JPS6160502B2 - - Google Patents

Info

Publication number
JPS6160502B2
JPS6160502B2 JP57178897A JP17889782A JPS6160502B2 JP S6160502 B2 JPS6160502 B2 JP S6160502B2 JP 57178897 A JP57178897 A JP 57178897A JP 17889782 A JP17889782 A JP 17889782A JP S6160502 B2 JPS6160502 B2 JP S6160502B2
Authority
JP
Japan
Prior art keywords
substrate
ions
bubble
temperature
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57178897A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5968888A (ja
Inventor
Tsutomu Myashita
Keiichi Betsui
Yoshio Sato
Makoto Oohashi
Kazuo Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57178897A priority Critical patent/JPS5968888A/ja
Publication of JPS5968888A publication Critical patent/JPS5968888A/ja
Publication of JPS6160502B2 publication Critical patent/JPS6160502B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
JP57178897A 1982-10-12 1982-10-12 イオン注入バブルデバイスの製造方法 Granted JPS5968888A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57178897A JPS5968888A (ja) 1982-10-12 1982-10-12 イオン注入バブルデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57178897A JPS5968888A (ja) 1982-10-12 1982-10-12 イオン注入バブルデバイスの製造方法

Publications (2)

Publication Number Publication Date
JPS5968888A JPS5968888A (ja) 1984-04-18
JPS6160502B2 true JPS6160502B2 (en:Method) 1986-12-20

Family

ID=16056597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57178897A Granted JPS5968888A (ja) 1982-10-12 1982-10-12 イオン注入バブルデバイスの製造方法

Country Status (1)

Country Link
JP (1) JPS5968888A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01115307U (en:Method) * 1988-01-29 1989-08-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01115307U (en:Method) * 1988-01-29 1989-08-03

Also Published As

Publication number Publication date
JPS5968888A (ja) 1984-04-18

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