JPS6219005B2 - - Google Patents
Info
- Publication number
- JPS6219005B2 JPS6219005B2 JP11131480A JP11131480A JPS6219005B2 JP S6219005 B2 JPS6219005 B2 JP S6219005B2 JP 11131480 A JP11131480 A JP 11131480A JP 11131480 A JP11131480 A JP 11131480A JP S6219005 B2 JPS6219005 B2 JP S6219005B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent electrode
- resistance
- plasma
- sputtering
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 5
- 229910003437 indium oxide Inorganic materials 0.000 claims description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910001887 tin oxide Inorganic materials 0.000 claims description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11131480A JPS6219005B2 (enExample) | 1980-08-12 | 1980-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11131480A JPS6219005B2 (enExample) | 1980-08-12 | 1980-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5736715A JPS5736715A (enExample) | 1982-02-27 |
| JPS6219005B2 true JPS6219005B2 (enExample) | 1987-04-25 |
Family
ID=14558075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11131480A Expired JPS6219005B2 (enExample) | 1980-08-12 | 1980-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219005B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6081710A (ja) * | 1983-10-08 | 1985-05-09 | コニカ株式会社 | 透明導電性光学装置 |
| JP5437583B2 (ja) * | 2008-03-18 | 2014-03-12 | リンテック株式会社 | 金属酸化物の製膜方法 |
-
1980
- 1980-08-12 JP JP11131480A patent/JPS6219005B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5736715A (enExample) | 1982-02-27 |
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