JPS6159527B2 - - Google Patents

Info

Publication number
JPS6159527B2
JPS6159527B2 JP56130868A JP13086881A JPS6159527B2 JP S6159527 B2 JPS6159527 B2 JP S6159527B2 JP 56130868 A JP56130868 A JP 56130868A JP 13086881 A JP13086881 A JP 13086881A JP S6159527 B2 JPS6159527 B2 JP S6159527B2
Authority
JP
Japan
Prior art keywords
cell
chamber
molecular beam
growth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56130868A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5833825A (ja
Inventor
Hideo Sugiura
Akinori Katsui
Zeio Kamimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56130868A priority Critical patent/JPS5833825A/ja
Publication of JPS5833825A publication Critical patent/JPS5833825A/ja
Publication of JPS6159527B2 publication Critical patent/JPS6159527B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56130868A 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置 Granted JPS5833825A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130868A JPS5833825A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130868A JPS5833825A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5833825A JPS5833825A (ja) 1983-02-28
JPS6159527B2 true JPS6159527B2 (OSRAM) 1986-12-17

Family

ID=15044570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130868A Granted JPS5833825A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5833825A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0451472Y2 (OSRAM) * 1986-08-08 1992-12-03

Also Published As

Publication number Publication date
JPS5833825A (ja) 1983-02-28

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