JPS6375525A - Temperature measuring instrument - Google Patents

Abstract

PURPOSE:To easily and accurately measure the real temperature of a translucent body to be measured by providing an auxiliary radiation source, etc., and finding transmissivity, effective emissivity, etc. CONSTITUTION:The translucent body 1 to be measured is provided which has temperature T, effective emissivity epsilon, transmissivity tau reflectivity (r), a coefficient alpha of absorption, and thickness (t), and radiation thermometers 31 and 32 are further provided on its one side while facing the opposite side of the radiation source 2 with temperature Tr across the radiation source 2 and object 1 to be measured. Then, radiant energy is incident on the radiation thermometer 31 from only the body 1 to be measured and radiant energy from the radiation source 31 is incident on the radiation thermometer 32 through the body 1 to be measured. An arithmetic means 4 carries out specific arithmetic operation based upon based upon the outputs E1 and E2 of those radiation thermometers 31 and 32, etc., to find the temperature T of the body 1 to be measured. Thus, the real temperature of the object 1 to be measured is easily and accurately measured.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a humidity measuring device that measures the polishing of a semitransparent object (object) to be measured using release energy.

rConventional technology] When measuring the temperature of a semi-transparent body non-contact using a 12-shape, the effective (apparent) emissivity may vary due to differences in thickness, color, etc., and the true ( It was difficult to measure the 4 degrees of crystallization.

[Problems to be Solved by the Invention] For this reason, is it a good idea to take the thickness etc. into consideration in advance, or is it difficult to deal with variations in the thickness etc.?).

In view of the above points, the purpose of this invention is to provide assistance.
- This is a humidity measuring device that uses a silver source to measure the effective emissivity, automatically corrects the emissivity, and measures the true temperature of a translucent body.

[Means for Solving Problems 1] This invention arranges a radiation source and a radiation thermometer on both sides of a semi-transparent object to be measured, and measures the temperature when the radiation energy of the radiation source is incident and when it is not. This humidity measuring device calculates the transmittance of the object to be measured from each output of the radiation thermometer, calculates the emissivity, and then calculates the true temperature.

[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.

In the figure, 1 is temperature T1 effective emissivity ε, transmittance τ,
The object to be measured is a semi-transparent body with a reflectance r, an absorption coefficient α, and a thickness t, on one side of which there is a radiation source 2 with a temperature Tr and an object to be measured '1.
A radiation thermometer 31 is placed opposite the radiation source 2 across the
．． 32 is listed as the installation number. Note that the radiant energy from only the measured pair @1 is incident on the radiant temperature 5131,
The radiation energy from the sensor 1 [2 passes through the object to be measured '1' and enters the radiation thermometer 32. From the outputs E+, Ez, etc. of the radiation thermometers 31 and 32, the calculation means 4 performs the following predetermined calculations to obtain the iM degree T of the object to be measured 1.
seek.

The radiant energy key equivalent to a black body at temperature T and Tr is F(T)
, E (Tr), and the outputs when the radiation energy of the radiation source 2 does not enter the radiation i m it and when it does enter the radiation i m it are taken as El and EZ, the following equation holds true.

El-εE(T> (1)E2-5
E (T>+rE (Tr) (2) In equation (2), the emissivity ε of the object to be measured 1 and the radiation source 2 are the objects to be measured 1
The transmittance τ is the sum of both radiant energies when transmitted.

From (1) and (2), the transmittance τ is expressed by the following formula.

τ-(E2-El 1/E <'rr) (3
) The denominator on the right side of equation (3) is the temperature of the radiation source 2 - [calculated by measuring r, or the radiation when there is no measured object 1)
The measured angle is determined from the output of 8 degrees 5132, and the transmittance τ is determined.

On the other hand, the following equation holds from the law of conservation of energy and Kirchhoff's law.

R + τ - 1 (4) Here, R is the total reflectance, and if this R is found, (
τ is found from equation (3), and ε is found from equation (4). Using the obtained effective emissivity ε, the characteristics of the object to be measured 1 can be determined from equation (1).

Next, with reference to FIG. 2, the total reflectance R is determined.

After that, the total reflectance R1 and the transmittance τ become as shown in the figure.

Therefore, the total reflectance R1 and transmittance τ are expressed by the following equation.

R=r +r (1-r)2exp (-2αt
)+r3 (1-r l eXp (-4αt)+
... ... -r +r (1-r)2exp (-2αt)
/ (1-r2exp (-2αt) ) (5
)τ-= <1-r )2exp (-αt) 10r
2 (1-r)2eXp (-3α[)+...
... = (1-r)2exp (-αt)/
('I −r 2 exp (−2αt)) (6
) From equations (5) and (6), the following equation is obtained.

R=r (1+reexp (-αt))
(7) When αt is sufficiently large, Equation (7) is as follows. (8) When αt is small, Equation (7) is (10) can be used. Note that, assuming that the refractive index of the object to be measured 1 is 0, the reflectance r for one time is generally given by the following equation and is known.

r=(<1-n)/(1+n))' (11) Thus, from equation (3), transmittance τ, (7).

(8), (9), and (10), calculate the total abolition rJJ rate R, calculate the (4) formula f) + I filter effective emissivity ε, and calculate the temperature 110T of the object to be measured 1 from the formula (1). You can ask for it.

As shown in FIG. 3, the radiant energy of the TLI body source 2 is intermittent by a shutter means 5 such as a chopper driven by a motor 1, and the radiant energy transmitted through the object 1 to be measured is converted into one radiant. Outputs El, E, ! detected by the fA thermometer 3 and corresponding to the presence or absence of the radiant energy key of the radiation source 2. The temperature T of the object to be measured 1 can be obtained by performing similar calculations.

``The invention is also effective'' As mentioned above, this invention provides an auxiliary radiation source to determine the transmittance, determine the effective emissivity, and easily determine the true temperature of the object to be measured in a semi-transparent body. , can be measured with high accuracy.

[Brief explanation of the drawing]

FIG. 1, FIG. 2, and FIG. 3 are configuration explanatory diagrams showing one embodiment of the present invention.

Claims (1)

[Claims] 1. A radiation source provided on one side of a measuring object of a semi-transparent body with a known emissivity, and a radiation thermometer provided on the opposite side of the radiation source across the measuring object. , calculate the transmittance of the object to be measured based on the outputs of the radiation thermometer when the radiant energy of the radiation source is incident and when it is not, then calculate the effective emissivity, and calculate the temperature of the object to be measured from this emissivity. A humidity measuring device characterized by comprising a calculation means for calculating. 2. The reflectance of the object to be measured is r, and the effective emissivity ε is expressed as ε=
Claim 1, characterized in that R=r when determined from 1-R-τ (R is total reflectance, τ is transmittance)
Temperature measuring device as described in section. 3. The reflectance of the object to be measured is r, and the effective emissivity ε is expressed as ε=
2. The temperature measuring device according to claim 1, wherein R=r(1+τ) when determined from 1-R-τ (R is total reflectance and τ is transmittance). 4. The reflectance of the object to be measured is r, and the effective emissivity ε is expressed as ε=
2. The temperature measuring device according to claim 1, wherein R=r(1+τ/2) when determined from 1−R−τ (R is total reflectance and τ is transmittance).