JPH021221B2 - - Google Patents

Info

Publication number
JPH021221B2
JPH021221B2 JP59241313A JP24131384A JPH021221B2 JP H021221 B2 JPH021221 B2 JP H021221B2 JP 59241313 A JP59241313 A JP 59241313A JP 24131384 A JP24131384 A JP 24131384A JP H021221 B2 JPH021221 B2 JP H021221B2
Authority
JP
Japan
Prior art keywords
target
film
ions
ion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59241313A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61119670A (ja
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP24131384A priority Critical patent/JPS61119670A/ja
Publication of JPS61119670A publication Critical patent/JPS61119670A/ja
Publication of JPH021221B2 publication Critical patent/JPH021221B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP24131384A 1984-11-15 1984-11-15 膜形成方法 Granted JPS61119670A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24131384A JPS61119670A (ja) 1984-11-15 1984-11-15 膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24131384A JPS61119670A (ja) 1984-11-15 1984-11-15 膜形成方法

Publications (2)

Publication Number Publication Date
JPS61119670A JPS61119670A (ja) 1986-06-06
JPH021221B2 true JPH021221B2 (enrdf_load_stackoverflow) 1990-01-10

Family

ID=17072431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24131384A Granted JPS61119670A (ja) 1984-11-15 1984-11-15 膜形成方法

Country Status (1)

Country Link
JP (1) JPS61119670A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161168A (ja) * 1986-12-24 1988-07-04 Fujitsu Ltd イオンビ−ムスパツタによる成膜方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0788573B2 (ja) * 1983-07-28 1995-09-27 株式会社東芝 膜形成方法

Also Published As

Publication number Publication date
JPS61119670A (ja) 1986-06-06

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