JPH0546972B2 - - Google Patents

Info

Publication number
JPH0546972B2
JPH0546972B2 JP17827487A JP17827487A JPH0546972B2 JP H0546972 B2 JPH0546972 B2 JP H0546972B2 JP 17827487 A JP17827487 A JP 17827487A JP 17827487 A JP17827487 A JP 17827487A JP H0546972 B2 JPH0546972 B2 JP H0546972B2
Authority
JP
Japan
Prior art keywords
mesa
layer
material layer
etching
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17827487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6421928A (en
Inventor
Koji Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP17827487A priority Critical patent/JPS6421928A/ja
Publication of JPS6421928A publication Critical patent/JPS6421928A/ja
Publication of JPH0546972B2 publication Critical patent/JPH0546972B2/ja
Granted legal-status Critical Current

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  • Led Devices (AREA)
  • Weting (AREA)
JP17827487A 1987-07-16 1987-07-16 Manufacture of semiconductor device Granted JPS6421928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17827487A JPS6421928A (en) 1987-07-16 1987-07-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17827487A JPS6421928A (en) 1987-07-16 1987-07-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6421928A JPS6421928A (en) 1989-01-25
JPH0546972B2 true JPH0546972B2 (enExample) 1993-07-15

Family

ID=16045606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17827487A Granted JPS6421928A (en) 1987-07-16 1987-07-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6421928A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112022003396T5 (de) * 2021-07-02 2024-04-18 Ams-Osram International Gmbh Optoelektronisches halbleiterbauelement, anordnung von optoelektronischen halbleiterbauelementen und verfahren zur herstellung eines optoelektronischen halbleiterbauelements

Also Published As

Publication number Publication date
JPS6421928A (en) 1989-01-25

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