JPS6166938U - - Google Patents
Info
- Publication number
- JPS6166938U JPS6166938U JP15256184U JP15256184U JPS6166938U JP S6166938 U JPS6166938 U JP S6166938U JP 15256184 U JP15256184 U JP 15256184U JP 15256184 U JP15256184 U JP 15256184U JP S6166938 U JPS6166938 U JP S6166938U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- chemicals
- semiconductor manufacturing
- dropping
- liquid receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15256184U JPS6166938U (env) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15256184U JPS6166938U (env) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166938U true JPS6166938U (env) | 1986-05-08 |
Family
ID=30710622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15256184U Pending JPS6166938U (env) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166938U (env) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8206549B2 (en) | 2007-07-19 | 2012-06-26 | Samsung Mobile Display Co., Ltd. | Etching apparatus |
-
1984
- 1984-10-09 JP JP15256184U patent/JPS6166938U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8206549B2 (en) | 2007-07-19 | 2012-06-26 | Samsung Mobile Display Co., Ltd. | Etching apparatus |
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