JPS6159526B2 - - Google Patents

Info

Publication number
JPS6159526B2
JPS6159526B2 JP52119414A JP11941477A JPS6159526B2 JP S6159526 B2 JPS6159526 B2 JP S6159526B2 JP 52119414 A JP52119414 A JP 52119414A JP 11941477 A JP11941477 A JP 11941477A JP S6159526 B2 JPS6159526 B2 JP S6159526B2
Authority
JP
Japan
Prior art keywords
vapor deposition
vapor
deposited layer
compound
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52119414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5453878A (en
Inventor
Kazuhisa Taketoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Broadcasting Corp
Original Assignee
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Broadcasting Corp filed Critical Japan Broadcasting Corp
Priority to JP11941477A priority Critical patent/JPS5453878A/ja
Publication of JPS5453878A publication Critical patent/JPS5453878A/ja
Publication of JPS6159526B2 publication Critical patent/JPS6159526B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Light Receiving Elements (AREA)
JP11941477A 1977-10-06 1977-10-06 Forming method of vapor deposition layer Granted JPS5453878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11941477A JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11941477A JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Publications (2)

Publication Number Publication Date
JPS5453878A JPS5453878A (en) 1979-04-27
JPS6159526B2 true JPS6159526B2 (enExample) 1986-12-17

Family

ID=14760867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11941477A Granted JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Country Status (1)

Country Link
JP (1) JPS5453878A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174026U (enExample) * 1986-04-24 1987-11-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174026U (enExample) * 1986-04-24 1987-11-05

Also Published As

Publication number Publication date
JPS5453878A (en) 1979-04-27

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