JPS52135064U - - Google Patents
Info
- Publication number
- JPS52135064U JPS52135064U JP4257476U JP4257476U JPS52135064U JP S52135064 U JPS52135064 U JP S52135064U JP 4257476 U JP4257476 U JP 4257476U JP 4257476 U JP4257476 U JP 4257476U JP S52135064 U JPS52135064 U JP S52135064U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257476U JPS52135064U (en) | 1976-04-08 | 1976-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4257476U JPS52135064U (en) | 1976-04-08 | 1976-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52135064U true JPS52135064U (en) | 1977-10-14 |
Family
ID=28501635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4257476U Pending JPS52135064U (en) | 1976-04-08 | 1976-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52135064U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57138596A (en) * | 1981-02-13 | 1982-08-26 | Shinkawa Seisakusho Kk | Compensator for position of die |
| JPS592135U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | wafer rotation device |
-
1976
- 1976-04-08 JP JP4257476U patent/JPS52135064U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57138596A (en) * | 1981-02-13 | 1982-08-26 | Shinkawa Seisakusho Kk | Compensator for position of die |
| JPS592135U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | wafer rotation device |