JPS6159831A - ホツトプレ−ト - Google Patents

ホツトプレ−ト

Info

Publication number
JPS6159831A
JPS6159831A JP59181971A JP18197184A JPS6159831A JP S6159831 A JPS6159831 A JP S6159831A JP 59181971 A JP59181971 A JP 59181971A JP 18197184 A JP18197184 A JP 18197184A JP S6159831 A JPS6159831 A JP S6159831A
Authority
JP
Japan
Prior art keywords
heated
heated object
hot plate
heating
moving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59181971A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0149010B2 (enExample
Inventor
Yoshinobu Ono
小野　義暢
Yoshio Watanabe
義雄 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59181971A priority Critical patent/JPS6159831A/ja
Publication of JPS6159831A publication Critical patent/JPS6159831A/ja
Publication of JPH0149010B2 publication Critical patent/JPH0149010B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Drying Of Solid Materials (AREA)
JP59181971A 1984-08-31 1984-08-31 ホツトプレ−ト Granted JPS6159831A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59181971A JPS6159831A (ja) 1984-08-31 1984-08-31 ホツトプレ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59181971A JPS6159831A (ja) 1984-08-31 1984-08-31 ホツトプレ−ト

Publications (2)

Publication Number Publication Date
JPS6159831A true JPS6159831A (ja) 1986-03-27
JPH0149010B2 JPH0149010B2 (enExample) 1989-10-23

Family

ID=16110064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59181971A Granted JPS6159831A (ja) 1984-08-31 1984-08-31 ホツトプレ−ト

Country Status (1)

Country Link
JP (1) JPS6159831A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH023910A (ja) * 1988-06-21 1990-01-09 Tokyo Electron Ltd 加熱装置及び加熱処理装置及び加熱処理方法
JPH03155647A (ja) * 1989-08-08 1991-07-03 Fuji Electric Co Ltd 半導体ウエハ保持装置
JPH09148260A (ja) * 1995-11-28 1997-06-06 Nippon Pillar Packing Co Ltd 半導体ウエハーの加熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH023910A (ja) * 1988-06-21 1990-01-09 Tokyo Electron Ltd 加熱装置及び加熱処理装置及び加熱処理方法
JPH03155647A (ja) * 1989-08-08 1991-07-03 Fuji Electric Co Ltd 半導体ウエハ保持装置
JPH09148260A (ja) * 1995-11-28 1997-06-06 Nippon Pillar Packing Co Ltd 半導体ウエハーの加熱処理装置

Also Published As

Publication number Publication date
JPH0149010B2 (enExample) 1989-10-23

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