JPS6183700A - 気相エピタキシヤル成長方法およびその装置 - Google Patents

気相エピタキシヤル成長方法およびその装置

Info

Publication number
JPS6183700A
JPS6183700A JP59201658A JP20165884A JPS6183700A JP S6183700 A JPS6183700 A JP S6183700A JP 59201658 A JP59201658 A JP 59201658A JP 20165884 A JP20165884 A JP 20165884A JP S6183700 A JPS6183700 A JP S6183700A
Authority
JP
Japan
Prior art keywords
epitaxial growth
gas introduction
vapor phase
impurity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59201658A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566356B2 (enrdf_load_stackoverflow
Inventor
Yuichi Ono
小野　佑一
Shinichi Nakatsuka
慎一 中塚
Takashi Kajimura
梶村　俊
Hiroo Tochikubo
栃久保　浩夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59201658A priority Critical patent/JPS6183700A/ja
Publication of JPS6183700A publication Critical patent/JPS6183700A/ja
Publication of JPH0566356B2 publication Critical patent/JPH0566356B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP59201658A 1984-09-28 1984-09-28 気相エピタキシヤル成長方法およびその装置 Granted JPS6183700A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59201658A JPS6183700A (ja) 1984-09-28 1984-09-28 気相エピタキシヤル成長方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59201658A JPS6183700A (ja) 1984-09-28 1984-09-28 気相エピタキシヤル成長方法およびその装置

Publications (2)

Publication Number Publication Date
JPS6183700A true JPS6183700A (ja) 1986-04-28
JPH0566356B2 JPH0566356B2 (enrdf_load_stackoverflow) 1993-09-21

Family

ID=16444742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59201658A Granted JPS6183700A (ja) 1984-09-28 1984-09-28 気相エピタキシヤル成長方法およびその装置

Country Status (1)

Country Link
JP (1) JPS6183700A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106932A (ja) * 1988-10-17 1990-04-19 Rohm Co Ltd 半導体製造装置
EP0682388A3 (en) * 1994-05-02 1996-02-21 At & T Corp Vertical optical resonator semiconductor device.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825226A (ja) * 1982-07-19 1983-02-15 Shunpei Yamazaki プラズマ気相反応装置
JPS5988395A (ja) * 1982-11-08 1984-05-22 Agency Of Ind Science & Technol 化合物半導体結晶気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825226A (ja) * 1982-07-19 1983-02-15 Shunpei Yamazaki プラズマ気相反応装置
JPS5988395A (ja) * 1982-11-08 1984-05-22 Agency Of Ind Science & Technol 化合物半導体結晶気相成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106932A (ja) * 1988-10-17 1990-04-19 Rohm Co Ltd 半導体製造装置
EP0682388A3 (en) * 1994-05-02 1996-02-21 At & T Corp Vertical optical resonator semiconductor device.

Also Published As

Publication number Publication date
JPH0566356B2 (enrdf_load_stackoverflow) 1993-09-21

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