ATE163073T1 - Verfahren und vorrichtung zur kühlung einer vakuumvorrichtung - Google Patents

Verfahren und vorrichtung zur kühlung einer vakuumvorrichtung

Info

Publication number
ATE163073T1
ATE163073T1 AT94111890T AT94111890T ATE163073T1 AT E163073 T1 ATE163073 T1 AT E163073T1 AT 94111890 T AT94111890 T AT 94111890T AT 94111890 T AT94111890 T AT 94111890T AT E163073 T1 ATE163073 T1 AT E163073T1
Authority
AT
Austria
Prior art keywords
cooling
vacuum
cooling panel
cryopump
panel
Prior art date
Application number
AT94111890T
Other languages
English (en)
Inventor
Takeshi Shinbo
Kogyodanchi
Hirozuki Takahama
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE163073T1 publication Critical patent/ATE163073T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
AT94111890T 1993-07-29 1994-07-29 Verfahren und vorrichtung zur kühlung einer vakuumvorrichtung ATE163073T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5188363A JP2719298B2 (ja) 1993-07-29 1993-07-29 真空装置の冷却構造

Publications (1)

Publication Number Publication Date
ATE163073T1 true ATE163073T1 (de) 1998-02-15

Family

ID=16222318

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94111890T ATE163073T1 (de) 1993-07-29 1994-07-29 Verfahren und vorrichtung zur kühlung einer vakuumvorrichtung

Country Status (6)

Country Link
US (1) US5548964A (de)
EP (1) EP0636789B1 (de)
JP (1) JP2719298B2 (de)
AT (1) ATE163073T1 (de)
DE (1) DE69408379T2 (de)
ES (1) ES2115113T3 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9417523D0 (en) * 1994-08-31 1994-10-19 Switched Reluctance Drives Ltd Switched reluctance generators
FR2739574B1 (fr) * 1995-10-04 1997-11-14 Cit Alcatel Groupe de pompage secondaire
JPH10184541A (ja) * 1996-12-27 1998-07-14 Anelva Corp 真空排気装置
US5887438A (en) * 1997-08-20 1999-03-30 Helix Technology Corporation Low profile in line cryogenic water pump
US5901558A (en) * 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
EP1127954A1 (de) * 2000-02-24 2001-08-29 Applied Materials, Inc. Verfahren und Vorrichtung zum Abschirmen einer Einrichtung von einer Prozesskammer für Halbleiterscheiben
US6263679B1 (en) * 2000-04-05 2001-07-24 Helix Technology Corporation Particulate dam for cryopump flange
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
US7037083B2 (en) * 2003-01-08 2006-05-02 Brooks Automation, Inc. Radiation shielding coating
JP5028142B2 (ja) * 2007-05-17 2012-09-19 キヤノンアネルバ株式会社 クライオトラップ
CN101336067B (zh) * 2007-06-29 2010-06-02 奇鋐科技股份有限公司 真空密封散热用媒介的机构及其方法
JP5379101B2 (ja) * 2010-09-13 2013-12-25 住友重機械工業株式会社 クライオポンプ及びフィルタ装置
US8840380B2 (en) * 2011-01-21 2014-09-23 Toyota Motor Engineering & Manufacturing North America, Inc. Temperature control ring for vehicle air pump
CN103835954B (zh) * 2014-03-09 2017-02-01 西安志高罗茨风机技术有限责任公司 Mvr压缩机入口补液环状喷雾装置
GB201711630D0 (en) 2017-07-19 2017-08-30 Edwards Ltd Temperature control of a pumped gas flow
WO2020049917A1 (ja) * 2018-09-06 2020-03-12 住友重機械工業株式会社 クライオポンプ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
US3188785A (en) * 1960-04-29 1965-06-15 James W Butler Vacuum cold trap
US3423947A (en) * 1967-07-17 1969-01-28 Yosimaro Moriya Vacuum traps utilizing electronic refrigerating elements
US3464223A (en) * 1967-12-28 1969-09-02 Us Army Trap pump for vacuum system
FR1587077A (de) * 1968-08-01 1970-03-13
US3557536A (en) * 1968-12-30 1971-01-26 Phillips Petroleum Co Filter assembly
US3719052A (en) * 1971-05-04 1973-03-06 G White Vacuum system cold trap
FR2163945A5 (de) * 1971-12-07 1973-07-27 Cit Alcatel
GB1448752A (en) * 1973-03-08 1976-09-08 Boc International Ltd Vacuum pumping assembly
US4679402A (en) * 1986-08-11 1987-07-14 Helix Technology Corporation Cooling heat exchanger
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JP3062706B2 (ja) * 1991-08-13 2000-07-12 アルバック・クライオ株式会社 低温トラップ付クライオポンプ
US5357760A (en) * 1993-07-22 1994-10-25 Ebara Technologies Inc. Hybrid cryogenic vacuum pump apparatus and method of operation

Also Published As

Publication number Publication date
DE69408379D1 (de) 1998-03-12
DE69408379T2 (de) 1998-08-27
EP0636789A1 (de) 1995-02-01
US5548964A (en) 1996-08-27
ES2115113T3 (es) 1998-06-16
JP2719298B2 (ja) 1998-02-25
EP0636789B1 (de) 1998-02-04
JPH0742673A (ja) 1995-02-10

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