JPH0317282Y2 - - Google Patents

Info

Publication number
JPH0317282Y2
JPH0317282Y2 JP20226383U JP20226383U JPH0317282Y2 JP H0317282 Y2 JPH0317282 Y2 JP H0317282Y2 JP 20226383 U JP20226383 U JP 20226383U JP 20226383 U JP20226383 U JP 20226383U JP H0317282 Y2 JPH0317282 Y2 JP H0317282Y2
Authority
JP
Japan
Prior art keywords
point light
light source
diffraction grating
light sources
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20226383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60112266U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20226383U priority Critical patent/JPS60112266U/ja
Publication of JPS60112266U publication Critical patent/JPS60112266U/ja
Application granted granted Critical
Publication of JPH0317282Y2 publication Critical patent/JPH0317282Y2/ja
Granted legal-status Critical Current

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  • Holo Graphy (AREA)
JP20226383U 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置 Granted JPS60112266U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20226383U JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20226383U JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Publications (2)

Publication Number Publication Date
JPS60112266U JPS60112266U (ja) 1985-07-30
JPH0317282Y2 true JPH0317282Y2 (OSRAM) 1991-04-12

Family

ID=30764711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20226383U Granted JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Country Status (1)

Country Link
JP (1) JPS60112266U (OSRAM)

Also Published As

Publication number Publication date
JPS60112266U (ja) 1985-07-30

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