JPS6160592B2 - - Google Patents
Info
- Publication number
- JPS6160592B2 JPS6160592B2 JP49134668A JP13466874A JPS6160592B2 JP S6160592 B2 JPS6160592 B2 JP S6160592B2 JP 49134668 A JP49134668 A JP 49134668A JP 13466874 A JP13466874 A JP 13466874A JP S6160592 B2 JPS6160592 B2 JP S6160592B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor substrate
- charge
- semiconductor layer
- silicon semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 description 15
- 238000001444 catalytic combustion detection Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49134668A JPS6160592B2 (ko) | 1974-11-21 | 1974-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49134668A JPS6160592B2 (ko) | 1974-11-21 | 1974-11-21 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62214602A Division JPS63190383A (ja) | 1987-08-28 | 1987-08-28 | 電荷転送デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5160186A JPS5160186A (ko) | 1976-05-25 |
| JPS6160592B2 true JPS6160592B2 (ko) | 1986-12-22 |
Family
ID=15133755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49134668A Expired JPS6160592B2 (ko) | 1974-11-21 | 1974-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6160592B2 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3985449A (en) * | 1975-02-07 | 1976-10-12 | International Business Machines Corporation | Semiconductor color detector |
| JPS52100922A (en) * | 1976-02-20 | 1977-08-24 | Matsushita Electronics Corp | Solid pickup equipment |
| JPS5823992B2 (ja) * | 1977-01-24 | 1983-05-18 | 株式会社日立製作所 | 固体撮像装置 |
| JPS5838081A (ja) * | 1981-08-29 | 1983-03-05 | Sony Corp | 固体撮像装置 |
| JPS60213061A (ja) * | 1984-04-09 | 1985-10-25 | Nec Corp | 電荷転送デバイス |
| JPS60244068A (ja) * | 1984-05-18 | 1985-12-03 | Nec Corp | 埋込みチヤネル電荷結合素子 |
-
1974
- 1974-11-21 JP JP49134668A patent/JPS6160592B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5160186A (ko) | 1976-05-25 |
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