JPS617640A - Method and apparatus for testing characteristic of integrated circuit device - Google Patents
Method and apparatus for testing characteristic of integrated circuit deviceInfo
- Publication number
- JPS617640A JPS617640A JP59128920A JP12892084A JPS617640A JP S617640 A JPS617640 A JP S617640A JP 59128920 A JP59128920 A JP 59128920A JP 12892084 A JP12892084 A JP 12892084A JP S617640 A JPS617640 A JP S617640A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit device
- pads
- substrate
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の技術分野]
本発明は、特にマルチチップパッケージ型の集積回路装
置の特性試験方法および特性試験装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention particularly relates to a method and apparatus for testing the characteristics of a multi-chip package type integrated circuit device.
[発明の技術的背景コ
近年、電子機器桐成部品の高密度化に対応して1つのパ
ッケージ内に複数のICチップを搭載してなるマルチチ
ップパッケージ型の集積回路装置が各種開発されている
。[Technical Background of the Invention] In recent years, various types of multi-chip package integrated circuit devices in which multiple IC chips are mounted in one package have been developed in response to the increasing density of electronic equipment parts. .
このようなマルチチップパッケージ型の集積回路装置と
しては、例えば第3図に示すように、表層部1aF3よ
び内層部1bに導体パターン2を形成し、かつ端子ピン
3.3、・・・を延出させたセラミック多層基板1上に
複数のICチップ4.4、・・・およびコンデンサ等の
受動部品5.5、・・・を搭載し、これらと導体パター
ン2とを電気的に接続し、ざらに封止蓋体6を固着させ
た構造のものが知られている。For example, as shown in FIG. 3, such a multi-chip package type integrated circuit device has a conductor pattern 2 formed on the surface layer portion 1aF3 and the inner layer portion 1b, and terminal pins 3, 3, . A plurality of IC chips 4.4, ... and passive components 5.5, ... such as capacitors are mounted on the exposed ceramic multilayer substrate 1, and these are electrically connected to the conductor pattern 2. A structure in which the sealing lid 6 is roughly fixed is known.
ところで、このようなマルチチップパッケージ型の集積
回路装置を製造する場合、各部品の加工、組付は終了後
に電気的特性試験が行なわれている。By the way, when manufacturing such a multi-chip package type integrated circuit device, an electrical characteristic test is performed after each component is processed and assembled.
一般に、この電気的特性試験は、封止蓋体6を固着する
前に特性試験装置のプローブを導体パターン2の各部分
に接触させ、電圧値や抵抗値等を測定することにより行
われているが、外部光によるICチップ4.4、・・・
の特性変化を考慮して、特性試験は封止蓋体6の固着後
にも行なわれている。Generally, this electrical characteristic test is performed by bringing a probe of a characteristic testing device into contact with each part of the conductor pattern 2 and measuring the voltage value, resistance value, etc. before fixing the sealing lid 6. However, IC chip 4.4 due to external light...
In consideration of the change in the characteristics, the characteristic test is also conducted after the sealing lid 6 is fixed.
この場合には、セラミック多層基板1から延出している
端子ピン3.3、・・・に特性試験装置の測定端子を接
触させて各測定を行なっている。In this case, each measurement is performed by bringing the measurement terminals of the characteristic testing device into contact with the terminal pins 3, 3, . . . extending from the ceramic multilayer substrate 1.
[背景技術の問題点]
しかしながら、集積回路装置の特性はパラメータが多い
ため、このように端子ピン3.3、・・・のみからの測
定では、完全な特性検査を行なうことはできず、異常が
認められた場合でも、その発生位置を正確に把握するこ
とは困難である。このため異常発生位置を正確に把握す
るためには、封止蓋体6を取り外して内部接続部分の測
定を行なわなければらないが、ICチップの封止状態で
の特性と露出状態での特性とが異なる場合には、封止蓋
体を取り外してしまうと異常そのものが検出されないお
それがある。[Problems with the background art] However, since the characteristics of integrated circuit devices have many parameters, it is not possible to perform a complete characteristic test by measuring only from the terminal pins 3, 3, etc., and abnormalities may occur. Even if it is recognized, it is difficult to accurately determine the location where it occurs. Therefore, in order to accurately determine the location of the abnormality, it is necessary to remove the sealing lid 6 and measure the internal connections, but it is necessary to measure the characteristics of the IC chip in its sealed state and in its exposed state. If the values are different, there is a possibility that the abnormality itself will not be detected if the sealing lid is removed.
また、超LSIのICチップを用いて集積回路装置が構
成されている場合には、導体パターン2が緻密に形成さ
れ、内部接続も複雑にされているので測定が非常に困難
であるという問題があった。Furthermore, when an integrated circuit device is constructed using a VLSI IC chip, the conductor pattern 2 is densely formed and the internal connections are complicated, making measurement extremely difficult. there were.
[発明の目的コ
本発明はこのような従来の事情によりなされたもので、
封止蓋体を被着させた状態でも、内部の異常発生位置を
正確に検出することができる集積回路装置の特性試験方
法と、その特性試験をきわめて容易に行なうことができ
る特性試験装置とを提供しようとするものである。[Object of the Invention] The present invention has been made in view of the above-mentioned conventional circumstances.
A method for testing the characteristics of an integrated circuit device that can accurately detect the location of an internal abnormality even when a sealing lid is attached, and a characteristics testing device that can perform the characteristics test extremely easily. This is what we are trying to provide.
[発明の概要コ
すなわち本発明は、集積回路装置の基板のICチップを
搭載しない面側に、端子ピンと直接電気的に接続されて
いない導体パターンと電気的に接続された露出導体パッ
ドを形成し、この露出導体パッドを介して特性試験を行
なうことを特徴とする集積回路装置の特性試験方法と、
被試験体装着部に集積回路装置を装着して特性試験を行
なうよ ′うに構成された特性試験装置において、前記
被試、験体装着部の前記集積回路装置の端子ピンと対応
する位置にソケットを配設し、前記ソケット間の所定位
置に複数の弾性接触端子を突設したことを特徴とする特
性試験装置である。[Summary of the Invention] That is, the present invention forms exposed conductor pads electrically connected to conductor patterns that are not directly electrically connected to terminal pins on the side of the substrate of an integrated circuit device on which no IC chip is mounted. , a method for testing the characteristics of an integrated circuit device, characterized in that the characteristics are tested through the exposed conductor pad;
In a characteristic testing apparatus configured to perform a characteristic test by mounting an integrated circuit device on a test object mounting section, a socket is provided at a position corresponding to a terminal pin of the integrated circuit device on the test object mounting section. The characteristics testing device is characterized in that a plurality of elastic contact terminals are provided at predetermined positions between the sockets.
[発明の実施例]
以下本発明の詳細を図面に示す一実施例について説明す
る。[Embodiment of the Invention] The details of the present invention will be described below with reference to an embodiment shown in the drawings.
第1図は本発明方法の適用される集積回路装置を示す横
断面図であり、先に述べた第3図と共通する部分には共
通の符号が付されている。FIG. 1 is a cross-sectional view showing an integrated circuit device to which the method of the present invention is applied, and parts common to those in FIG. 3 described above are given the same reference numerals.
同図において1はセラミック多層基板を示しており、表
層部1aおよび内層部1bには導体パターン2が形成さ
れている。また、セラミック多層基板1の縁部からは実
装用の端子ピン3.3、・・・が延出している。なお、
これら端子ピン3.3、・・・は導体パターン2の一部
分と直接電気的に接続されている。そして、セラミック
多層基板1上には比較的多数のICチップ4.4、・・
・およびデカップリングコンデンサ等の受動部品5.5
、・・・が搭載され、これらが導体パターン2の所定部
分と電気的に接続されている。さらにこれらを覆ってコ
バール等からなる封止蓋体6が、例えば半田付けやろう
付けにより固着されている。In the figure, reference numeral 1 indicates a ceramic multilayer substrate, and a conductor pattern 2 is formed on a surface layer portion 1a and an inner layer portion 1b. Furthermore, terminal pins 3, 3, . . . for mounting extend from the edge of the ceramic multilayer substrate 1. In addition,
These terminal pins 3.3, . . . are directly electrically connected to a portion of the conductor pattern 2. A relatively large number of IC chips 4.4 are mounted on the ceramic multilayer substrate 1.
・Passive components such as decoupling capacitors 5.5
, . . . are mounted, and these are electrically connected to predetermined portions of the conductive pattern 2. Furthermore, a sealing lid body 6 made of Kovar or the like is fixed to cover these by, for example, soldering or brazing.
以上の部分は従来から用いられているマルチチップ型の
集積回路装置と同様の構成であるが、本発明方法を適用
した集積回路装置においては、セラミック多層基板1の
表層部1c、すなわちICチップ4.4、・・・が搭載
されていない面側に、露出導体パッド7.7、・・・が
格子状に配列するよう形成されている。The above parts have the same structure as a conventionally used multi-chip integrated circuit device, but in the integrated circuit device to which the method of the present invention is applied, the surface layer 1c of the ceramic multilayer substrate 1, that is, the IC chip 4 .4, . . are not mounted, exposed conductor pads 7, 7, . . . are formed so as to be arranged in a grid pattern.
これら露出導体パッド7.7、・・・は、導体パターン
2の、端子ピン3.3、・・・と直接電気的に接続され
ていない部分、例えばICチップ間の相互接続部分、I
Cチップと受動部品間の接続部分等と電気的に接続され
ている。These exposed conductor pads 7.7, . . . are portions of the conductor pattern 2 that are not directly electrically connected to the terminal pins 3.3, .
It is electrically connected to the connection portion between the C chip and passive components.
本発明方法はこのように構成された集積回路装置の露出
導体パッド7.7、・・・を通じて内部の導体パターン
2の各位置における電圧値、および抵抗値等の測定を行
なうものである。The method of the present invention measures the voltage value, resistance value, etc. at each position of the internal conductor pattern 2 through the exposed conductor pads 7, 7, . . . of the integrated circuit device constructed as described above.
従って本発明方法によれば、集積回路装置の内部に異常
が認められ、封止蓋体6を取り外してICチップ4や受
動部2品5の交換、あるいはボンディングの変更等を行
なう必要がある場合でも、封止蓋体6の取り外し前の測
定で異常発生位置を正確に把握することができるので、
交換、変更作業の段取りを直ちに決定することができる
。Therefore, according to the method of the present invention, if an abnormality is found inside the integrated circuit device and it is necessary to remove the sealing lid 6 and replace the IC chip 4 or the passive components 5, or change the bonding, etc. However, since the location of the abnormality can be accurately determined by measuring before removing the sealing lid 6,
Plans for replacement or change work can be immediately determined.
また、封止蓋体6の固着前あるいは取り外し後に特性試
験を行なう場合でも、この露出導体パッド7.7、・・
・を通じて特性試験装置と接続することによりプローブ
接触位置の位置決め等が容易になって、測定に伴う手数
が大巾に減少する。Furthermore, even when performing a characteristic test before fixing or removing the sealing lid 6, the exposed conductor pads 7, 7, . . .
・By connecting to the characteristic test equipment through the probe, positioning of the probe contact position, etc. becomes easy, and the number of steps involved in measurement is greatly reduced.
第2図は本発明の特性試験装置の構成を説明する図であ
る。FIG. 2 is a diagram illustrating the configuration of the characteristic testing apparatus of the present invention.
同図に示したのは、第1図に示した集積回路装置Aを、
本発明の特性試験装置Bめ被試験体装着部に装着した状
態を示す横断面図である。The figure shows the integrated circuit device A shown in FIG.
FIG. 2 is a cross-sectional view showing a state in which the characteristic testing apparatus B of the present invention is mounted on a test object mounting section.
この特性試験装置Bの被試験体装着部には、基板8上の
、集積回路装置への端子ピン3.3、・・・と対応する
位置にソケット9.9が配設され、このソケット9.9
間の露出導体パッド7.7、・・・と対応する位置に、
後述する弾性接触端子10.10、・・・が突設されて
いる。A socket 9.9 is provided in the test object mounting portion of this characteristic testing apparatus B at a position corresponding to the terminal pins 3.3, . . . to the integrated circuit device on the board 8. .9
At the position corresponding to the exposed conductor pads 7.7, . . .
Elastic contact terminals 10, 10, . . . , which will be described later, are provided in a protruding manner.
そして、ソケット9.9および弾性接触端子10.10
1・・・は基板8上の導体パターン(図示せず)あるい
はワイヤラッピング等により測定を行なう機器の入出力
部と電気的に接続されている。and a socket 9.9 and an elastic contact terminal 10.10
1 . . . are electrically connected to the input/output section of the equipment to be measured by a conductor pattern (not shown) on the substrate 8 or wire wrapping.
弾性接触端子10.10、・・・は一般にスプリング・
コンタクト・プローブあるいはポゴピンと呼ばれている
端子部品であり、導体製の筒体10aと、この筒体10
a内に収納され、コイルスプリング(図示せず)により
外方に向けて付勢された導体棒10bとからなっている
。The elastic contact terminals 10.10, . . . are generally spring-loaded.
This is a terminal component called a contact probe or pogo pin, and includes a cylindrical body 10a made of a conductor and a cylindrical body 10a made of a conductor.
The conductor rod 10b is housed in a conductor rod 10a and is urged outward by a coil spring (not shown).
導体棒10bは、集積回路装置Aの端子ピン3.3、・
・・がソケット9.9に挿入されると頂部10Cが露出
導体パッド7.7、・・・にある程度の押圧力をもって
接触する。その結果、集積回路装置Aの導体パターン2
の各部分が先に述べた端子ピン3.3、・・・と直接接
続されていない部分も含めて確実に測定機器に接続され
る。The conductor rod 10b connects the terminal pins 3.3, .
. . is inserted into the socket 9.9, the top portion 10C contacts the exposed conductor pads 7.7, . . . with a certain degree of pressing force. As a result, conductor pattern 2 of integrated circuit device A
, including the portions not directly connected to the terminal pins 3.3, . . . , are reliably connected to the measuring equipment.
そして、例えば集積回路装置への端子ピン3.3、・・
・からの標準的な入出力特性および露出導体パッド7.
7、・・・間の標準的な電圧値、抵抗値等を予め測定機
器にインプットしておき、測定値と比較することにより
異常を検出するようにしておけば、集積回路装置Aを被
試験体装着部に装着するだけで特性試験を行うことがで
きる。and terminal pins 3.3, for example to the integrated circuit device.
- Standard input/output characteristics and exposed conductor pads from 7.
7. By inputting standard voltage values, resistance values, etc. between Characteristic tests can be performed simply by attaching it to the body attachment part.
なお、以上の実施例ではDIP型の集積回路装置に本発
明を適用した場合について説明したが、本発明はこのよ
うな一実施例に限定されるべきものではな(、SIP型
、フラットパッケージ型等の各種パッケージの集積回路
装置にも同様の構成で適用することができる。Although the above embodiment describes the case where the present invention is applied to a DIP type integrated circuit device, the present invention should not be limited to such a single embodiment (such as a DIP type, flat package type, etc.). The same configuration can be applied to integrated circuit devices in various packages such as the above.
[発明の効果]
以上説明したように本発明の集積回路装置の特性試験方
法によれば、特にマルチチップ型集積回路装置の基板の
表層部に、内部の導体パターンの、端子ピンと直接接続
されていない部分と接続された露出導体パッドを設け、
この露出導体パッドを介して特性試験を行なうので、封
止蓋体を被着したままでも内部の異常発生位置を正確に
把握することができる。[Effects of the Invention] As explained above, according to the method for testing the characteristics of an integrated circuit device of the present invention, in particular, the surface layer of the substrate of a multi-chip integrated circuit device has a conductive pattern directly connected to a terminal pin. Provide an exposed conductor pad connected to the non-conducting part,
Since the characteristic test is conducted through the exposed conductor pads, it is possible to accurately determine the location of internal abnormality even with the sealing lid still attached.
また、本発明の特性試験装置は、集積回路装置の端子ピ
ンと対応する位置にソケットを配設するとともにこのソ
ケット間の所定位置に弾性接触端子を突設したので、特
性試験を極めて容易に行なうことができる。Furthermore, the characteristic testing device of the present invention has sockets arranged at positions corresponding to the terminal pins of the integrated circuit device, and elastic contact terminals protruding from predetermined positions between the sockets, so that characteristic tests can be carried out extremely easily. Can be done.
第1図は本発明を適用した集積回路装置の構造を示す横
断面図、第2図は本発明の特性試験装置の要部の構造を
示す横断面図、第3図は従来のマルチチップ型パッケー
ジの集積回路装置の構造を示す横断面図である。
1・・・・・・・・・・・・セラミック多層基板2・・
・・・・・・・・・・導体パターン3・・・・・・・・
・・・・端子ピン
4・・・・・・・・・・・・ICチップ5・・・・・・
・・・・・・受動部品
6・・・・・・・・・・・・封止蓋体
7・・・・・・・・・・・・露出導体パッド8・・・・
・−・・・・・・基 板
9・・・・・・・・・・・・ソケット
10・・・・・・・・・・・・弾性接触端子代理人弁理
士 須 山 佐 −
第1図
第3図FIG. 1 is a cross-sectional view showing the structure of an integrated circuit device to which the present invention is applied, FIG. 2 is a cross-sectional view showing the structure of the main part of the characteristic testing device of the present invention, and FIG. FIG. 2 is a cross-sectional view showing the structure of the integrated circuit device in the package. 1... Ceramic multilayer substrate 2...
・・・・・・・・・Conductor pattern 3・・・・・・・・・
・・・Terminal pin 4・・・・・・・・・IC chip 5・・・・・・
...Passive component 6 ... Sealing lid 7 ...... Exposed conductor pad 8 ...
・・・・・・・・・Plate 9・・・・・・・・・・・・Socket 10・・・・・・・・・・Elastic contact terminal Patent attorney Satoshi Suyama - 1st Figure 3
Claims (2)
側に、端子ピンと直接電気的に接続されていない導体パ
ターンと電気的に接続された露出導体パッドを形成し、
この露出導体パッドを介して特性試験を行なうことを特
徴とする集積回路装置の特性試験方法。(1) Forming exposed conductor pads electrically connected to conductor patterns that are not directly electrically connected to terminal pins on the side of the substrate of the integrated circuit device on which the IC chip is not mounted,
A method for testing the characteristics of an integrated circuit device, characterized in that the characteristics are tested through the exposed conductor pads.
験を行なうように構成された特性試験装置において、前
記被試験体装着部の前記集積回路装置の端子ピンと対応
する位置にソケットを配設し、前記ソケット間の所定位
置に複数の弾性接触端子を突設したことを特徴とする特
性試験装置。(2) In a characteristic testing apparatus configured to perform a characteristic test by mounting an integrated circuit device on a test object mounting section, a socket is installed at a position corresponding to a terminal pin of the integrated circuit device on the test object mounting section. A characteristic testing device characterized in that a plurality of elastic contact terminals are provided at predetermined positions between the sockets.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59128920A JPS617640A (en) | 1984-06-22 | 1984-06-22 | Method and apparatus for testing characteristic of integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59128920A JPS617640A (en) | 1984-06-22 | 1984-06-22 | Method and apparatus for testing characteristic of integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS617640A true JPS617640A (en) | 1986-01-14 |
JPH0347581B2 JPH0347581B2 (en) | 1991-07-19 |
Family
ID=14996641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59128920A Granted JPS617640A (en) | 1984-06-22 | 1984-06-22 | Method and apparatus for testing characteristic of integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS617640A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8757336B2 (en) | 2008-12-24 | 2014-06-24 | Kayaba Industry Co., Ltd. | Damping mechanism |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366074U (en) * | 1976-10-29 | 1978-06-03 | ||
JPS562418A (en) * | 1979-06-19 | 1981-01-12 | Mazda Motor Corp | Lubrication regulator for engine |
JPS5671948A (en) * | 1979-11-19 | 1981-06-15 | Hitachi Ltd | Ic chip |
JPS58192333A (en) * | 1982-05-07 | 1983-11-09 | Hitachi Ltd | Semiconductor device |
-
1984
- 1984-06-22 JP JP59128920A patent/JPS617640A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366074U (en) * | 1976-10-29 | 1978-06-03 | ||
JPS562418A (en) * | 1979-06-19 | 1981-01-12 | Mazda Motor Corp | Lubrication regulator for engine |
JPS5671948A (en) * | 1979-11-19 | 1981-06-15 | Hitachi Ltd | Ic chip |
JPS58192333A (en) * | 1982-05-07 | 1983-11-09 | Hitachi Ltd | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8757336B2 (en) | 2008-12-24 | 2014-06-24 | Kayaba Industry Co., Ltd. | Damping mechanism |
Also Published As
Publication number | Publication date |
---|---|
JPH0347581B2 (en) | 1991-07-19 |
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