JPS6143559B2 - - Google Patents

Info

Publication number
JPS6143559B2
JPS6143559B2 JP56196794A JP19679481A JPS6143559B2 JP S6143559 B2 JPS6143559 B2 JP S6143559B2 JP 56196794 A JP56196794 A JP 56196794A JP 19679481 A JP19679481 A JP 19679481A JP S6143559 B2 JPS6143559 B2 JP S6143559B2
Authority
JP
Japan
Prior art keywords
blade
stator
blades
stator member
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56196794A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5898696A (ja
Inventor
Yasuo Minoshima
Kazuaki Nakamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19679481A priority Critical patent/JPS5898696A/ja
Publication of JPS5898696A publication Critical patent/JPS5898696A/ja
Publication of JPS6143559B2 publication Critical patent/JPS6143559B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP19679481A 1981-12-09 1981-12-09 分子ポンプのステ−タ Granted JPS5898696A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19679481A JPS5898696A (ja) 1981-12-09 1981-12-09 分子ポンプのステ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19679481A JPS5898696A (ja) 1981-12-09 1981-12-09 分子ポンプのステ−タ

Publications (2)

Publication Number Publication Date
JPS5898696A JPS5898696A (ja) 1983-06-11
JPS6143559B2 true JPS6143559B2 (el) 1986-09-27

Family

ID=16363754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19679481A Granted JPS5898696A (ja) 1981-12-09 1981-12-09 分子ポンプのステ−タ

Country Status (1)

Country Link
JP (1) JPS5898696A (el)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133953U (el) * 1989-04-15 1990-11-07

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143192U (ja) * 1984-03-02 1985-09-21 セイコー精機株式会社 タ−ボ分子ポンプの翼形状
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets
JP6241222B2 (ja) 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
JP7052752B2 (ja) * 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5849434Y2 (ja) * 1978-12-28 1983-11-11 株式会社荏原製作所 渦流ポンプ用の羽根車

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133953U (el) * 1989-04-15 1990-11-07

Also Published As

Publication number Publication date
JPS5898696A (ja) 1983-06-11

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