JPS6146963B2 - - Google Patents

Info

Publication number
JPS6146963B2
JPS6146963B2 JP53165818A JP16581878A JPS6146963B2 JP S6146963 B2 JPS6146963 B2 JP S6146963B2 JP 53165818 A JP53165818 A JP 53165818A JP 16581878 A JP16581878 A JP 16581878A JP S6146963 B2 JPS6146963 B2 JP S6146963B2
Authority
JP
Japan
Prior art keywords
insulating film
conductive layer
semiconductor substrate
ions
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53165818A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5593267A (en
Inventor
Motoo Nakano
Haruhisa Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16581878A priority Critical patent/JPS5593267A/ja
Publication of JPS5593267A publication Critical patent/JPS5593267A/ja
Publication of JPS6146963B2 publication Critical patent/JPS6146963B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP16581878A 1978-12-30 1978-12-30 Manufacture of semiconductor device Granted JPS5593267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16581878A JPS5593267A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16581878A JPS5593267A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5593267A JPS5593267A (en) 1980-07-15
JPS6146963B2 true JPS6146963B2 (Direct) 1986-10-16

Family

ID=15819569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16581878A Granted JPS5593267A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5593267A (Direct)

Also Published As

Publication number Publication date
JPS5593267A (en) 1980-07-15

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