JPS6182958U - - Google Patents

Info

Publication number
JPS6182958U
JPS6182958U JP16666484U JP16666484U JPS6182958U JP S6182958 U JPS6182958 U JP S6182958U JP 16666484 U JP16666484 U JP 16666484U JP 16666484 U JP16666484 U JP 16666484U JP S6182958 U JPS6182958 U JP S6182958U
Authority
JP
Japan
Prior art keywords
electrodes
pair
space
substrate support
pairs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16666484U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16666484U priority Critical patent/JPS6182958U/ja
Publication of JPS6182958U publication Critical patent/JPS6182958U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示し、ａは断面図
、ｂは高周波電極対列の斜視図、第２図は従来の
装置の断面図、第３図、第４図はそれぞれ本考案
の異なる実施例を示す断面図である。 １：真空室、２：電極、３：基板、５：高周波
電源、６：基板支持体、２０：高周波電極対列。

Claims (1)

    【実用新案登録請求の範囲】
  1. それぞれに電圧が印加される複数の放電電極対
    と、各電極対間の空間の外側にその空間に対向し
    て基板を設置でき、かつ前記各電極対とは異なる
    電位に保持される基板支持体とを備えることを特
    徴とするプラズマＣＶＤ装置。
JP16666484U 1984-11-02 1984-11-02 Pending JPS6182958U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16666484U JPS6182958U (ja) 1984-11-02 1984-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16666484U JPS6182958U (ja) 1984-11-02 1984-11-02

Publications (1)

Publication Number Publication Date
JPS6182958U true JPS6182958U (ja) 1986-06-02

Family

ID=30724474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16666484U Pending JPS6182958U (ja) 1984-11-02 1984-11-02

Country Status (1)

Country Link
JP (1) JPS6182958U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04314863A (ja) * 1991-04-11 1992-11-06 Mitsutoyo Corp プラズマ反応装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04314863A (ja) * 1991-04-11 1992-11-06 Mitsutoyo Corp プラズマ反応装置

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