JPS6157904B2 - - Google Patents
Info
- Publication number
- JPS6157904B2 JPS6157904B2 JP6450782A JP6450782A JPS6157904B2 JP S6157904 B2 JPS6157904 B2 JP S6157904B2 JP 6450782 A JP6450782 A JP 6450782A JP 6450782 A JP6450782 A JP 6450782A JP S6157904 B2 JPS6157904 B2 JP S6157904B2
- Authority
- JP
- Japan
- Prior art keywords
- ions
- metal
- treatment method
- ion implantation
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 14
- 238000005468 ion implantation Methods 0.000 claims description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- -1 nitrogen ions Chemical class 0.000 claims description 11
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims 5
- 239000011195 cermet Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6450782A JPS58181864A (ja) | 1982-04-16 | 1982-04-16 | 表面処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6450782A JPS58181864A (ja) | 1982-04-16 | 1982-04-16 | 表面処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58181864A JPS58181864A (ja) | 1983-10-24 |
| JPS6157904B2 true JPS6157904B2 (enrdf_load_stackoverflow) | 1986-12-09 |
Family
ID=13260177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6450782A Granted JPS58181864A (ja) | 1982-04-16 | 1982-04-16 | 表面処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58181864A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01254995A (ja) * | 1988-04-05 | 1989-10-11 | Toshiba Corp | ディスプレイ調節装置 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60103180A (ja) * | 1983-11-11 | 1985-06-07 | Toyota Motor Corp | 鋼板部品の局部強度向上方法 |
| JPS60103179A (ja) * | 1983-11-11 | 1985-06-07 | Toyota Motor Corp | 鋼板部品の局部強度向上方法 |
| JPS62199763A (ja) * | 1986-02-25 | 1987-09-03 | Matsushita Electric Works Ltd | ＴｉＮ膜の形成法 |
| JPS62202074A (ja) * | 1986-02-28 | 1987-09-05 | Hitachi Ltd | イオン注入処理による切削工具の長寿命化方法 |
| JPS62213920A (ja) * | 1986-03-14 | 1987-09-19 | Hitachi Ltd | イオン注入処理したタツプ |
| JPS6345479A (ja) * | 1986-08-09 | 1988-02-26 | Hitachi Ltd | 斜板式圧縮機 |
| JPS6362873A (ja) * | 1986-09-03 | 1988-03-19 | Hitachi Ltd | イオン注入処理した切削工具 |
| JPS6341419U (enrdf_load_stackoverflow) * | 1986-09-03 | 1988-03-18 | ||
| JPS63195265A (ja) * | 1987-02-10 | 1988-08-12 | Nippon Steel Corp | 高エネルギ−ビ−ムによるロ−ルおよび鋼材表面の加工方法および装置 |
| JPS63255357A (ja) * | 1987-04-09 | 1988-10-21 | Hitachi Ltd | タ−ビン動翼とその製造方法 |
| KR20030073693A (ko) * | 2002-03-12 | 2003-09-19 | (주) 유니플라텍 | 혼합이온주입을 이용한 공구의 내마모성 향상기술 |
-
1982
- 1982-04-16 JP JP6450782A patent/JPS58181864A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01254995A (ja) * | 1988-04-05 | 1989-10-11 | Toshiba Corp | ディスプレイ調節装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58181864A (ja) | 1983-10-24 |
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