JPS6163832U - - Google Patents

Info

Publication number
JPS6163832U
JPS6163832U JP14834884U JP14834884U JPS6163832U JP S6163832 U JPS6163832 U JP S6163832U JP 14834884 U JP14834884 U JP 14834884U JP 14834884 U JP14834884 U JP 14834884U JP S6163832 U JPS6163832 U JP S6163832U
Authority
JP
Japan
Prior art keywords
plasma cvd
cvd apparatus
reaction gas
frequency
ground electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14834884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14834884U priority Critical patent/JPS6163832U/ja
Publication of JPS6163832U publication Critical patent/JPS6163832U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP14834884U 1984-09-28 1984-09-28 Pending JPS6163832U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14834884U JPS6163832U (enrdf_load_stackoverflow) 1984-09-28 1984-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14834884U JPS6163832U (enrdf_load_stackoverflow) 1984-09-28 1984-09-28

Publications (1)

Publication Number Publication Date
JPS6163832U true JPS6163832U (enrdf_load_stackoverflow) 1986-04-30

Family

ID=30706563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14834884U Pending JPS6163832U (enrdf_load_stackoverflow) 1984-09-28 1984-09-28

Country Status (1)

Country Link
JP (1) JPS6163832U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01227428A (ja) * 1988-03-08 1989-09-11 Mitsui Toatsu Chem Inc 成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01227428A (ja) * 1988-03-08 1989-09-11 Mitsui Toatsu Chem Inc 成膜装置

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