JPS6166348U - - Google Patents
Info
- Publication number
- JPS6166348U JPS6166348U JP1984149953U JP14995384U JPS6166348U JP S6166348 U JPS6166348 U JP S6166348U JP 1984149953 U JP1984149953 U JP 1984149953U JP 14995384 U JP14995384 U JP 14995384U JP S6166348 U JPS6166348 U JP S6166348U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- vacuum
- base plate
- driven
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000003566 sealing material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149953U JPS6166348U (enExample) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149953U JPS6166348U (enExample) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166348U true JPS6166348U (enExample) | 1986-05-07 |
Family
ID=30708117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149953U Pending JPS6166348U (enExample) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166348U (enExample) |
-
1984
- 1984-10-03 JP JP1984149953U patent/JPS6166348U/ja active Pending
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