JPS6148255B2 - - Google Patents
Info
- Publication number
- JPS6148255B2 JPS6148255B2 JP52005504A JP550477A JPS6148255B2 JP S6148255 B2 JPS6148255 B2 JP S6148255B2 JP 52005504 A JP52005504 A JP 52005504A JP 550477 A JP550477 A JP 550477A JP S6148255 B2 JPS6148255 B2 JP S6148255B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- mask
- photosensitive
- wafer
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 36
- 238000000034 method Methods 0.000 description 21
- 230000000903 blocking effect Effects 0.000 description 15
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 10
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP550477A JPS5390873A (en) | 1977-01-21 | 1977-01-21 | Printing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP550477A JPS5390873A (en) | 1977-01-21 | 1977-01-21 | Printing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5390873A JPS5390873A (en) | 1978-08-10 |
| JPS6148255B2 true JPS6148255B2 (enrdf_load_stackoverflow) | 1986-10-23 |
Family
ID=11613026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP550477A Granted JPS5390873A (en) | 1977-01-21 | 1977-01-21 | Printing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5390873A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188342U (enrdf_load_stackoverflow) * | 1981-05-25 | 1982-11-30 | ||
| DE69128655T2 (de) * | 1990-03-02 | 1998-05-07 | Canon K.K., Tokio/Tokyo | Belichtungsgerät |
-
1977
- 1977-01-21 JP JP550477A patent/JPS5390873A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5390873A (en) | 1978-08-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |