JPS6185853U - - Google Patents
Info
- Publication number
- JPS6185853U JPS6185853U JP1984171792U JP17179284U JPS6185853U JP S6185853 U JPS6185853 U JP S6185853U JP 1984171792 U JP1984171792 U JP 1984171792U JP 17179284 U JP17179284 U JP 17179284U JP S6185853 U JPS6185853 U JP S6185853U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- transmission device
- motion transmission
- vacuum flange
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 6
- 210000002445 nipple Anatomy 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171792U JPS6185853U (enExample) | 1984-11-13 | 1984-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171792U JPS6185853U (enExample) | 1984-11-13 | 1984-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185853U true JPS6185853U (enExample) | 1986-06-05 |
Family
ID=30729472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984171792U Pending JPS6185853U (enExample) | 1984-11-13 | 1984-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185853U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680054B1 (ko) * | 2000-02-24 | 2007-02-07 | 엘지.필립스 엘시디 주식회사 | 마스크 운반 장치 및 방법 |
-
1984
- 1984-11-13 JP JP1984171792U patent/JPS6185853U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680054B1 (ko) * | 2000-02-24 | 2007-02-07 | 엘지.필립스 엘시디 주식회사 | 마스크 운반 장치 및 방법 |