JPS6158970B2 - - Google Patents

Info

Publication number
JPS6158970B2
JPS6158970B2 JP56130867A JP13086781A JPS6158970B2 JP S6158970 B2 JPS6158970 B2 JP S6158970B2 JP 56130867 A JP56130867 A JP 56130867A JP 13086781 A JP13086781 A JP 13086781A JP S6158970 B2 JPS6158970 B2 JP S6158970B2
Authority
JP
Japan
Prior art keywords
substrate
molecular beam
cooling container
growth chamber
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56130867A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5833824A (ja
Inventor
Hideo Sugiura
Akinori Katsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56130867A priority Critical patent/JPS5833824A/ja
Publication of JPS5833824A publication Critical patent/JPS5833824A/ja
Publication of JPS6158970B2 publication Critical patent/JPS6158970B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56130867A 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置 Granted JPS5833824A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130867A JPS5833824A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130867A JPS5833824A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5833824A JPS5833824A (ja) 1983-02-28
JPS6158970B2 true JPS6158970B2 (OSRAM) 1986-12-13

Family

ID=15044548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130867A Granted JPS5833824A (ja) 1981-08-22 1981-08-22 分子線エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5833824A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2750935B2 (ja) * 1990-03-20 1998-05-18 富士通株式会社 分子線制御方法及び分子線結晶成長装置

Also Published As

Publication number Publication date
JPS5833824A (ja) 1983-02-28

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