JPS6149826B2 - - Google Patents
Info
- Publication number
- JPS6149826B2 JPS6149826B2 JP53145602A JP14560278A JPS6149826B2 JP S6149826 B2 JPS6149826 B2 JP S6149826B2 JP 53145602 A JP53145602 A JP 53145602A JP 14560278 A JP14560278 A JP 14560278A JP S6149826 B2 JPS6149826 B2 JP S6149826B2
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- oxide film
- film
- layer polycrystalline
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560278A JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560278A JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5572076A JPS5572076A (en) | 1980-05-30 |
| JPS6149826B2 true JPS6149826B2 (US08063081-20111122-C00044.png) | 1986-10-31 |
Family
ID=15388842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14560278A Granted JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5572076A (US08063081-20111122-C00044.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0416816Y2 (US08063081-20111122-C00044.png) * | 1986-06-23 | 1992-04-15 |
-
1978
- 1978-11-24 JP JP14560278A patent/JPS5572076A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0416816Y2 (US08063081-20111122-C00044.png) * | 1986-06-23 | 1992-04-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5572076A (en) | 1980-05-30 |
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