JPS6159655B2 - - Google Patents

Info

Publication number
JPS6159655B2
JPS6159655B2 JP54115180A JP11518079A JPS6159655B2 JP S6159655 B2 JPS6159655 B2 JP S6159655B2 JP 54115180 A JP54115180 A JP 54115180A JP 11518079 A JP11518079 A JP 11518079A JP S6159655 B2 JPS6159655 B2 JP S6159655B2
Authority
JP
Japan
Prior art keywords
pull
reaction tube
boat
cylinder
out rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54115180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5640235A (en
Inventor
Shigeru Takeda
Kazuo Kamyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP11518079A priority Critical patent/JPS5640235A/ja
Publication of JPS5640235A publication Critical patent/JPS5640235A/ja
Publication of JPS6159655B2 publication Critical patent/JPS6159655B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/13—
    • H10P72/3311—
JP11518079A 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device Granted JPS5640235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11518079A JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11518079A JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Publications (2)

Publication Number Publication Date
JPS5640235A JPS5640235A (en) 1981-04-16
JPS6159655B2 true JPS6159655B2 (OSRAM) 1986-12-17

Family

ID=14656324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11518079A Granted JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Country Status (1)

Country Link
JP (1) JPS5640235A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431974Y2 (OSRAM) * 1985-09-25 1992-07-31
JPS63282272A (ja) * 1987-05-12 1988-11-18 Teru Sagami Kk サセプタの駆動装置
JP5684171B2 (ja) 2012-02-29 2015-03-11 株式会社東芝 レーザイオン源

Also Published As

Publication number Publication date
JPS5640235A (en) 1981-04-16

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