JPS6167821A - 反射光学装置 - Google Patents

反射光学装置

Info

Publication number
JPS6167821A
JPS6167821A JP59189759A JP18975984A JPS6167821A JP S6167821 A JPS6167821 A JP S6167821A JP 59189759 A JP59189759 A JP 59189759A JP 18975984 A JP18975984 A JP 18975984A JP S6167821 A JPS6167821 A JP S6167821A
Authority
JP
Japan
Prior art keywords
optical device
segment
mirror
laser beam
reflective optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59189759A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123764B2 (OSRAM
Inventor
Seiichiro Kimura
盛一郎 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59189759A priority Critical patent/JPS6167821A/ja
Priority to EP86103270A priority patent/EP0236521B1/en
Priority to US06/838,620 priority patent/US4685780A/en
Publication of JPS6167821A publication Critical patent/JPS6167821A/ja
Publication of JPH0123764B2 publication Critical patent/JPH0123764B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0732—Shaping the laser spot into a rectangular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)
JP59189759A 1984-09-12 1984-09-12 反射光学装置 Granted JPS6167821A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59189759A JPS6167821A (ja) 1984-09-12 1984-09-12 反射光学装置
EP86103270A EP0236521B1 (en) 1984-09-12 1986-03-11 Reflection type optical device
US06/838,620 US4685780A (en) 1984-09-12 1986-03-11 Reflection type optical device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59189759A JPS6167821A (ja) 1984-09-12 1984-09-12 反射光学装置
EP86103270A EP0236521B1 (en) 1984-09-12 1986-03-11 Reflection type optical device

Publications (2)

Publication Number Publication Date
JPS6167821A true JPS6167821A (ja) 1986-04-08
JPH0123764B2 JPH0123764B2 (OSRAM) 1989-05-08

Family

ID=26101777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59189759A Granted JPS6167821A (ja) 1984-09-12 1984-09-12 反射光学装置

Country Status (2)

Country Link
EP (1) EP0236521B1 (OSRAM)
JP (1) JPS6167821A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136018A (ja) * 1986-11-28 1988-06-08 Fuji Photo Film Co Ltd レ−ザ光学系
JPS63252689A (ja) * 1987-04-06 1988-10-19 Fujikura Ltd レ−ザ加熱装置
JPH01274110A (ja) * 1988-04-27 1989-11-01 Orc Mfg Co Ltd ビーム断面の照度均一化方法及びその装置
JPH0554226U (ja) * 1991-12-30 1993-07-20 アイ・シー電子工業株式会社 液体収容用容器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09508306A (ja) * 1994-11-22 1997-08-26 ゲー．ローデンストック．インストルメンテ．ゲゼルシャフト．ミット．ベシュレンクテル．ハフツング 角膜成形の装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2683394A (en) * 1951-09-08 1954-07-13 American Optical Corp Wide aperture optical projection lens system
GB1581455A (en) * 1977-06-28 1980-12-17 Bfg Glassgroup Mirrors
US4327972A (en) * 1979-10-22 1982-05-04 Coulter Electronics, Inc. Redirecting surface for desired intensity profile
US4475027A (en) * 1981-11-17 1984-10-02 Allied Corporation Optical beam homogenizer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136018A (ja) * 1986-11-28 1988-06-08 Fuji Photo Film Co Ltd レ−ザ光学系
JPS63252689A (ja) * 1987-04-06 1988-10-19 Fujikura Ltd レ−ザ加熱装置
JPH01274110A (ja) * 1988-04-27 1989-11-01 Orc Mfg Co Ltd ビーム断面の照度均一化方法及びその装置
JPH0554226U (ja) * 1991-12-30 1993-07-20 アイ・シー電子工業株式会社 液体収容用容器

Also Published As

Publication number Publication date
EP0236521A1 (en) 1987-09-16
JPH0123764B2 (OSRAM) 1989-05-08
EP0236521B1 (en) 1990-12-05

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