according to inclined wave by the design face graphic data input of measured piece
Face interference system principle, measured piece surface the reflection light being reflected back described inclination corrugated interference system need not strictly pass through
Point source position on optical axis, i.e. O point, i.e. can determine in Z=0 plane one with (0,0) be center of circle r be the circle of radius, only
Light to be reflected just can return described inclination corrugated interference system in this circle；Proceed to second step；
Second step, utilizes reversibility of optical path, reverse Geometrical Optics the circle in above-mentioned Z=0 plane, it is thus achieved that on measured piece
(s, t) corresponding point-source distribution region, wherein s represents abscissa corresponding for some B on part to be measured to any point B, and t represents part to be measured
Upper corresponding for B vertical coordinate；By that analogy, corresponding point-source distribution region each on part to be measured is calculated, thus obtains
Obtain the point-source distribution area array required for the holomorphism of measured piece, proceed to the 3rd step；
3rd step, determine each region in point-source distribution area array center-of-mass coordinate (x, y), is designated as matrix A [i, j],
And calculate each barycenter shortest distance matrix d to edge, corresponding regionq[k, l], q represents points different on measured piece, k table
Showing the row-coordinate of shortest distance matrix, l represents the vertical coordinate of shortest distance matrix；
4th step, according to actual processing and the distribution situation of point source array generator, optimizes the Point Source needed further
Put, remove redundancy, it is thus achieved that each corresponding point source optimal location on measured piece；
5th step, according to corresponding point source optimal location each on above-mentioned measured piece, it is thus achieved that meet the deformation of measured piece face
Change the point source array generator parameter required.
Compared with prior art, its remarkable advantage is the present invention:
(1) according to the surface graded foundation that is changed to of free form surface, and nonzero digit principle of interference, use reverse ray tracing
Method, be met gradient compensation condition interferes source phasor coordinate and the method for numerical aperture, and principle is simple, easily realizes, precision
High.
(2) planing method of the present invention is combined according to present fiber array processing technique, it is possible to more rationally, more accurate
Choose the parameter of fiber array.
(3) apply reverse Geometrical Optics, determine quantity and the switching sequence in interference source, can avoid each in reality is measured
Interfering with each other between point source outgoing beam.
(4) the point source generator based on fiber array that the present invention proposes, overcomes the spherical aberration that microlens array brings
And measure the problems such as very flexible.
(5) present invention is simply effective, is having very important significance aspheric surface and free-curved-surface shape context of detection.
Accompanying drawing explanation
Fig. 1 is the flow chart that the present invention obtains the planing method of corrugated interference system Point Source array distribution.
Fig. 2 is the light path signal realizing the planing method that the present invention obtains corrugated interference system Point Source array distribution
Figure.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In order to realize the dynamic control to pointolite array, i.e. every light beam of outgoing in fiber array is carried out freely
Break-make controls, and invention introduces the optics such as photoswitch, bonder.
In conjunction with Fig. 1 and Fig. 2, a kind of planing method obtaining corrugated interference system Point Source array distribution, specifically side
Method step is as follows:
The first step, tilts corrugated interference system simulated program, according to inclined wave by the design face graphic data input of measured piece
Face interference system principle, measured piece surface the reflection light being reflected back described inclination corrugated interference system need not strictly pass through
Point source position on optical axis, i.e. O point, i.e. can determine in Z=0 plane one with (0,0) be center of circle r be the round C of radius, only
Light to be reflected just can return described inclination corrugated interference system in this circle；Proceed to second step；
Second step, utilizes reversibility of optical path, reverse Geometrical Optics the circle in above-mentioned Z=0 plane, it is thus achieved that on measured piece
Any point B (s, t) corresponding point-source distribution region C1, wherein s represents abscissa corresponding for some B on part to be measured, and t represents to be measured
Vertical coordinate corresponding to B is put on part；By that analogy, corresponding point-source distribution region each on part to be measured is calculated, thus
Obtain the point-source distribution area array required for the holomorphism of measured piece, proceed to the 3rd step；
3rd step, determine each region in point-source distribution area array center-of-mass coordinate (x, y), is designated as matrix A [i, j],
And calculate each barycenter shortest distance matrix d to edge, corresponding regionq[k, l], q represents points different on measured piece, k table
Showing the row-coordinate of shortest distance matrix, l represents the vertical coordinate of shortest distance matrix；
4th step, according to actual processing and the distribution situation of point source array generator, optimizes the Point Source needed further
Put, remove redundancy, it is thus achieved that each corresponding point source optimal location on measured piece；
Optimizing the point source position needed, the step removing redundancy is as follows:
Step 1) parameter of the point source array generator selected is inputted simulated program, generate a point source array, point source
Spacing be d, d be the minimum range that state-of-the art can reach, number of arrays m × n；
Step 2) calculate barycenter and to the distance of each point source and be stored in matrix dis [g, h], wherein in g representing matrix
Row-coordinate, the row coordinate in h representing matrix, by dqBeeline d that any one barycenter of [k, l] midpoint is corresponding1[k, l] and
Element in dis [g, h] compares one by one, will meet dis [g, h] < d1N number of point source position coordinates numbering of [k, l] is stored in matrix
PSAqIn；
Step 3) to matrix PSAqIn all point source position coordinateses according to occur number of times be ranked up from high to low, be designated as
P1, p2, p3 ..., above-mentioned point source position will comprise point source coordinate p1 zone marker for surveying；As identical in run into occurrence number
Situation, i.e. p1 with p2 occurrence number is equal, then prioritizing selection coordinate close to central point；
Step 4) repeat step 2) and 3), corresponding point source position coordinates numbering each on part to be measured is stored in square respectively
Battle array PSAqIn, to matrix PSAqIn all point source position coordinateses according to occur number of times be ranked up from high to low, by described point source
Position comprises number of times and occurs that the highest point source coordinates regional is labeled as surveying, thus obtain the measurement point of each point on part to be measured
Source position.
5th step, according to corresponding point source optimal location each on above-mentioned measured piece, it is thus achieved that meet the deformation of measured piece face
Change the point source array generator parameter required, the relevant parameter such as including the quantity of point source array, arrangement mode, point source spacing.
Simulated program specifically described herein is that Shen Hua " interfere by freeform optics surface nonzero digit based on multiple inclination corrugated
Measure key technology research " an inclination corrugated interference system simulated program disclosed herein.
The point source array that the present invention dynamically generates makes the detection range of measured piece more extensively, improves the general of whole system
Property, eliminates the spherical aberration brought due to simple lens simultaneously, and simplify system and device, simple to operate, certainty of measurement is high.
Claims (4)
1. the planing method obtaining corrugated interference system Point Source array distribution, it is characterised in that method step is such as
Under:
The first step, tilts corrugated interference system simulated program by the design face graphic data input of measured piece, does according to tilting corrugated
Relate to system principle, measured piece surface the reflection light being reflected back described inclination corrugated interference system need not strictly through optical axis
On point source position, i.e. O point, i.e. can determine in Z=0 plane one with (0,0) be center of circle r be the circle of radius, as long as instead
Penetrate light and just can return described inclination corrugated interference system in this circle；Proceed to second step；
Second step, utilizes reversibility of optical path, reverse Geometrical Optics the circle in above-mentioned Z=0 plane, it is thus achieved that on measured piece arbitrarily
(s, t) corresponding point-source distribution region, wherein s represents abscissa corresponding for some B on part to be measured to 1 B, and t represents point on part to be measured
The vertical coordinate that B is corresponding；By that analogy, corresponding point-source distribution region each on part to be measured is calculated, thus obtains quilt
Survey the point-source distribution area array required for the holomorphism of part, proceed to the 3rd step；
3rd step, determines that (x y), is designated as matrix A [i, j], and counts for the center-of-mass coordinate in each region in point-source distribution area array
Calculate each barycenter shortest distance matrix d to edge, corresponding regionq[k, l], q represents points different on measured piece, and k represents
The row-coordinate of short distance matrix, l represents the vertical coordinate of shortest distance matrix；
4th step, according to actual processing and the distribution situation of point source array generator, optimizes the point source position needed further, goes
Fall redundancy, it is thus achieved that each corresponding point source optimal location on measured piece；
5th step, according to corresponding point source optimal location each on above-mentioned measured piece, it is thus achieved that meet measured piece face deformationization and want
The point source array generator parameter asked.
The planing method obtaining corrugated interference system Point Source array distribution the most according to claim 1, its feature
Being, in described 4th step, optimizing the point source position needed further, remove redundancy, step is as follows:
Step 1) parameter of the point source array generator selected is inputted simulated program, generate a point source array, point source spacing
It is the minimum range that state-of-the art can reach for d, d, number of arrays m × n；
Step 2) calculate barycenter and to the distance of each point source and be stored in matrix dis [g, h], the wherein row in g representing matrix
Coordinate, the row coordinate in h representing matrix, by dqBeeline d that any one barycenter of [k, l] midpoint is corresponding1[k, l] and dis
Element in [g, h] compares one by one, will meet dis [g, h] < d1N number of point source position coordinates numbering of [k, l] is stored in matrix PSAq
In；
Step 3) to matrix PSAqIn all point source position coordinateses according to occur number of times be ranked up from high to low, be designated as p1,
P2, p3 ..., above-mentioned point source position will comprise point source coordinate p1 zone marker for surveying；Feelings as identical in run into occurrence number
Condition, i.e. p1 with p2 occurrence number is equal, then prioritizing selection coordinate close to central point；
Step 4) repeat step 2) and 3), each corresponding point source position coordinates numbering remaining on part to be measured is stored in respectively
Matrix PSAqIn, to matrix PSAqIn all point source position coordinateses according to occur number of times be ranked up from high to low, by described point
Source position comprises number of times and occurs that the highest point source coordinates regional is labeled as surveying, thus obtain the measurement of each point on part to be measured
Point source position.
The planing method obtaining corrugated interference system Point Source array distribution the most according to claim 1, its feature
Being: in described 5th step, point source array generator parameter includes point-source distribution mode, point source spacing, number of point sources.
The planing method obtaining corrugated interference system Point Source array distribution the most according to claim 1, its feature
It is: described point source array generator uses point source generator based on fiber array.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362202A (en) * | 2018-02-02 | 2018-08-03 | 苏州科技大学 | Parameter determination method during inclination corrugated interferometry is aspherical |
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| JP2006250859A (en) * | 2005-03-14 | 2006-09-21 | Nikon Corp | Surface shape measuring method, surface shape measuring instrument, projection optical system manufacturing method, projection optical system, and projection exposure device |
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| JP2006250859A (en) * | 2005-03-14 | 2006-09-21 | Nikon Corp | Surface shape measuring method, surface shape measuring instrument, projection optical system manufacturing method, projection optical system, and projection exposure device |
| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103759668A (en) * | 2014-01-02 | 2014-04-30 | 南京理工大学 | Inclined wave surface interfering system based on optical fiber array type space point source array generator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362202A (en) * | 2018-02-02 | 2018-08-03 | 苏州科技大学 | Parameter determination method during inclination corrugated interferometry is aspherical |
| CN108362202B (en) * | 2018-02-02 | 2020-09-25 | 苏州科技大学 | Method for determining parameters in inclined wave surface interference measurement aspheric surface |
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