JPS6147067U - 被膜形成装置 - Google Patents
被膜形成装置Info
- Publication number
- JPS6147067U JPS6147067U JP13005084U JP13005084U JPS6147067U JP S6147067 U JPS6147067 U JP S6147067U JP 13005084 U JP13005084 U JP 13005084U JP 13005084 U JP13005084 U JP 13005084U JP S6147067 U JPS6147067 U JP S6147067U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- film forming
- forming device
- mechanisms
- cathode type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 claims 4
- 230000007246 mechanism Effects 0.000 claims 4
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005084U JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005084U JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6147067U true JPS6147067U (ja) | 1986-03-29 |
| JPH0238926Y2 JPH0238926Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-10-19 |
Family
ID=30688659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13005084U Granted JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6147067U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-08-28 JP JP13005084U patent/JPS6147067U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238926Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-10-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6147067U (ja) | 被膜形成装置 | |
| JPS6159661U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| GB1351582A (en) | Ion source | |
| JPS5974659U (ja) | イオン注入装置のイオン発生装置 | |
| JPS6130069U (ja) | 被膜形成装置 | |
| JPS60185656U (ja) | 高周波スパツタ装置 | |
| JPS6231857U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS58120556U (ja) | 質量分析装置のイオン源 | |
| JPS5983971U (ja) | イオンプレ−テイング装置 | |
| JPS60143770U (ja) | 電子衝撃型蒸着装置 | |
| JPS60113367U (ja) | 蒸着用坩堝 | |
| JPS60121252U (ja) | 質量分析装置用イオン源 | |
| JPS60181365U (ja) | イオンプレ−テイング装置 | |
| JPS5979968U (ja) | 熱電子放出型電子銃 | |
| JPH0350328U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS5879844U (ja) | 液体金属イオン源 | |
| JPS60131949U (ja) | 電子銃 | |
| JPS5818966U (ja) | スパツタリング装置 | |
| JPS5811900U (ja) | Ｘ線装置 | |
| JPS6139156U (ja) | 薄膜形成装置 | |
| JPS6085050U (ja) | 電子銃装置 | |
| JPS5916059U (ja) | イオン源 | |
| JPS62157968U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS6251648U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPS5879949U (ja) | イオン源 |