JPS6166354U - - Google Patents
Info
- Publication number
- JPS6166354U JPS6166354U JP1984149959U JP14995984U JPS6166354U JP S6166354 U JPS6166354 U JP S6166354U JP 1984149959 U JP1984149959 U JP 1984149959U JP 14995984 U JP14995984 U JP 14995984U JP S6166354 U JPS6166354 U JP S6166354U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- mask
- shape
- vram
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149959U JPS6312347Y2 (enExample) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149959U JPS6312347Y2 (enExample) | 1984-10-03 | 1984-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166354U true JPS6166354U (enExample) | 1986-05-07 |
| JPS6312347Y2 JPS6312347Y2 (enExample) | 1988-04-08 |
Family
ID=30708123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149959U Expired JPS6312347Y2 (enExample) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312347Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856332A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | マスクの欠陥修正方法 |
| JPS58196020A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | マスクの欠陥検査・修正方法およびその装置 |
-
1984
- 1984-10-03 JP JP1984149959U patent/JPS6312347Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856332A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | マスクの欠陥修正方法 |
| JPS58196020A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | マスクの欠陥検査・修正方法およびその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6312347Y2 (enExample) | 1988-04-08 |
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