JPS6142144A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6142144A
JPS6142144A JP59164085A JP16408584A JPS6142144A JP S6142144 A JPS6142144 A JP S6142144A JP 59164085 A JP59164085 A JP 59164085A JP 16408584 A JP16408584 A JP 16408584A JP S6142144 A JPS6142144 A JP S6142144A
Authority
JP
Japan
Prior art keywords
nitride film
main surface
glass
oxide film
connecting hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59164085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123940B2 (enExample
Inventor
Ryoichi Kobayashi
亮一 小林
Seiji Fuji
富士　聖司
Kenji Ueda
上田　健司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sansha Electric Manufacturing Co Ltd
Original Assignee
Sansha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sansha Electric Manufacturing Co Ltd filed Critical Sansha Electric Manufacturing Co Ltd
Priority to JP59164085A priority Critical patent/JPS6142144A/ja
Publication of JPS6142144A publication Critical patent/JPS6142144A/ja
Publication of JPH0123940B2 publication Critical patent/JPH0123940B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP59164085A 1984-08-03 1984-08-03 半導体装置の製造方法 Granted JPS6142144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59164085A JPS6142144A (ja) 1984-08-03 1984-08-03 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59164085A JPS6142144A (ja) 1984-08-03 1984-08-03 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6142144A true JPS6142144A (ja) 1986-02-28
JPH0123940B2 JPH0123940B2 (enExample) 1989-05-09

Family

ID=15786491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59164085A Granted JPS6142144A (ja) 1984-08-03 1984-08-03 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6142144A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136444A (ja) * 1991-11-15 1993-06-01 Sharp Corp 太陽電池の製造方法
JPH11297980A (ja) * 1998-03-30 1999-10-29 General Semiconductor Inc のこ引きにより切り離されるメサ構造の半導体チップ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136444A (ja) * 1991-11-15 1993-06-01 Sharp Corp 太陽電池の製造方法
JPH11297980A (ja) * 1998-03-30 1999-10-29 General Semiconductor Inc のこ引きにより切り離されるメサ構造の半導体チップ

Also Published As

Publication number Publication date
JPH0123940B2 (enExample) 1989-05-09

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