JPS6149659B2 - - Google Patents

Info

Publication number
JPS6149659B2
JPS6149659B2 JP964477A JP964477A JPS6149659B2 JP S6149659 B2 JPS6149659 B2 JP S6149659B2 JP 964477 A JP964477 A JP 964477A JP 964477 A JP964477 A JP 964477A JP S6149659 B2 JPS6149659 B2 JP S6149659B2
Authority
JP
Japan
Prior art keywords
mask
cleaning
article
unloader
scrub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP964477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5396265A (en
Inventor
Itaru Donomae
Soichi Tsuzawa
Masahiro Dan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP964477A priority Critical patent/JPS5396265A/ja
Publication of JPS5396265A publication Critical patent/JPS5396265A/ja
Publication of JPS6149659B2 publication Critical patent/JPS6149659B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP964477A 1977-02-02 1977-02-02 Automatic article washing apparatus Granted JPS5396265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP964477A JPS5396265A (en) 1977-02-02 1977-02-02 Automatic article washing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP964477A JPS5396265A (en) 1977-02-02 1977-02-02 Automatic article washing apparatus

Publications (2)

Publication Number Publication Date
JPS5396265A JPS5396265A (en) 1978-08-23
JPS6149659B2 true JPS6149659B2 (enrdf_load_stackoverflow) 1986-10-30

Family

ID=11725917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP964477A Granted JPS5396265A (en) 1977-02-02 1977-02-02 Automatic article washing apparatus

Country Status (1)

Country Link
JP (1) JPS5396265A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60103349A (ja) * 1983-11-10 1985-06-07 Nippon Kogaku Kk <Nikon> 基板の洗浄装置
JPS63123483A (ja) * 1986-11-11 1988-05-27 三菱マテリアル株式会社 キヤリアプレ−トの洗浄機
JP2746669B2 (ja) * 1989-07-20 1998-05-06 東京エレクトロン株式会社 洗浄装置及び洗浄方法

Also Published As

Publication number Publication date
JPS5396265A (en) 1978-08-23

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