JPS5453878A - Forming method of vapor deposition layer - Google Patents

Forming method of vapor deposition layer

Info

Publication number
JPS5453878A
JPS5453878A JP11941477A JP11941477A JPS5453878A JP S5453878 A JPS5453878 A JP S5453878A JP 11941477 A JP11941477 A JP 11941477A JP 11941477 A JP11941477 A JP 11941477A JP S5453878 A JPS5453878 A JP S5453878A
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition layer
vessel
torr
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11941477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159526B2 (enExample
Inventor
Kazuhisa Taketoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Broadcasting Corp
Original Assignee
Nippon Hoso Kyokai NHK
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Hoso Kyokai NHK, Japan Broadcasting Corp filed Critical Nippon Hoso Kyokai NHK
Priority to JP11941477A priority Critical patent/JPS5453878A/ja
Publication of JPS5453878A publication Critical patent/JPS5453878A/ja
Publication of JPS6159526B2 publication Critical patent/JPS6159526B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Light Receiving Elements (AREA)
JP11941477A 1977-10-06 1977-10-06 Forming method of vapor deposition layer Granted JPS5453878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11941477A JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11941477A JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Publications (2)

Publication Number Publication Date
JPS5453878A true JPS5453878A (en) 1979-04-27
JPS6159526B2 JPS6159526B2 (enExample) 1986-12-17

Family

ID=14760867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11941477A Granted JPS5453878A (en) 1977-10-06 1977-10-06 Forming method of vapor deposition layer

Country Status (1)

Country Link
JP (1) JPS5453878A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174026U (enExample) * 1986-04-24 1987-11-05

Also Published As

Publication number Publication date
JPS6159526B2 (enExample) 1986-12-17

Similar Documents

Publication Publication Date Title
JPS5767938A (en) Production of photoconductive member
JPS5691437A (en) Preparation of metallized element
JPS5562778A (en) Preparation of photoconductor film
US6043106A (en) Method for surface passivation and protection of cadmium zinc telluride crystals
US5723034A (en) Process for forming hydrogenated amorphous silicon film
JPS5453878A (en) Forming method of vapor deposition layer
JPS54104770A (en) Heat treatment method for 3-5 group compound semiconductor
GB2192644A (en) Transparent conductive film and the production thereof
JPS56132750A (en) Photoelectric converter and manufacture
JPS5471987A (en) Production of photo mask
JPS5454589A (en) Photoelectric transducer and production of the same
JPS57194521A (en) Manufacture of thin film semiconductor
JPS5934675A (ja) 受光素子
JPS5774945A (en) Photoconductive film for image pick-up tube
JPS6481276A (en) Semiconductor radiation detector
JPS546793A (en) Photo detector of semiconductor
JPS5564350A (en) Radioactive-ray receiving face
JPS57833A (en) Target for image pick-up tube
JPS5482992A (en) Solar battery and its manufacture
JPS5440073A (en) Film forming method
JPS5247389A (en) Method of forming photoconductive layer
JPS55149193A (en) Manufacture of silicon carbide substrate
JPS558036A (en) Electrode formation
JPS529897A (en) Manufacturing method of thin oxide semiconductor film
JPS61256625A (ja) 薄膜半導体素子の製造方法