JPS6152986B2 - - Google Patents

Info

Publication number
JPS6152986B2
JPS6152986B2 JP53122626A JP12262678A JPS6152986B2 JP S6152986 B2 JPS6152986 B2 JP S6152986B2 JP 53122626 A JP53122626 A JP 53122626A JP 12262678 A JP12262678 A JP 12262678A JP S6152986 B2 JPS6152986 B2 JP S6152986B2
Authority
JP
Japan
Prior art keywords
layer
poly
film
resistance
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53122626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5550640A (en
Inventor
Sunao Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12262678A priority Critical patent/JPS5550640A/ja
Priority to US06/078,783 priority patent/US4309224A/en
Publication of JPS5550640A publication Critical patent/JPS5550640A/ja
Publication of JPS6152986B2 publication Critical patent/JPS6152986B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP12262678A 1978-10-06 1978-10-06 Preparation of semiconductor device Granted JPS5550640A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12262678A JPS5550640A (en) 1978-10-06 1978-10-06 Preparation of semiconductor device
US06/078,783 US4309224A (en) 1978-10-06 1979-09-25 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12262678A JPS5550640A (en) 1978-10-06 1978-10-06 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5550640A JPS5550640A (en) 1980-04-12
JPS6152986B2 true JPS6152986B2 (enExample) 1986-11-15

Family

ID=14840611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12262678A Granted JPS5550640A (en) 1978-10-06 1978-10-06 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5550640A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257476U (enExample) * 1988-10-21 1990-04-25

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198378A (en) * 1988-10-31 1993-03-30 Texas Instruments Incorporated Process of fabricating elevated source/drain transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257476U (enExample) * 1988-10-21 1990-04-25

Also Published As

Publication number Publication date
JPS5550640A (en) 1980-04-12

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