JPS55157276A - Amorphous thin film solar battery - Google Patents
Amorphous thin film solar batteryInfo
- Publication number
- JPS55157276A JPS55157276A JP6634779A JP6634779A JPS55157276A JP S55157276 A JPS55157276 A JP S55157276A JP 6634779 A JP6634779 A JP 6634779A JP 6634779 A JP6634779 A JP 6634779A JP S55157276 A JPS55157276 A JP S55157276A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous semiconductor
- thin film
- solar battery
- silicon
- film solar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000005566 electron beam evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To improve photoelectric convertion efficiency of a solar battery excessively by fabricating an amorphous thin film solar battery of an amorphous semiconductor thin film which is made from monosilane and an amorphous semiconductor thin film which is made from silicon tetrafluoride. CONSTITUTION:A transparent conductive film 2 is formed on a glass substrate 1, and next thereto n-type and intrinsic amorphous semiconductor layers 3 and 4 which are made from an amorphous semiconductor materials of which main components are silicon and fluorine which are produced by glow discharge in silicon tetrafluoride are formed, and next thereto a p-type amorphous semiconductor layer 5 which is made from an amorphous semiconductor materials of which main components are silicon and hydrogen which are produced by glow discharge in monosilane is formed. Next thereto an aluminum electrode 6 is formed by evaporation of an electron beam evaporation apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54066347A JPS5936836B2 (en) | 1979-05-28 | 1979-05-28 | Amorphous thin film solar cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54066347A JPS5936836B2 (en) | 1979-05-28 | 1979-05-28 | Amorphous thin film solar cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55157276A true JPS55157276A (en) | 1980-12-06 |
JPS5936836B2 JPS5936836B2 (en) | 1984-09-06 |
Family
ID=13313226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54066347A Expired JPS5936836B2 (en) | 1979-05-28 | 1979-05-28 | Amorphous thin film solar cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5936836B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57122583A (en) * | 1981-01-22 | 1982-07-30 | Semiconductor Energy Lab Co Ltd | Photoelectric converter |
JPS5835987A (en) * | 1981-08-28 | 1983-03-02 | Taiyo Yuden Co Ltd | Amorphous silicon solar cell |
US4379943A (en) * | 1981-12-14 | 1983-04-12 | Energy Conversion Devices, Inc. | Current enhanced photovoltaic device |
JPS5954276A (en) * | 1982-09-22 | 1984-03-29 | Sanyo Electric Co Ltd | Photovoltaic device |
JPS61255073A (en) * | 1985-05-07 | 1986-11-12 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
US6043105A (en) * | 1985-05-07 | 2000-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor sensitive devices |
US7038238B1 (en) | 1985-05-07 | 2006-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a non-single crystalline semiconductor layer |
-
1979
- 1979-05-28 JP JP54066347A patent/JPS5936836B2/en not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57122583A (en) * | 1981-01-22 | 1982-07-30 | Semiconductor Energy Lab Co Ltd | Photoelectric converter |
JPS5835987A (en) * | 1981-08-28 | 1983-03-02 | Taiyo Yuden Co Ltd | Amorphous silicon solar cell |
US4379943A (en) * | 1981-12-14 | 1983-04-12 | Energy Conversion Devices, Inc. | Current enhanced photovoltaic device |
FR2518318A1 (en) * | 1981-12-14 | 1983-06-17 | Energy Conversion Devices Inc | PHOTOVOLTAIC DEVICE WITH HIGHER CURRENT GENERATING CAPACITY |
JPS5954276A (en) * | 1982-09-22 | 1984-03-29 | Sanyo Electric Co Ltd | Photovoltaic device |
US6503771B1 (en) | 1983-08-22 | 2003-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor photoelectrically sensitive device |
JPS61255073A (en) * | 1985-05-07 | 1986-11-12 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
US6043105A (en) * | 1985-05-07 | 2000-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor sensitive devices |
US7038238B1 (en) | 1985-05-07 | 2006-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a non-single crystalline semiconductor layer |
Also Published As
Publication number | Publication date |
---|---|
JPS5936836B2 (en) | 1984-09-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55108780A (en) | Thin film solar cell | |
US5045482A (en) | Method of making a tandem PIN semiconductor photoelectric conversion device | |
JPS55125680A (en) | Photovoltaic element | |
JPS56116673A (en) | Amorphous thin film solar cell | |
JPS62142372A (en) | Manufacture of photoelectric converter | |
JPS6030163A (en) | Thin film solar cell module | |
JPH0359588B2 (en) | ||
JPS55157276A (en) | Amorphous thin film solar battery | |
JPH05299677A (en) | Solar battery and its manufacture | |
US4903102A (en) | Semiconductor photoelectric conversion device and method of making the same | |
JPS5688377A (en) | Solar battery and manufacture thereof | |
JPS5963774A (en) | Thin-film silicon solar cell | |
JPS57187975A (en) | Photoelectric converter | |
JPS6225275B2 (en) | ||
JPS62256481A (en) | Semiconductor device | |
JPS6095977A (en) | Photovoltaic device | |
JPH049389B2 (en) | ||
JPS57143874A (en) | Manufacture of solar cell | |
JPS61222278A (en) | Photovoltaic device | |
JPS5996775A (en) | Amorphous silicon photoelectric conversion device | |
JPS55160475A (en) | Amorphous thin film solar battery | |
JP3002162B2 (en) | Solar cell | |
JPS62262469A (en) | Manufacture of photoelectric conversion device | |
JPH0597413A (en) | Amorphous multicomponent semiconductor and device using the same | |
JPS6191972A (en) | Solar battery |