JPS6183328U - - Google Patents

Info

Publication number
JPS6183328U
JPS6183328U JP1984168432U JP16843284U JPS6183328U JP S6183328 U JPS6183328 U JP S6183328U JP 1984168432 U JP1984168432 U JP 1984168432U JP 16843284 U JP16843284 U JP 16843284U JP S6183328 U JPS6183328 U JP S6183328U
Authority
JP
Japan
Prior art keywords
gallium arsenide
substrate
arsenide layer
resonator
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984168432U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526821Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984168432U priority Critical patent/JPH0526821Y2/ja
Publication of JPS6183328U publication Critical patent/JPS6183328U/ja
Application granted granted Critical
Publication of JPH0526821Y2 publication Critical patent/JPH0526821Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP1984168432U 1984-11-05 1984-11-05 Expired - Lifetime JPH0526821Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984168432U JPH0526821Y2 (enrdf_load_stackoverflow) 1984-11-05 1984-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984168432U JPH0526821Y2 (enrdf_load_stackoverflow) 1984-11-05 1984-11-05

Publications (2)

Publication Number Publication Date
JPS6183328U true JPS6183328U (enrdf_load_stackoverflow) 1986-06-02
JPH0526821Y2 JPH0526821Y2 (enrdf_load_stackoverflow) 1993-07-07

Family

ID=30726201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984168432U Expired - Lifetime JPH0526821Y2 (enrdf_load_stackoverflow) 1984-11-05 1984-11-05

Country Status (1)

Country Link
JP (1) JPH0526821Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537287A (ja) * 1990-01-03 1993-02-12 Motorola Inc 超高周波発振器/共振器
JP2012244349A (ja) * 2011-05-18 2012-12-10 Nippon Telegr & Teleph Corp <Ntt> 微小機械振動子とその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537287A (ja) * 1990-01-03 1993-02-12 Motorola Inc 超高周波発振器/共振器
JP2012244349A (ja) * 2011-05-18 2012-12-10 Nippon Telegr & Teleph Corp <Ntt> 微小機械振動子とその製造方法

Also Published As

Publication number Publication date
JPH0526821Y2 (enrdf_load_stackoverflow) 1993-07-07

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