JPS6154112B2 - - Google Patents

Info

Publication number
JPS6154112B2
JPS6154112B2 JP57053396A JP5339682A JPS6154112B2 JP S6154112 B2 JPS6154112 B2 JP S6154112B2 JP 57053396 A JP57053396 A JP 57053396A JP 5339682 A JP5339682 A JP 5339682A JP S6154112 B2 JPS6154112 B2 JP S6154112B2
Authority
JP
Japan
Prior art keywords
cathode
magnetic field
electric field
target
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57053396A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58171569A (ja
Inventor
Hidetoshi Tsucha
Tatsuo Fukami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP5339682A priority Critical patent/JPS58171569A/ja
Publication of JPS58171569A publication Critical patent/JPS58171569A/ja
Publication of JPS6154112B2 publication Critical patent/JPS6154112B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP5339682A 1982-03-31 1982-03-31 スパッタリング方法 Granted JPS58171569A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5339682A JPS58171569A (ja) 1982-03-31 1982-03-31 スパッタリング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5339682A JPS58171569A (ja) 1982-03-31 1982-03-31 スパッタリング方法

Publications (2)

Publication Number Publication Date
JPS58171569A JPS58171569A (ja) 1983-10-08
JPS6154112B2 true JPS6154112B2 (enrdf_load_stackoverflow) 1986-11-20

Family

ID=12941659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5339682A Granted JPS58171569A (ja) 1982-03-31 1982-03-31 スパッタリング方法

Country Status (1)

Country Link
JP (1) JPS58171569A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199860A (ja) * 1982-05-17 1983-11-21 Hitachi Ltd 成膜方法
US5744011A (en) * 1993-03-18 1998-04-28 Kabushiki Kaisha Toshiba Sputtering apparatus and sputtering method
JP4537899B2 (ja) * 2005-07-05 2010-09-08 富士通セミコンダクター株式会社 成膜方法及び半導体装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU475272B2 (en) * 1971-09-07 1976-08-19 Felio Corporation Glow discharge method and apparatus
JPS5432638A (en) * 1977-08-17 1979-03-10 Asahi Denka Kogyo Kk Cosmetic base composition
FR2423065A1 (fr) * 1978-04-12 1979-11-09 Battelle Memorial Institute Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede
JPS5816068A (ja) * 1981-07-22 1983-01-29 Hitachi Ltd プレ−ナマグネトロン方式のスパッタリング方法

Also Published As

Publication number Publication date
JPS58171569A (ja) 1983-10-08

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