JPS6142420B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a die position correction device in a die bonder.

For die bonders, for example, JP-A-53-
As shown in Japanese Patent No. 126269, semiconductor pellets (hereinafter referred to as pellets) on a wafer are sucked one by one by a suction collet, transferred to a die position correction section, and the pellets are removed by four positioning claws of a die position correction device. A method is adopted in which the material is held from four directions, the position is corrected, the material is adsorbed again using a suction collet, the material is transferred onto a lead frame, and the material is then bonded to the lead frame. However, since the conventional die position correction device is configured to operate four positioning claws in four directions independently, the die position correction accuracy is poor and the structure is complicated.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and it is an object of the present invention to provide a die position correction device that has a simple structure and can improve die position correction accuracy.

Hereinafter, the present invention will be explained with reference to illustrated embodiments.

Fig. 1 is a plan view showing an embodiment of the die position correction device according to the present invention, Fig. 2 is an enlarged cross-sectional view taken along line 2-2 in Fig. 1, and Fig. 3 is a state in which the cover is removed in Fig. 2. FIG. 4 is a sectional view taken along line 4--4 in FIG. As shown in FIGS. 2 to 4, a slider guide stand 12 is fixed to the base plate 10 with screws 11. As shown in FIGS. A sample mount 13 is inserted into a cylindrical sample mount mounting hole 12 a formed in the center of the slider guide 12 and fixed to the slider guide 12 with screws 14 . Also, approximately 3 points on the circumference of the bottom surface of the sample mounting table 13
Sample mounting table height adjustment screws 15 are screwed into the slider guide table 12 corresponding to the equally divided positions.
This screw 15 allows the height of the sample mounting table 13 to be adjusted. Further, a suction hole 13a for sucking the pellet 60 is provided in the center of the sample mounting table 13, and a U-shaped groove 12 formed in the slider guide table 12 is provided on the side surface of the sample mounting table 13.
A vacuum connection pipe 16 connected to a vacuum pump (not shown) through b is fixed, and the suction hole 13a communicates with the vacuum connection pipe 16.

Four concave slider grooves 12c are formed radially from the center at positions dividing the circumference into four on the upper surface of the slider guide base 12, and a slider 20 can freely slide into each of the slider grooves 12c. It is arranged. A correction claw 22 is fixed to the upper surface of the slider 20 by a mounting screw 21. Further, a claw correction screw 23 is screwed into one end of the outer side of the slider 20, and this claw correction screw 2
The flange portion 23a provided at 3 engages with a notch formed on the side surface of the correction claw 22. Therefore, by loosening the mounting screw 21 and turning the claw correction screw 23, the correction claw 22 can be moved forward or backward, and thereby the correction claw 22 can be adjusted according to the size of the pellet 60. Further, a slider operating cam 24 is rotatably provided on the lower outer periphery of the slider guide base 12, and four recesses 24a are formed on the outer periphery of the slider operating cam 24 in correspondence with the slider 20. Then, the slider 20 is arranged so as to correspond to the outer periphery of the slider operating cam 24.
A bearing shaft 26 holding a bearing 25 is fixed to the bottom surface of the slider 25, and a spring 28 held by a pin 27 implanted in the slider guide base 12 so that the bearing 25 comes into pressure contact with the slider operating cam 24 20 is energized. Further, on the top surface of the slider guide stand 12, a first
A circular hole 29 in the center as shown in Figure 2.
A cover 29 provided with a is fixed with mounting screws 30.

One end of a lever 40 is fixed to the upper surface of the slider operating cam 24 as shown in FIG. 4, and the other end of this lever 40 is rotated by a fulcrum pin 42 at one end of a link 41 as shown in FIG. It is freely supported. The other end of the link 41 is a rotating arm 44 rotatably supported on an arm fulcrum shaft 43.
It is rotatably supported at one end by a link pin 45. On the other hand, a rotary arm operating cam 51 is attached to a camshaft 50 rotated by a motor (not shown).
is fixed. In this embodiment, two large-diameter portions 51a and two small-diameter portions 51b are alternately formed so that a series of operations can be performed by half a rotation of the rotary arm operating cam 51. A cam follower 52 is rotatably provided on the rotary arm 44 in correspondence with the cam 51, and the rotary arm 44 is biased by a spring 53 so that the cam follower 52 comes into pressure contact with the rotary arm operating cam 51. There is.

Next, the operation will be explained. Before operation, the large diameter portion 51a of the rotating arm operating cam 51 is in contact with the cam follower 52, and in this state, the bearing 25 is in pressure contact with the large diameter portion 24b of the slider operating cam 24, and the correction claw 22 is in contact with the large diameter portion 24b of the slider operating cam 24. is in a backward state. Now, when the pellet 60 is adsorbed and transferred by a vacuum suction collet (not shown) and placed on the center of the sample mounting table 13, the vacuum pump works and the pellet 60 is transferred to the sample through the vacuum connection pipe 16 and the suction hole 13a. It is attracted to the mounting table 13.
Next, the motor is driven to rotate the camshaft 50, and the cam follower 52 passes through the downward curve of the rotary arm operating cam 51 and comes into contact with the small diameter portion 51b. This results in
The rotating arm 44 rotates in the direction of arrow A around the arm fulcrum shaft 43, and rotates the lever 40 in the direction of arrow B via the link 41. As the lever 40 rotates, the slider operating cam 24 also rotates in the same direction, and the recess 24a of the slider operating cam 24 is located at a position corresponding to the bearing 25. As a result, the bearing 25 is moved closer to the recessed portion 2 than the large diameter portion 24b.
4a, and move the correction claw 22 together with the slider 20.
slides toward the center to correct the position of the pellet 60. That is, the pellet 60 has four correction claws 2.
2, it is held in place from all sides and corrected. In this case, since the pellet 60 is vacuum-adsorbed to the sample mounting table 13, its position is corrected by the pressure of the correcting claw 22 without lifting it from the sample mounting table 13.

When the position correction of the pellet 60 is completed, the rotating arm operating cam 5 is then rotated by the rotation of the camshaft 50.
The cam follower 52 comes into contact with the large diameter portion 51a after passing through the upward curve 1. As a result, the rotating arm 44
rotates in the opposite direction, and the lever 40 and slider operating cam 24 also operate in the opposite direction via the link 41. Therefore, the bearing 25 is moved from the recess 24a of the slider operating cam 24 to the large diameter portion 24b.
The correction claw 2 is pushed up along with the slider 20.
2 retreats and leaves the pellet 60. and,
The vacuum operation for sucking the pellet 60 onto the sample stage 13 is stopped. Next, the pellet 60 whose position was corrected
is adsorbed and transferred by a vacuum suction head,
Bonded to a lead frame (not shown). This completes one cycle. From then on,
By repeating the above operation, the pellet 60 is sequentially moved to the correction claw 2.
Fixed in 2.

In this way, the four correction claws 22 operate simultaneously as the slider actuating cam 24 rotates to remove the pellet 6.
Since the pellet 60 is corrected by holding it from all sides, the position of the pellet 60 can be corrected with high accuracy.

In the above embodiment, the rotating arm 44 connected to the lever 40 via the link 41 is swung by the rotating arm operating cam 51 as the driving means for the slider operating cam 24.
The lever 40 may be driven directly by an air or hydraulic cylinder, a solenoid, a rack mechanism, or the like. Further, the slider operating cam 24 may be rotated intermittently in one direction instead of reciprocating. Further, the sample mounting table 13 may be formed integrally with the slider guide table 12. Also, the correction claw 22 is also the slider 2.
It may be formed integrally with 0.

As is clear from the above description, according to the die position correction device of the present invention, the four correction claws are configured to operate simultaneously by the rotation of the slider operating cam, so the structure is simple and the die position adjustment device of the present invention is simple. Position correction can be performed accurately and with high precision.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing an embodiment of the die position correction device according to the present invention, Fig. 2 is an enlarged cross-sectional view taken along line 2-2 in Fig. 1, and Fig. 3 is a state in which the cover is removed in Fig. 2. FIG. 4 is a sectional view taken along line 4--4 in FIG. 12...Slider guide stand, 12c...Slider groove, 13...Sample mounting table, 20...Slider, 22...Correction claw, 24...Slider operating cam, 24a...Recess, 28...Spring, 40... ... Lever, 41 ... Link, 44 ... Rotating arm, 5
0...camshaft, 51...cam, 60...pellet.

Claims (1)

[Claims] 1. A slider guide table in which four slider grooves are formed radially orthogonally to each other and have a sample placement part in the center; a slider that is slidably provided in each of the slider grooves and has a correction claw; A slider actuating cam is rotatably provided around the center of the slider guide base, and has a recess formed on its outer periphery in a positional relationship such that the four correction claws simultaneously clamp the die; A die position correction device comprising a biasing member that is brought into elastic pressure contact with the outer circumference of a slider operating cam, and a driving means that rotates the slider operating cam reciprocatingly or in one direction.