JPS6157681B2 - - Google Patents

Info

Publication number

JPS6157681B2

JPS6157681B2 JP56052804A JP5280481A JPS6157681B2 JP S6157681 B2 JPS6157681 B2 JP S6157681B2 JP 56052804 A JP56052804 A JP 56052804A JP 5280481 A JP5280481 A JP 5280481A JP S6157681 B2 JPS6157681 B2 JP S6157681B2

Authority

JP

Japan

Prior art keywords

temperature

resistance value

weight

present

composition

Prior art date

1981-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000000203 mixture Substances 0.000 claims description 16
• 229910052751 metal Inorganic materials 0.000 claims description 13
• 239000002184 metal Substances 0.000 claims description 13
• 239000000758 substrate Substances 0.000 claims description 13
• 229910052720 vanadium Inorganic materials 0.000 claims description 5
• 229910052788 barium Inorganic materials 0.000 claims description 4
• 229910052709 silver Inorganic materials 0.000 claims description 3
• LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 3
• DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
• 239000004332 silver Substances 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 description 9
• 230000000052 comparative effect Effects 0.000 description 7
• 230000007423 decrease Effects 0.000 description 7
• 239000000919 ceramic Substances 0.000 description 5
• 230000003647 oxidation Effects 0.000 description 4
• 238000007254 oxidation reaction Methods 0.000 description 4
• 238000004544 sputter deposition Methods 0.000 description 4
• 238000004519 manufacturing process Methods 0.000 description 3
• 239000000843 powder Substances 0.000 description 3
• 238000011109 contamination Methods 0.000 description 2
• 239000013078 crystal Substances 0.000 description 2
• 230000003247 decreasing effect Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 239000012535 impurity Substances 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 229910021542 Vanadium(IV) oxide Inorganic materials 0.000 description 1
• 239000000872 buffer Substances 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 230000006866 deterioration Effects 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1
• 230000002265 prevention Effects 0.000 description 1
• 238000010791 quenching Methods 0.000 description 1
• 230000000171 quenching effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 230000007704 transition Effects 0.000 description 1
• GRUMUEUJTSXQOI-UHFFFAOYSA-N vanadium dioxide Chemical compound O=[V]=O GRUMUEUJTSXQOI-UHFFFAOYSA-N 0.000 description 1